JP6320849B2 - 基板搬送装置および基板処理装置 - Google Patents

基板搬送装置および基板処理装置

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Publication number
JP6320849B2
JP6320849B2 JP2014115517A JP2014115517A JP6320849B2 JP 6320849 B2 JP6320849 B2 JP 6320849B2 JP 2014115517 A JP2014115517 A JP 2014115517A JP 2014115517 A JP2014115517 A JP 2014115517A JP 6320849 B2 JP6320849 B2 JP 6320849B2
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Japan
Prior art keywords
substrate
upper roller
transport
shaft
width direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2014115517A
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English (en)
Japanese (ja)
Other versions
JP2015230936A (ja
JP2015230936A5 (enExample
Inventor
大石　浩司
浩司 大石
久顕 宮迫
久顕 宮迫
末吉　秀樹
秀樹 末吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Priority to JP2014115517A priority Critical patent/JP6320849B2/ja
Publication of JP2015230936A publication Critical patent/JP2015230936A/ja
Publication of JP2015230936A5 publication Critical patent/JP2015230936A5/ja
Application granted granted Critical
Publication of JP6320849B2 publication Critical patent/JP6320849B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Rollers For Roller Conveyors For Transfer (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2014115517A 2014-06-04 2014-06-04 基板搬送装置および基板処理装置 Active JP6320849B2 (ja)

Priority Applications (1)

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JP2014115517A JP6320849B2 (ja) 2014-06-04 2014-06-04 基板搬送装置および基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014115517A JP6320849B2 (ja) 2014-06-04 2014-06-04 基板搬送装置および基板処理装置

Publications (3)

Publication Number Publication Date
JP2015230936A JP2015230936A (ja) 2015-12-21
JP2015230936A5 JP2015230936A5 (enExample) 2017-03-16
JP6320849B2 true JP6320849B2 (ja) 2018-05-09

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ID=54887592

Family Applications (1)

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JP2014115517A Active JP6320849B2 (ja) 2014-06-04 2014-06-04 基板搬送装置および基板処理装置

Country Status (1)

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JP (1) JP6320849B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6531039B2 (ja) * 2015-12-28 2019-06-12 信越ポリマー株式会社 弾性ローラ及び画像形成装置
JP7096746B2 (ja) * 2018-09-21 2022-07-06 株式会社荏原製作所 基板搬送装置および基板搬送装置を備える基板処理装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4881575B2 (ja) * 2005-04-28 2012-02-22 芝浦メカトロニクス株式会社 基板の搬送装置
JP5502443B2 (ja) * 2009-12-05 2014-05-28 芝浦メカトロニクス株式会社 基板の搬送装置
JP2013195667A (ja) * 2012-03-19 2013-09-30 Bridgestone Corp Ｏａローラ

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Publication number Publication date
JP2015230936A (ja) 2015-12-21

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