JP2011209575A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2011209575A5 JP2011209575A5 JP2010078214A JP2010078214A JP2011209575A5 JP 2011209575 A5 JP2011209575 A5 JP 2011209575A5 JP 2010078214 A JP2010078214 A JP 2010078214A JP 2010078214 A JP2010078214 A JP 2010078214A JP 2011209575 A5 JP2011209575 A5 JP 2011209575A5
- Authority
- JP
- Japan
- Prior art keywords
- pair
- opposing surfaces
- angle
- optical substrates
- spectroscopic element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 47
- 230000003287 optical effect Effects 0.000 claims description 37
- 230000005484 gravity Effects 0.000 claims description 17
- 230000004069 differentiation Effects 0.000 claims description 2
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical class CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 12
- 238000013016 damping Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010078214A JP5363394B2 (ja) | 2010-03-30 | 2010-03-30 | 可変分光素子 |
| EP11762564A EP2555038A1 (en) | 2010-03-30 | 2011-03-15 | Variable spectral element |
| PCT/JP2011/055996 WO2011122324A1 (ja) | 2010-03-30 | 2011-03-15 | 可変分光素子 |
| CN201180017455.9A CN102822720B (zh) | 2010-03-30 | 2011-03-15 | 可变分光元件 |
| US13/617,939 US8422020B2 (en) | 2010-03-30 | 2012-09-14 | Variable spectral element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010078214A JP5363394B2 (ja) | 2010-03-30 | 2010-03-30 | 可変分光素子 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011209575A JP2011209575A (ja) | 2011-10-20 |
| JP2011209575A5 true JP2011209575A5 (enExample) | 2013-05-16 |
| JP5363394B2 JP5363394B2 (ja) | 2013-12-11 |
Family
ID=44712045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010078214A Expired - Fee Related JP5363394B2 (ja) | 2010-03-30 | 2010-03-30 | 可変分光素子 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8422020B2 (enExample) |
| EP (1) | EP2555038A1 (enExample) |
| JP (1) | JP5363394B2 (enExample) |
| CN (1) | CN102822720B (enExample) |
| WO (1) | WO2011122324A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5363393B2 (ja) * | 2010-03-30 | 2013-12-11 | オリンパス株式会社 | 可変分光素子 |
| JP5363394B2 (ja) | 2010-03-30 | 2013-12-11 | オリンパス株式会社 | 可変分光素子 |
| JP5530375B2 (ja) * | 2011-02-01 | 2014-06-25 | オリンパス株式会社 | 可変分光素子 |
| JP2015141209A (ja) * | 2014-01-27 | 2015-08-03 | セイコーエプソン株式会社 | アクチュエーター制御装置、光学モジュール、及び電子機器 |
| US9568301B2 (en) * | 2014-04-11 | 2017-02-14 | General Electric Company | Systems and methods for capacitive proximity sensing |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06241899A (ja) * | 1993-01-29 | 1994-09-02 | Shimadzu Corp | エタロン駆動機構 |
| CN2276676Y (zh) * | 1996-05-02 | 1998-03-18 | 华中理工大学 | 一种可变形反射镜 |
| KR101073175B1 (ko) * | 2002-01-29 | 2011-10-12 | 파나소닉 주식회사 | 가변형 미러, 및 당해 가변형 미러를 구비한 광 제어 장치 |
| CN100405122C (zh) * | 2002-11-06 | 2008-07-23 | 松下电器产业株式会社 | 带有位移检测功能的微执行器 |
| JP3812550B2 (ja) * | 2003-07-07 | 2006-08-23 | セイコーエプソン株式会社 | 波長可変光フィルタ |
| JPWO2005085125A1 (ja) * | 2004-03-08 | 2007-12-06 | 松下電器産業株式会社 | マイクロアクチュエータ、およびマイクロアクチュエータを備えた装置 |
| JP4710737B2 (ja) | 2006-06-23 | 2011-06-29 | 日産自動車株式会社 | 車両用ブレーキ装置 |
| JP5085101B2 (ja) | 2006-11-17 | 2012-11-28 | オリンパス株式会社 | 可変分光素子 |
| JP2008183350A (ja) * | 2007-01-31 | 2008-08-14 | Olympus Corp | 可変分光素子、分光装置および内視鏡システム |
| JP2008197362A (ja) * | 2007-02-13 | 2008-08-28 | Olympus Corp | 可変分光素子 |
| JP5798709B2 (ja) * | 2009-03-04 | 2015-10-21 | セイコーエプソン株式会社 | 光フィルター及びそれを備えた光モジュール |
| JP2010224011A (ja) * | 2009-03-19 | 2010-10-07 | Olympus Corp | エタロン装置及びそれを備えた光学ユニット |
| JP5363393B2 (ja) * | 2010-03-30 | 2013-12-11 | オリンパス株式会社 | 可変分光素子 |
| JP5363394B2 (ja) | 2010-03-30 | 2013-12-11 | オリンパス株式会社 | 可変分光素子 |
-
2010
- 2010-03-30 JP JP2010078214A patent/JP5363394B2/ja not_active Expired - Fee Related
-
2011
- 2011-03-15 CN CN201180017455.9A patent/CN102822720B/zh not_active Expired - Fee Related
- 2011-03-15 EP EP11762564A patent/EP2555038A1/en not_active Withdrawn
- 2011-03-15 WO PCT/JP2011/055996 patent/WO2011122324A1/ja not_active Ceased
-
2012
- 2012-09-14 US US13/617,939 patent/US8422020B2/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5924521B2 (ja) | ジグザグ形のねじりばねを有するmemsセンサ | |
| JP5711334B2 (ja) | 加速度計システムの動的な自己較正 | |
| US8272266B2 (en) | Gyroscopes using surface electrodes | |
| JP5972965B2 (ja) | 加速度計システムおよび方法 | |
| JP2011209575A5 (enExample) | ||
| JP2012154919A (ja) | デュアルプルーフマスを有するmemsセンサ | |
| TWI596885B (zh) | 控制元件、共振器器件及用於控制機械共振器之操作的方法 | |
| KR20090042301A (ko) | 각속도 센서 | |
| JP5363394B2 (ja) | 可変分光素子 | |
| JP6330055B2 (ja) | 加速度センサ | |
| Schroedter et al. | Jerk and current limited flatness-based open loop control of foveation scanning electrostatic micromirrors | |
| CN102834760B (zh) | 可变分光元件 | |
| JP2011209574A5 (enExample) | ||
| JP5822321B2 (ja) | 回転角加速度測定装置 | |
| US9035400B2 (en) | Micro electro mechanical systems device | |
| JPWO2017183082A1 (ja) | 加速度センサ | |
| US8978470B2 (en) | Inertial sensor | |
| Li et al. | Analysis and fabrication of a novel MEMS pendulum angular accelerometer with electrostatic actuator feedback | |
| JP2013254231A5 (enExample) | ||
| JP5759154B2 (ja) | 面外櫛形駆動の加速度計 | |
| Dean et al. | Micromachined vibration isolation filters to enhance packaging for mechanically harsh environments | |
| Janschek et al. | Flatness-based open loop command tracking for quasistatic microscanners | |
| Kim et al. | Active vibration control and isolation for micromachined devices | |
| Zhi et al. | Design and control of a variable viscous damping actuator (VVDA) for compliant robotic joints | |
| Peng et al. | Influence of Operating Air Pressure on the Frequency Shift of an Electrostatic MEMS Micromirror: Theoretical Modeling and Experimental Investigation |