CN102262997B - 同时电子检测 - Google Patents

同时电子检测 Download PDF

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Publication number
CN102262997B
CN102262997B CN201110122317.9A CN201110122317A CN102262997B CN 102262997 B CN102262997 B CN 102262997B CN 201110122317 A CN201110122317 A CN 201110122317A CN 102262997 B CN102262997 B CN 102262997B
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CN
China
Prior art keywords
electronics
detector
energy
sample
energy range
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CN201110122317.9A
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English (en)
Chinese (zh)
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CN102262997A (zh
Inventor
P.C.蒂梅杰
B.H.弗雷塔格
S.拉扎尔
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FEI Co
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FEI Co
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/057—Energy or mass filtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2802—Transmission microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2803—Scanning microscopes characterised by the imaging method
    • H01J2237/2804—Scattered primary beam

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
CN201110122317.9A 2010-05-12 2011-05-12 同时电子检测 Active CN102262997B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US33383210P 2010-05-12 2010-05-12
US61/333832 2010-05-12
EP10163505.0 2010-05-21
EP10163505A EP2388796A1 (en) 2010-05-21 2010-05-21 Simultaneous electron detection

Publications (2)

Publication Number Publication Date
CN102262997A CN102262997A (zh) 2011-11-30
CN102262997B true CN102262997B (zh) 2016-03-16

Family

ID=42670487

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201110122317.9A Active CN102262997B (zh) 2010-05-12 2011-05-12 同时电子检测

Country Status (4)

Country Link
US (1) US8859966B2 (enExample)
EP (2) EP2388796A1 (enExample)
JP (1) JP5968597B2 (enExample)
CN (1) CN102262997B (enExample)

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JP5934513B2 (ja) * 2012-02-09 2016-06-15 日本電子株式会社 透過電子顕微鏡
WO2013118111A1 (en) 2012-02-12 2013-08-15 El-Mul Technologies Ltd. Position sensitive stem detector
JP5662393B2 (ja) * 2012-08-30 2015-01-28 株式会社アドバンテスト 電子ビーム検出器、電子ビーム処理装置及び電子ビーム検出器の製造方法
EP2708874A1 (en) 2012-09-12 2014-03-19 Fei Company Method of performing tomographic imaging of a sample in a charged-particle microscope
EP2755021B1 (en) * 2013-01-15 2016-06-22 Carl Zeiss Microscopy Ltd. Method of analyzing a sample and charged particle beam device for analyzing a sample
JP6239246B2 (ja) 2013-03-13 2017-11-29 株式会社日立ハイテクノロジーズ 荷電粒子線装置、試料観察方法、試料台、観察システム、および発光部材
US8933401B1 (en) * 2013-10-25 2015-01-13 Lawrence Livermore National Security, Llc System and method for compressive scanning electron microscopy
EP4075477A3 (en) * 2014-04-17 2024-02-28 Gatan, Inc. Hybrid energy conversion and processing detector
CZ306268B6 (cs) * 2014-06-02 2016-11-09 Delong Instruments A.S. Způsob měření energiového rozdělení emise elektronů z katod s malým virtuálním zdrojem a energiový spektrometr pro provádění tohoto způsobu
EP2993682A1 (en) * 2014-09-04 2016-03-09 Fei Company Method of performing spectroscopy in a transmission charged-particle microscope
EP2998979A1 (en) * 2014-09-22 2016-03-23 Fei Company Improved spectroscopy in a transmission charged-particle microscope
US10366862B2 (en) 2015-09-21 2019-07-30 KLA-Tencor Corporaton Method and system for noise mitigation in a multi-beam scanning electron microscopy system
US10192716B2 (en) * 2015-09-21 2019-01-29 Kla-Tencor Corporation Multi-beam dark field imaging
EP3065160B1 (en) 2015-11-02 2017-12-20 FEI Company Post column filter with enhanced energy range
JP6702807B2 (ja) * 2016-06-14 2020-06-03 日本電子株式会社 電子顕微鏡および画像取得方法
EP3496129B1 (en) * 2017-12-07 2023-11-01 FEI Company Transmission charged particle microscope with improved eels/eftem module
WO2019133433A1 (en) 2017-12-28 2019-07-04 Fei Company Method, device and system for reducing off-axial aberration in electron microscopy
US10522323B2 (en) * 2018-04-05 2019-12-31 Fei Company Electron energy loss spectroscopy with adjustable energy resolution
EP3564982A1 (en) * 2018-05-02 2019-11-06 FEI Company Eels detection technique in an electron microscope
JP7210321B2 (ja) * 2019-02-22 2023-01-23 一般財団法人電力中央研究所 転位の検出方法，検出装置，及び検出プログラム
FR3094558B1 (fr) * 2019-03-27 2023-01-06 Centre Nat Rech Scient Dispositif de spectroscopie de perte et de gain d’énergie stimulés ou hors équilibre
EP3751595A1 (en) * 2019-06-14 2020-12-16 FEI Company A method of examining a sample using a charged particle microscope, wherein an electron energy-loss spectroscopy (eels) spectrum is acquired
CN112485277A (zh) * 2019-08-23 2021-03-12 天津理工大学 一种对原子核成像的显微方法
US10923308B1 (en) 2019-11-07 2021-02-16 Fei Company Method and system for energy resolved chroma imaging
US11211223B1 (en) * 2020-08-25 2021-12-28 Fei Company System and method for simultaneous phase contrast imaging and electron energy-loss spectroscopy
EP4002420A1 (en) * 2020-11-12 2022-05-25 FEI Company Method of determining an energy width of a charged particle beam
CN112557430B (zh) * 2020-11-20 2021-10-08 长江存储科技有限责任公司 一种试样的表征方法

Citations (2)

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Publication number Priority date Publication date Assignee Title
CN1862761A (zh) * 2006-06-09 2006-11-15 清华大学 高稳定能量过滤电子显微像的接收方法及装置
DE19860988B4 (de) * 1997-08-28 2007-12-13 Hitachi, Ltd. Elektronenmikroskop mit Energiefilter

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JP2872001B2 (ja) * 1993-07-05 1999-03-17 株式会社日立製作所 分析電子顕微鏡
US5798524A (en) * 1996-08-07 1998-08-25 Gatan, Inc. Automated adjustment of an energy filtering transmission electron microscope
JP3518271B2 (ja) * 1997-08-28 2004-04-12 株式会社日立製作所 エネルギーフィルタおよびこれを備えた電子顕微鏡
JP2000348670A (ja) * 1999-06-08 2000-12-15 Ricoh Co Ltd 電子線分光装置および電子顕微鏡
EP1209720A3 (en) * 2000-11-21 2006-11-15 Hitachi High-Technologies Corporation Energy spectrum measurement
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JP3789104B2 (ja) * 2002-05-13 2006-06-21 株式会社日立ハイテクノロジーズ 元素分布観察方法及び装置
DE10252129A1 (de) * 2002-11-04 2004-05-27 Omicron Nano Technology Gmbh Energiefilter für elektrisch geladene Teilchen und Verwendung des Energiefilters
JP2004214057A (ja) * 2003-01-06 2004-07-29 Hitachi High-Technologies Corp 電子線分光器、それを備えた電子顕微鏡及び分析方法
JP3776887B2 (ja) 2003-01-07 2006-05-17 株式会社日立ハイテクノロジーズ 電子線装置
EP2063450A1 (en) 2007-11-21 2009-05-27 FEI Company Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
DE19860988B4 (de) * 1997-08-28 2007-12-13 Hitachi, Ltd. Elektronenmikroskop mit Energiefilter
CN1862761A (zh) * 2006-06-09 2006-11-15 清华大学 高稳定能量过滤电子显微像的接收方法及装置

Also Published As

Publication number Publication date
EP2387062B1 (en) 2012-10-17
CN102262997A (zh) 2011-11-30
JP2011238615A (ja) 2011-11-24
US20110278451A1 (en) 2011-11-17
JP5968597B2 (ja) 2016-08-10
EP2387062A1 (en) 2011-11-16
EP2388796A1 (en) 2011-11-23
US8859966B2 (en) 2014-10-14

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