JP5363394B2 - 可変分光素子 - Google Patents

可変分光素子 Download PDF

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Publication number
JP5363394B2
JP5363394B2 JP2010078214A JP2010078214A JP5363394B2 JP 5363394 B2 JP5363394 B2 JP 5363394B2 JP 2010078214 A JP2010078214 A JP 2010078214A JP 2010078214 A JP2010078214 A JP 2010078214A JP 5363394 B2 JP5363394 B2 JP 5363394B2
Authority
JP
Japan
Prior art keywords
pair
angle
optical substrates
opposing surfaces
spectroscopic element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010078214A
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English (en)
Japanese (ja)
Other versions
JP2011209575A (ja
JP2011209575A5 (enExample
Inventor
浩志 若井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2010078214A priority Critical patent/JP5363394B2/ja
Priority to EP11762564A priority patent/EP2555038A1/en
Priority to PCT/JP2011/055996 priority patent/WO2011122324A1/ja
Priority to CN201180017455.9A priority patent/CN102822720B/zh
Publication of JP2011209575A publication Critical patent/JP2011209575A/ja
Priority to US13/617,939 priority patent/US8422020B2/en
Publication of JP2011209575A5 publication Critical patent/JP2011209575A5/ja
Application granted granted Critical
Publication of JP5363394B2 publication Critical patent/JP5363394B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP2010078214A 2010-03-30 2010-03-30 可変分光素子 Expired - Fee Related JP5363394B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2010078214A JP5363394B2 (ja) 2010-03-30 2010-03-30 可変分光素子
EP11762564A EP2555038A1 (en) 2010-03-30 2011-03-15 Variable spectral element
PCT/JP2011/055996 WO2011122324A1 (ja) 2010-03-30 2011-03-15 可変分光素子
CN201180017455.9A CN102822720B (zh) 2010-03-30 2011-03-15 可变分光元件
US13/617,939 US8422020B2 (en) 2010-03-30 2012-09-14 Variable spectral element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010078214A JP5363394B2 (ja) 2010-03-30 2010-03-30 可変分光素子

Publications (3)

Publication Number Publication Date
JP2011209575A JP2011209575A (ja) 2011-10-20
JP2011209575A5 JP2011209575A5 (enExample) 2013-05-16
JP5363394B2 true JP5363394B2 (ja) 2013-12-11

Family

ID=44712045

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010078214A Expired - Fee Related JP5363394B2 (ja) 2010-03-30 2010-03-30 可変分光素子

Country Status (5)

Country Link
US (1) US8422020B2 (enExample)
EP (1) EP2555038A1 (enExample)
JP (1) JP5363394B2 (enExample)
CN (1) CN102822720B (enExample)
WO (1) WO2011122324A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5363393B2 (ja) * 2010-03-30 2013-12-11 オリンパス株式会社 可変分光素子
JP5363394B2 (ja) 2010-03-30 2013-12-11 オリンパス株式会社 可変分光素子
JP5530375B2 (ja) * 2011-02-01 2014-06-25 オリンパス株式会社 可変分光素子
JP2015141209A (ja) * 2014-01-27 2015-08-03 セイコーエプソン株式会社 アクチュエーター制御装置、光学モジュール、及び電子機器
US9568301B2 (en) * 2014-04-11 2017-02-14 General Electric Company Systems and methods for capacitive proximity sensing

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06241899A (ja) * 1993-01-29 1994-09-02 Shimadzu Corp エタロン駆動機構
CN2276676Y (zh) * 1996-05-02 1998-03-18 华中理工大学 一种可变形反射镜
KR101073175B1 (ko) * 2002-01-29 2011-10-12 파나소닉 주식회사 가변형 미러, 및 당해 가변형 미러를 구비한 광 제어 장치
CN100405122C (zh) * 2002-11-06 2008-07-23 松下电器产业株式会社 带有位移检测功能的微执行器
JP3812550B2 (ja) * 2003-07-07 2006-08-23 セイコーエプソン株式会社 波長可変光フィルタ
JPWO2005085125A1 (ja) * 2004-03-08 2007-12-06 松下電器産業株式会社 マイクロアクチュエータ、およびマイクロアクチュエータを備えた装置
JP4710737B2 (ja) 2006-06-23 2011-06-29 日産自動車株式会社 車両用ブレーキ装置
JP5085101B2 (ja) 2006-11-17 2012-11-28 オリンパス株式会社 可変分光素子
JP2008183350A (ja) * 2007-01-31 2008-08-14 Olympus Corp 可変分光素子、分光装置および内視鏡システム
JP2008197362A (ja) * 2007-02-13 2008-08-28 Olympus Corp 可変分光素子
JP5798709B2 (ja) * 2009-03-04 2015-10-21 セイコーエプソン株式会社 光フィルター及びそれを備えた光モジュール
JP2010224011A (ja) * 2009-03-19 2010-10-07 Olympus Corp エタロン装置及びそれを備えた光学ユニット
JP5363393B2 (ja) * 2010-03-30 2013-12-11 オリンパス株式会社 可変分光素子
JP5363394B2 (ja) 2010-03-30 2013-12-11 オリンパス株式会社 可変分光素子

Also Published As

Publication number Publication date
JP2011209575A (ja) 2011-10-20
WO2011122324A1 (ja) 2011-10-06
EP2555038A1 (en) 2013-02-06
CN102822720B (zh) 2014-11-26
US8422020B2 (en) 2013-04-16
US20130010285A1 (en) 2013-01-10
CN102822720A (zh) 2012-12-12

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