JP2011213445A5 - - Google Patents

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Publication number
JP2011213445A5
JP2011213445A5 JP2010082739A JP2010082739A JP2011213445A5 JP 2011213445 A5 JP2011213445 A5 JP 2011213445A5 JP 2010082739 A JP2010082739 A JP 2010082739A JP 2010082739 A JP2010082739 A JP 2010082739A JP 2011213445 A5 JP2011213445 A5 JP 2011213445A5
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JP
Japan
Prior art keywords
conveyance
transport
levitation
conveying
substrate
Prior art date
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Application number
JP2010082739A
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English (en)
Japanese (ja)
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JP5604940B2 (ja
JP2011213445A (ja
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Priority to JP2010082739A priority Critical patent/JP5604940B2/ja
Priority claimed from JP2010082739A external-priority patent/JP5604940B2/ja
Publication of JP2011213445A publication Critical patent/JP2011213445A/ja
Publication of JP2011213445A5 publication Critical patent/JP2011213445A5/ja
Application granted granted Critical
Publication of JP5604940B2 publication Critical patent/JP5604940B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010082739A 2010-03-31 2010-03-31 浮上搬送装置 Active JP5604940B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010082739A JP5604940B2 (ja) 2010-03-31 2010-03-31 浮上搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010082739A JP5604940B2 (ja) 2010-03-31 2010-03-31 浮上搬送装置

Publications (3)

Publication Number Publication Date
JP2011213445A JP2011213445A (ja) 2011-10-27
JP2011213445A5 true JP2011213445A5 (enExample) 2012-11-15
JP5604940B2 JP5604940B2 (ja) 2014-10-15

Family

ID=44943601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010082739A Active JP5604940B2 (ja) 2010-03-31 2010-03-31 浮上搬送装置

Country Status (1)

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JP (1) JP5604940B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6287089B2 (ja) * 2013-11-13 2018-03-07 村田機械株式会社 基板浮上装置、基板移載装置、および基板搬送装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3876867B2 (ja) * 2003-08-28 2007-02-07 村田機械株式会社 搬送システム
JP4344755B2 (ja) * 2007-04-09 2009-10-14 株式会社日本設計工業 薄板状材料搬送用ローラユニット及び薄板状材料搬送装置
JP2008260591A (ja) * 2007-04-10 2008-10-30 Nippon Sekkei Kogyo:Kk 薄板状材料搬送装置及び方法
JP4801640B2 (ja) * 2007-07-31 2011-10-26 株式会社日本設計工業 薄板状材料搬送装置
JP5422925B2 (ja) * 2008-06-09 2014-02-19 株式会社Ｉｈｉ 浮上搬送装置
WO2011016369A1 (ja) * 2009-08-07 2011-02-10 シャープ株式会社 エア浮上式基板搬送装置

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