JP2015230936A5 - - Google Patents

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Publication number
JP2015230936A5
JP2015230936A5 JP2014115517A JP2014115517A JP2015230936A5 JP 2015230936 A5 JP2015230936 A5 JP 2015230936A5 JP 2014115517 A JP2014115517 A JP 2014115517A JP 2014115517 A JP2014115517 A JP 2014115517A JP 2015230936 A5 JP2015230936 A5 JP 2015230936A5
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JP
Japan
Prior art keywords
substrate
transport
upper roller
width direction
shaft
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JP2014115517A
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English (en)
Japanese (ja)
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JP2015230936A (ja
JP6320849B2 (ja
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Priority to JP2014115517A priority Critical patent/JP6320849B2/ja
Priority claimed from JP2014115517A external-priority patent/JP6320849B2/ja
Publication of JP2015230936A publication Critical patent/JP2015230936A/ja
Publication of JP2015230936A5 publication Critical patent/JP2015230936A5/ja
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Publication of JP6320849B2 publication Critical patent/JP6320849B2/ja
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JP2014115517A 2014-06-04 2014-06-04 基板搬送装置および基板処理装置 Active JP6320849B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014115517A JP6320849B2 (ja) 2014-06-04 2014-06-04 基板搬送装置および基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014115517A JP6320849B2 (ja) 2014-06-04 2014-06-04 基板搬送装置および基板処理装置

Publications (3)

Publication Number Publication Date
JP2015230936A JP2015230936A (ja) 2015-12-21
JP2015230936A5 true JP2015230936A5 (enExample) 2017-03-16
JP6320849B2 JP6320849B2 (ja) 2018-05-09

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ID=54887592

Family Applications (1)

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JP2014115517A Active JP6320849B2 (ja) 2014-06-04 2014-06-04 基板搬送装置および基板処理装置

Country Status (1)

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JP (1) JP6320849B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6531039B2 (ja) * 2015-12-28 2019-06-12 信越ポリマー株式会社 弾性ローラ及び画像形成装置
JP7096746B2 (ja) * 2018-09-21 2022-07-06 株式会社荏原製作所 基板搬送装置および基板搬送装置を備える基板処理装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4881575B2 (ja) * 2005-04-28 2012-02-22 芝浦メカトロニクス株式会社 基板の搬送装置
JP5502443B2 (ja) * 2009-12-05 2014-05-28 芝浦メカトロニクス株式会社 基板の搬送装置
JP2013195667A (ja) * 2012-03-19 2013-09-30 Bridgestone Corp Ｏａローラ

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