CN102822720B - 可变分光元件 - Google Patents

可变分光元件 Download PDF

Info

Publication number
CN102822720B
CN102822720B CN201180017455.9A CN201180017455A CN102822720B CN 102822720 B CN102822720 B CN 102822720B CN 201180017455 A CN201180017455 A CN 201180017455A CN 102822720 B CN102822720 B CN 102822720B
Authority
CN
China
Prior art keywords
pair
gravity
optical substrates
centers
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201180017455.9A
Other languages
English (en)
Chinese (zh)
Other versions
CN102822720A (zh
Inventor
若井浩志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of CN102822720A publication Critical patent/CN102822720A/zh
Application granted granted Critical
Publication of CN102822720B publication Critical patent/CN102822720B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/26Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
CN201180017455.9A 2010-03-30 2011-03-15 可变分光元件 Expired - Fee Related CN102822720B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010078214A JP5363394B2 (ja) 2010-03-30 2010-03-30 可変分光素子
JP2010-078214 2010-03-30
PCT/JP2011/055996 WO2011122324A1 (ja) 2010-03-30 2011-03-15 可変分光素子

Publications (2)

Publication Number Publication Date
CN102822720A CN102822720A (zh) 2012-12-12
CN102822720B true CN102822720B (zh) 2014-11-26

Family

ID=44712045

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180017455.9A Expired - Fee Related CN102822720B (zh) 2010-03-30 2011-03-15 可变分光元件

Country Status (5)

Country Link
US (1) US8422020B2 (enExample)
EP (1) EP2555038A1 (enExample)
JP (1) JP5363394B2 (enExample)
CN (1) CN102822720B (enExample)
WO (1) WO2011122324A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5363393B2 (ja) * 2010-03-30 2013-12-11 オリンパス株式会社 可変分光素子
JP5363394B2 (ja) 2010-03-30 2013-12-11 オリンパス株式会社 可変分光素子
JP5530375B2 (ja) * 2011-02-01 2014-06-25 オリンパス株式会社 可変分光素子
JP2015141209A (ja) * 2014-01-27 2015-08-03 セイコーエプソン株式会社 アクチュエーター制御装置、光学モジュール、及び電子機器
US9568301B2 (en) * 2014-04-11 2017-02-14 General Electric Company Systems and methods for capacitive proximity sensing

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2276676Y (zh) * 1996-05-02 1998-03-18 华中理工大学 一种可变形反射镜
CN1701255A (zh) * 2002-01-29 2005-11-23 松下电器产业株式会社 可变形反射镜及具有该可变形反射镜的控制装置
CN1708449A (zh) * 2002-11-06 2005-12-14 松下电器产业株式会社 带有位移检测功能的微执行器及包括该微执行器的可变形反射镜
CN1910110A (zh) * 2004-03-08 2007-02-07 松下电器产业株式会社 微致动器以及具有微致动器的装置
JP2008129149A (ja) * 2006-11-17 2008-06-05 Olympus Corp 可変分光素子
EP2120082A1 (en) * 2007-02-13 2009-11-18 Olympus Corporation Variable spectral element

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06241899A (ja) * 1993-01-29 1994-09-02 Shimadzu Corp エタロン駆動機構
JP3812550B2 (ja) * 2003-07-07 2006-08-23 セイコーエプソン株式会社 波長可変光フィルタ
JP4710737B2 (ja) 2006-06-23 2011-06-29 日産自動車株式会社 車両用ブレーキ装置
JP2008183350A (ja) * 2007-01-31 2008-08-14 Olympus Corp 可変分光素子、分光装置および内視鏡システム
JP5798709B2 (ja) * 2009-03-04 2015-10-21 セイコーエプソン株式会社 光フィルター及びそれを備えた光モジュール
JP2010224011A (ja) * 2009-03-19 2010-10-07 Olympus Corp エタロン装置及びそれを備えた光学ユニット
JP5363393B2 (ja) * 2010-03-30 2013-12-11 オリンパス株式会社 可変分光素子
JP5363394B2 (ja) 2010-03-30 2013-12-11 オリンパス株式会社 可変分光素子

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2276676Y (zh) * 1996-05-02 1998-03-18 华中理工大学 一种可变形反射镜
CN1701255A (zh) * 2002-01-29 2005-11-23 松下电器产业株式会社 可变形反射镜及具有该可变形反射镜的控制装置
CN1708449A (zh) * 2002-11-06 2005-12-14 松下电器产业株式会社 带有位移检测功能的微执行器及包括该微执行器的可变形反射镜
CN1910110A (zh) * 2004-03-08 2007-02-07 松下电器产业株式会社 微致动器以及具有微致动器的装置
JP2008129149A (ja) * 2006-11-17 2008-06-05 Olympus Corp 可変分光素子
EP2120082A1 (en) * 2007-02-13 2009-11-18 Olympus Corporation Variable spectral element

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特开2008-129149A 2008.06.05 *

Also Published As

Publication number Publication date
JP2011209575A (ja) 2011-10-20
WO2011122324A1 (ja) 2011-10-06
EP2555038A1 (en) 2013-02-06
US8422020B2 (en) 2013-04-16
JP5363394B2 (ja) 2013-12-11
US20130010285A1 (en) 2013-01-10
CN102822720A (zh) 2012-12-12

Similar Documents

Publication Publication Date Title
US8272266B2 (en) Gyroscopes using surface electrodes
JP5649972B2 (ja) ヨーレートセンサ
CN102822720B (zh) 可变分光元件
Chen et al. An asymmetrical inertial piezoelectric rotary actuator with the bias unit
EP3561451A1 (en) Triaxial micro-electromechanical gyroscope
CN102834760B (zh) 可变分光元件
CN115078768A (zh) 一种具有应力释放的双质量mems陀螺敏感结构
JP2011209575A5 (enExample)
JP5822321B2 (ja) 回転角加速度測定装置
Cailliez et al. Modeling and experimental characterization of an active MEMS based force sensor
JP2011209574A5 (enExample)
US10816568B2 (en) Closed loop accelerometer
Liao et al. Closed-loop adaptive control for torsional micromirrors
JP5530375B2 (ja) 可変分光素子
JP2005347484A (ja) 積層型圧電アクチュエータ素子、位置決め装置および位置決め方法
Yamamoto et al. A rotational MEMS diffraction grating for realization of micro-sized spectroscope system
US11340251B2 (en) Inertial measurement unit calibration stage, method, and applications
WO2018235719A1 (ja) 振動型角速度センサ
Leiro et al. Feedback control strategy for a high speed differential piezo-driven stage by an exclusive use of piezoelectric sensors
JP2008030182A (ja) 定振幅機構及びこれを用いた電位センサ
Han et al. High-accuracy digital-to-analog actuators using load springs compensating fabrication errors
CN120377698A (zh) 定位装置、扫描设备及扫描探针设备
Omidbeike Design, Sensing and Control of Monolithic Nanopositioning Devices
Lyshevski Motion Control of Electrostatic Microactuators
Molina Arcila High resolution Fabry-Pérot interferometer-dynamic system modeling and nanopositioning control system design.

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20141126

Termination date: 20170315

CF01 Termination of patent right due to non-payment of annual fee