WO2011122324A1 - 可変分光素子 - Google Patents

可変分光素子 Download PDF

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Publication number
WO2011122324A1
WO2011122324A1 PCT/JP2011/055996 JP2011055996W WO2011122324A1 WO 2011122324 A1 WO2011122324 A1 WO 2011122324A1 JP 2011055996 W JP2011055996 W JP 2011055996W WO 2011122324 A1 WO2011122324 A1 WO 2011122324A1
Authority
WO
WIPO (PCT)
Prior art keywords
pair
angle
optical substrates
opposing surfaces
gravity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2011/055996
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
浩志 若井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to EP11762564A priority Critical patent/EP2555038A1/en
Priority to CN201180017455.9A priority patent/CN102822720B/zh
Publication of WO2011122324A1 publication Critical patent/WO2011122324A1/ja
Priority to US13/617,939 priority patent/US8422020B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters

Definitions

  • a capacitance sensor for measuring the surface interval is arranged on the opposite surface, and the capacitance A sensor that measures the current surface interval at a predetermined sampling cycle, compares the measured surface interval with the desired surface interval, and drives the actuator based on the comparison result to adjust the surface interval.
  • Known for example, JP-A-6-241899.
  • variable spectroscopic element of the present invention is disposed on each of a pair of optical substrates disposed so as to face each other with a space therebetween, and each of the facing surfaces of the pair of optical substrates. At least one of the pair of optical substrates and the first to fourth capacitance sensors that detect a surface interval between the opposing surfaces of the pair of optical substrates at each arrangement position.
  • the pair of optical substrates 2 includes a fixed substrate 2 1 and a movable substrate 2 2 that are arranged so that opposing surfaces are parallel to each other with a space therebetween.
  • the fixed substrate 2 1 the opening 1 2 a in the interior of the outer frame 1, 1 3 disc which is fixed to the annular member 1 2 of the outer frame 1 so as to cross the axis of the light passing through the a Shaped optical member.
  • the movable substrate 2 2 is a disc-shaped optical member held by the piezo element so as to cross the light passing through the openings 1 2 a and 1 3 a.
  • the etalon device has unique characteristics required from its mass and material. First, the characteristics of the etalon device for each movement will be described.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
PCT/JP2011/055996 2010-03-30 2011-03-15 可変分光素子 Ceased WO2011122324A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP11762564A EP2555038A1 (en) 2010-03-30 2011-03-15 Variable spectral element
CN201180017455.9A CN102822720B (zh) 2010-03-30 2011-03-15 可变分光元件
US13/617,939 US8422020B2 (en) 2010-03-30 2012-09-14 Variable spectral element

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010078214A JP5363394B2 (ja) 2010-03-30 2010-03-30 可変分光素子
JP2010-078214 2010-03-30

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US13/617,939 Continuation US8422020B2 (en) 2010-03-30 2012-09-14 Variable spectral element

Publications (1)

Publication Number Publication Date
WO2011122324A1 true WO2011122324A1 (ja) 2011-10-06

Family

ID=44712045

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2011/055996 Ceased WO2011122324A1 (ja) 2010-03-30 2011-03-15 可変分光素子

Country Status (5)

Country Link
US (1) US8422020B2 (enExample)
EP (1) EP2555038A1 (enExample)
JP (1) JP5363394B2 (enExample)
CN (1) CN102822720B (enExample)
WO (1) WO2011122324A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8422020B2 (en) 2010-03-30 2013-04-16 Olympus Corporation Variable spectral element

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5363393B2 (ja) * 2010-03-30 2013-12-11 オリンパス株式会社 可変分光素子
JP5530375B2 (ja) * 2011-02-01 2014-06-25 オリンパス株式会社 可変分光素子
JP2015141209A (ja) * 2014-01-27 2015-08-03 セイコーエプソン株式会社 アクチュエーター制御装置、光学モジュール、及び電子機器
US9568301B2 (en) * 2014-04-11 2017-02-14 General Electric Company Systems and methods for capacitive proximity sensing

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06241899A (ja) 1993-01-29 1994-09-02 Shimadzu Corp エタロン駆動機構
JP2008001291A (ja) 2006-06-23 2008-01-10 Nissan Motor Co Ltd 車両用ブレーキ装置
JP2008129149A (ja) 2006-11-17 2008-06-05 Olympus Corp 可変分光素子
JP2008197362A (ja) * 2007-02-13 2008-08-28 Olympus Corp 可変分光素子
JP2010224011A (ja) * 2009-03-19 2010-10-07 Olympus Corp エタロン装置及びそれを備えた光学ユニット

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2276676Y (zh) * 1996-05-02 1998-03-18 华中理工大学 一种可变形反射镜
KR101073175B1 (ko) * 2002-01-29 2011-10-12 파나소닉 주식회사 가변형 미러, 및 당해 가변형 미러를 구비한 광 제어 장치
CN100405122C (zh) * 2002-11-06 2008-07-23 松下电器产业株式会社 带有位移检测功能的微执行器
JP3812550B2 (ja) * 2003-07-07 2006-08-23 セイコーエプソン株式会社 波長可変光フィルタ
JPWO2005085125A1 (ja) * 2004-03-08 2007-12-06 松下電器産業株式会社 マイクロアクチュエータ、およびマイクロアクチュエータを備えた装置
JP2008183350A (ja) * 2007-01-31 2008-08-14 Olympus Corp 可変分光素子、分光装置および内視鏡システム
JP5798709B2 (ja) * 2009-03-04 2015-10-21 セイコーエプソン株式会社 光フィルター及びそれを備えた光モジュール
JP5363393B2 (ja) * 2010-03-30 2013-12-11 オリンパス株式会社 可変分光素子
JP5363394B2 (ja) 2010-03-30 2013-12-11 オリンパス株式会社 可変分光素子

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06241899A (ja) 1993-01-29 1994-09-02 Shimadzu Corp エタロン駆動機構
JP2008001291A (ja) 2006-06-23 2008-01-10 Nissan Motor Co Ltd 車両用ブレーキ装置
JP2008129149A (ja) 2006-11-17 2008-06-05 Olympus Corp 可変分光素子
JP2008197362A (ja) * 2007-02-13 2008-08-28 Olympus Corp 可変分光素子
JP2010224011A (ja) * 2009-03-19 2010-10-07 Olympus Corp エタロン装置及びそれを備えた光学ユニット

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8422020B2 (en) 2010-03-30 2013-04-16 Olympus Corporation Variable spectral element

Also Published As

Publication number Publication date
JP2011209575A (ja) 2011-10-20
EP2555038A1 (en) 2013-02-06
CN102822720B (zh) 2014-11-26
US8422020B2 (en) 2013-04-16
JP5363394B2 (ja) 2013-12-11
US20130010285A1 (en) 2013-01-10
CN102822720A (zh) 2012-12-12

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