JP2011238615A5 - - Google Patents

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Publication number
JP2011238615A5
JP2011238615A5 JP2011105205A JP2011105205A JP2011238615A5 JP 2011238615 A5 JP2011238615 A5 JP 2011238615A5 JP 2011105205 A JP2011105205 A JP 2011105205A JP 2011105205 A JP2011105205 A JP 2011105205A JP 2011238615 A5 JP2011238615 A5 JP 2011238615A5
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JP
Japan
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electrons
detector
energy
electron
energy range
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JP2011105205A
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English (en)
Japanese (ja)
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JP5968597B2 (ja
JP2011238615A (ja
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Priority claimed from EP10163505A external-priority patent/EP2388796A1/en
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JP2011105205A 2010-05-12 2011-05-10 サンプルを解析する方法及びそのための透過型電子顕微鏡 Active JP5968597B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US33383210P 2010-05-12 2010-05-12
US61/333,832 2010-05-12
EP10163505.0 2010-05-21
EP10163505A EP2388796A1 (en) 2010-05-21 2010-05-21 Simultaneous electron detection

Publications (3)

Publication Number Publication Date
JP2011238615A JP2011238615A (ja) 2011-11-24
JP2011238615A5 true JP2011238615A5 (enExample) 2014-06-19
JP5968597B2 JP5968597B2 (ja) 2016-08-10

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JP2011105205A Active JP5968597B2 (ja) 2010-05-12 2011-05-10 サンプルを解析する方法及びそのための透過型電子顕微鏡

Country Status (4)

Country Link
US (1) US8859966B2 (enExample)
EP (2) EP2388796A1 (enExample)
JP (1) JP5968597B2 (enExample)
CN (1) CN102262997B (enExample)

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EP2461348A1 (en) * 2010-12-06 2012-06-06 FEI Company Detector system for use with transmission electron microscope spectroscopy
JP5934513B2 (ja) * 2012-02-09 2016-06-15 日本電子株式会社 透過電子顕微鏡
US9076632B2 (en) 2012-02-12 2015-07-07 El-Mul Technologies Ltd. Position sensitive STEM detector
JP5662393B2 (ja) * 2012-08-30 2015-01-28 株式会社アドバンテスト 電子ビーム検出器、電子ビーム処理装置及び電子ビーム検出器の製造方法
EP2708874A1 (en) 2012-09-12 2014-03-19 Fei Company Method of performing tomographic imaging of a sample in a charged-particle microscope
EP2755021B1 (en) * 2013-01-15 2016-06-22 Carl Zeiss Microscopy Ltd. Method of analyzing a sample and charged particle beam device for analyzing a sample
JP6239246B2 (ja) * 2013-03-13 2017-11-29 株式会社日立ハイテクノロジーズ 荷電粒子線装置、試料観察方法、試料台、観察システム、および発光部材
US8933401B1 (en) * 2013-10-25 2015-01-13 Lawrence Livermore National Security, Llc System and method for compressive scanning electron microscopy
CN106796861B (zh) * 2014-04-17 2019-05-03 加坦公司 混合能量转换与处理检测器
CZ306268B6 (cs) * 2014-06-02 2016-11-09 Delong Instruments A.S. Způsob měření energiového rozdělení emise elektronů z katod s malým virtuálním zdrojem a energiový spektrometr pro provádění tohoto způsobu
EP2993682A1 (en) * 2014-09-04 2016-03-09 Fei Company Method of performing spectroscopy in a transmission charged-particle microscope
EP2998979A1 (en) * 2014-09-22 2016-03-23 Fei Company Improved spectroscopy in a transmission charged-particle microscope
US10192716B2 (en) * 2015-09-21 2019-01-29 Kla-Tencor Corporation Multi-beam dark field imaging
US10366862B2 (en) * 2015-09-21 2019-07-30 KLA-Tencor Corporaton Method and system for noise mitigation in a multi-beam scanning electron microscopy system
EP3065160B1 (en) 2015-11-02 2017-12-20 FEI Company Post column filter with enhanced energy range
JP6702807B2 (ja) * 2016-06-14 2020-06-03 日本電子株式会社 電子顕微鏡および画像取得方法
EP3496129B1 (en) * 2017-12-07 2023-11-01 FEI Company Transmission charged particle microscope with improved eels/eftem module
US11587759B2 (en) 2017-12-28 2023-02-21 Fei Company Method, device and system for reducing off-axial aberration in electron microscopy
US10522323B2 (en) * 2018-04-05 2019-12-31 Fei Company Electron energy loss spectroscopy with adjustable energy resolution
EP3564982A1 (en) * 2018-05-02 2019-11-06 FEI Company Eels detection technique in an electron microscope
JP7210321B2 (ja) * 2019-02-22 2023-01-23 一般財団法人電力中央研究所 転位の検出方法，検出装置，及び検出プログラム
FR3094558B1 (fr) * 2019-03-27 2023-01-06 Centre Nat Rech Scient Dispositif de spectroscopie de perte et de gain d’énergie stimulés ou hors équilibre
EP3751595A1 (en) * 2019-06-14 2020-12-16 FEI Company A method of examining a sample using a charged particle microscope, wherein an electron energy-loss spectroscopy (eels) spectrum is acquired
CN112485277A (zh) * 2019-08-23 2021-03-12 天津理工大学 一种对原子核成像的显微方法
US10923308B1 (en) 2019-11-07 2021-02-16 Fei Company Method and system for energy resolved chroma imaging
US11211223B1 (en) * 2020-08-25 2021-12-28 Fei Company System and method for simultaneous phase contrast imaging and electron energy-loss spectroscopy
EP4002420A1 (en) * 2020-11-12 2022-05-25 FEI Company Method of determining an energy width of a charged particle beam
CN112557430B (zh) * 2020-11-20 2021-10-08 长江存储科技有限责任公司 一种试样的表征方法

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JP2872001B2 (ja) * 1993-07-05 1999-03-17 株式会社日立製作所 分析電子顕微鏡
US5798524A (en) * 1996-08-07 1998-08-25 Gatan, Inc. Automated adjustment of an energy filtering transmission electron microscope
JP3518271B2 (ja) * 1997-08-28 2004-04-12 株式会社日立製作所 エネルギーフィルタおよびこれを備えた電子顕微鏡
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JP2004214057A (ja) * 2003-01-06 2004-07-29 Hitachi High-Technologies Corp 電子線分光器、それを備えた電子顕微鏡及び分析方法
JP3776887B2 (ja) 2003-01-07 2006-05-17 株式会社日立ハイテクノロジーズ 電子線装置
CN1862761A (zh) * 2006-06-09 2006-11-15 清华大学 高稳定能量过滤电子显微像的接收方法及装置
EP2063450A1 (en) 2007-11-21 2009-05-27 FEI Company Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus

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