CN102822720B - 可变分光元件 - Google Patents
可变分光元件 Download PDFInfo
- Publication number
- CN102822720B CN102822720B CN201180017455.9A CN201180017455A CN102822720B CN 102822720 B CN102822720 B CN 102822720B CN 201180017455 A CN201180017455 A CN 201180017455A CN 102822720 B CN102822720 B CN 102822720B
- Authority
- CN
- China
- Prior art keywords
- pair
- gravity
- optical substrates
- centers
- angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Spectrometry And Color Measurement (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010078214A JP5363394B2 (ja) | 2010-03-30 | 2010-03-30 | 可変分光素子 |
| JP2010-078214 | 2010-03-30 | ||
| PCT/JP2011/055996 WO2011122324A1 (ja) | 2010-03-30 | 2011-03-15 | 可変分光素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102822720A CN102822720A (zh) | 2012-12-12 |
| CN102822720B true CN102822720B (zh) | 2014-11-26 |
Family
ID=44712045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201180017455.9A Expired - Fee Related CN102822720B (zh) | 2010-03-30 | 2011-03-15 | 可变分光元件 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8422020B2 (enExample) |
| EP (1) | EP2555038A1 (enExample) |
| JP (1) | JP5363394B2 (enExample) |
| CN (1) | CN102822720B (enExample) |
| WO (1) | WO2011122324A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5363393B2 (ja) * | 2010-03-30 | 2013-12-11 | オリンパス株式会社 | 可変分光素子 |
| JP5363394B2 (ja) | 2010-03-30 | 2013-12-11 | オリンパス株式会社 | 可変分光素子 |
| JP5530375B2 (ja) * | 2011-02-01 | 2014-06-25 | オリンパス株式会社 | 可変分光素子 |
| JP2015141209A (ja) * | 2014-01-27 | 2015-08-03 | セイコーエプソン株式会社 | アクチュエーター制御装置、光学モジュール、及び電子機器 |
| US9568301B2 (en) * | 2014-04-11 | 2017-02-14 | General Electric Company | Systems and methods for capacitive proximity sensing |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2276676Y (zh) * | 1996-05-02 | 1998-03-18 | 华中理工大学 | 一种可变形反射镜 |
| CN1701255A (zh) * | 2002-01-29 | 2005-11-23 | 松下电器产业株式会社 | 可变形反射镜及具有该可变形反射镜的控制装置 |
| CN1708449A (zh) * | 2002-11-06 | 2005-12-14 | 松下电器产业株式会社 | 带有位移检测功能的微执行器及包括该微执行器的可变形反射镜 |
| CN1910110A (zh) * | 2004-03-08 | 2007-02-07 | 松下电器产业株式会社 | 微致动器以及具有微致动器的装置 |
| JP2008129149A (ja) * | 2006-11-17 | 2008-06-05 | Olympus Corp | 可変分光素子 |
| EP2120082A1 (en) * | 2007-02-13 | 2009-11-18 | Olympus Corporation | Variable spectral element |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06241899A (ja) * | 1993-01-29 | 1994-09-02 | Shimadzu Corp | エタロン駆動機構 |
| JP3812550B2 (ja) * | 2003-07-07 | 2006-08-23 | セイコーエプソン株式会社 | 波長可変光フィルタ |
| JP4710737B2 (ja) | 2006-06-23 | 2011-06-29 | 日産自動車株式会社 | 車両用ブレーキ装置 |
| JP2008183350A (ja) * | 2007-01-31 | 2008-08-14 | Olympus Corp | 可変分光素子、分光装置および内視鏡システム |
| JP5798709B2 (ja) * | 2009-03-04 | 2015-10-21 | セイコーエプソン株式会社 | 光フィルター及びそれを備えた光モジュール |
| JP2010224011A (ja) * | 2009-03-19 | 2010-10-07 | Olympus Corp | エタロン装置及びそれを備えた光学ユニット |
| JP5363393B2 (ja) * | 2010-03-30 | 2013-12-11 | オリンパス株式会社 | 可変分光素子 |
| JP5363394B2 (ja) | 2010-03-30 | 2013-12-11 | オリンパス株式会社 | 可変分光素子 |
-
2010
- 2010-03-30 JP JP2010078214A patent/JP5363394B2/ja not_active Expired - Fee Related
-
2011
- 2011-03-15 CN CN201180017455.9A patent/CN102822720B/zh not_active Expired - Fee Related
- 2011-03-15 EP EP11762564A patent/EP2555038A1/en not_active Withdrawn
- 2011-03-15 WO PCT/JP2011/055996 patent/WO2011122324A1/ja not_active Ceased
-
2012
- 2012-09-14 US US13/617,939 patent/US8422020B2/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2276676Y (zh) * | 1996-05-02 | 1998-03-18 | 华中理工大学 | 一种可变形反射镜 |
| CN1701255A (zh) * | 2002-01-29 | 2005-11-23 | 松下电器产业株式会社 | 可变形反射镜及具有该可变形反射镜的控制装置 |
| CN1708449A (zh) * | 2002-11-06 | 2005-12-14 | 松下电器产业株式会社 | 带有位移检测功能的微执行器及包括该微执行器的可变形反射镜 |
| CN1910110A (zh) * | 2004-03-08 | 2007-02-07 | 松下电器产业株式会社 | 微致动器以及具有微致动器的装置 |
| JP2008129149A (ja) * | 2006-11-17 | 2008-06-05 | Olympus Corp | 可変分光素子 |
| EP2120082A1 (en) * | 2007-02-13 | 2009-11-18 | Olympus Corporation | Variable spectral element |
Non-Patent Citations (1)
| Title |
|---|
| JP特开2008-129149A 2008.06.05 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011209575A (ja) | 2011-10-20 |
| WO2011122324A1 (ja) | 2011-10-06 |
| EP2555038A1 (en) | 2013-02-06 |
| US8422020B2 (en) | 2013-04-16 |
| JP5363394B2 (ja) | 2013-12-11 |
| US20130010285A1 (en) | 2013-01-10 |
| CN102822720A (zh) | 2012-12-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8272266B2 (en) | Gyroscopes using surface electrodes | |
| JP5649972B2 (ja) | ヨーレートセンサ | |
| CN102822720B (zh) | 可变分光元件 | |
| Chen et al. | An asymmetrical inertial piezoelectric rotary actuator with the bias unit | |
| EP3561451A1 (en) | Triaxial micro-electromechanical gyroscope | |
| CN102834760B (zh) | 可变分光元件 | |
| CN115078768A (zh) | 一种具有应力释放的双质量mems陀螺敏感结构 | |
| JP2011209575A5 (enExample) | ||
| JP5822321B2 (ja) | 回転角加速度測定装置 | |
| Cailliez et al. | Modeling and experimental characterization of an active MEMS based force sensor | |
| JP2011209574A5 (enExample) | ||
| US10816568B2 (en) | Closed loop accelerometer | |
| Liao et al. | Closed-loop adaptive control for torsional micromirrors | |
| JP5530375B2 (ja) | 可変分光素子 | |
| JP2005347484A (ja) | 積層型圧電アクチュエータ素子、位置決め装置および位置決め方法 | |
| Yamamoto et al. | A rotational MEMS diffraction grating for realization of micro-sized spectroscope system | |
| US11340251B2 (en) | Inertial measurement unit calibration stage, method, and applications | |
| WO2018235719A1 (ja) | 振動型角速度センサ | |
| Leiro et al. | Feedback control strategy for a high speed differential piezo-driven stage by an exclusive use of piezoelectric sensors | |
| JP2008030182A (ja) | 定振幅機構及びこれを用いた電位センサ | |
| Han et al. | High-accuracy digital-to-analog actuators using load springs compensating fabrication errors | |
| CN120377698A (zh) | 定位装置、扫描设备及扫描探针设备 | |
| Omidbeike | Design, Sensing and Control of Monolithic Nanopositioning Devices | |
| Lyshevski | Motion Control of Electrostatic Microactuators | |
| Molina Arcila | High resolution Fabry-Pérot interferometer-dynamic system modeling and nanopositioning control system design. |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141126 Termination date: 20170315 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |