JP2011146731A - 接着剤組成物及び半導体装置の製造方法 - Google Patents
接着剤組成物及び半導体装置の製造方法 Download PDFInfo
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- JP2011146731A JP2011146731A JP2011046921A JP2011046921A JP2011146731A JP 2011146731 A JP2011146731 A JP 2011146731A JP 2011046921 A JP2011046921 A JP 2011046921A JP 2011046921 A JP2011046921 A JP 2011046921A JP 2011146731 A JP2011146731 A JP 2011146731A
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Abstract
【解決手段】接着剤組成物は、(A)重量平均分子量が2万以上10万以下の熱可塑性樹脂と、(B)エポキシ樹脂と、(C)放射線重合性化合物と、(D)光開始剤と、(E)マイクロカプセル型の硬化促進剤と、を含む。上記構成を有することにより、半導体ウエハAへの貼付性、ウエハ裏面研削性及びフリップチップ時の埋込性のすべてを高水準で満足するフィルム状接着剤を形成することができる。
【選択図】図3
Description
式(1)中、Xは、炭素数1〜10のアルキル基を示し、炭素数が2以上でありメチレン基を有する場合、メチレン基の少なくとも一つが−O−、−NH−、−S−、−CO−、−OCO−又は−COO−で置換されていてもよく、炭素数が3以上でありメチン基(−CH<)を有する場合、メチン基の少なくとも一つが窒素原子で置換されていてもよい。
(a)主面の一方に複数の回路電極を有する半導体ウエハを準備し、該半導体ウエハの回路電極が設けられている側に、上述した本発明に係る回路部材接続用接着剤シートの接着剤層を貼付ける工程と、
(b)半導体ウエハの回路電極が設けられている側とは反対側を研削して半導体ウエハを薄化する工程と、
(c)接着剤層に放射線を照射する工程と、
(d)薄化した半導体ウエハ及び放射線を照射した接着剤層をダイシングしてフィルム状接着剤付半導体素子に個片化する工程と、
(e)フィルム状接着剤付半導体素子と半導体素子搭載用支持部材とをフィルム状接着剤付半導体素子のフィルム状接着剤を介して接着する工程と、
を備える。以下、図面を参照しながら、各工程について説明する。
先ず、接着剤シート10を所定の装置に配置し、保護フィルム1を剥がす。続いて、主面の一方に複数の回路電極20を有する半導体ウエハAを準備し、半導体ウエハAの回路電極が設けられている側に接着剤層2を貼付け、支持基材3/接着剤層2/半導体ウエハAが積層された積層体を得る(図2を参照)。回路電極20には、ハンダ接合用のハンダバンプを設けてもよい。また、回路電極20にハンダバンプを設けず、半導体素子搭載用支持部材の回路電極にハンダバンプを設けることもできる。
次に、図3(a)に示されるように、半導体ウエハAの回路電極20が設けられている側とは反対側をグラインダー4によって研削し、半導体ウエハを薄化する。半導体ウエハの厚みは、例えば、10μm〜300μmとすることができる。半導体装置の小型化、薄型化の観点から、半導体ウエハの厚みを20μm〜100μmとすることが好ましい。
図3(b)に示されるように、接着剤層2に支持基材3側から放射線を照射することにより接着剤層2を硬化させ、接着剤層2と支持基材3との間の接着力を低下させる。ここで、使用される放射線としては、例えば、紫外線、電子線、赤外線等が挙げられる。本実施形態においては、波長300〜800nmの放射線を用いることが好ましく、その照射条件としては、照度:15〜100mW/cm2で、上記アクリルモノマーなどの(C)成分が重合する程度の照射量で照射することが好ましい。
次に、図4(a)に示されるように、積層体の半導体Aにダイシングテープ5を貼付け、これを所定の装置に配置して支持基材3を剥がす。このとき、接着剤層2に放射線が照射されていることにより、支持基材3を容易に剥がすことができる。支持基材3の剥離後、図4(b)に示されるように、半導体ウエハA及び接着剤層2をダイシングソウ6によりダイシングする。こうして、半導体ウエハAは複数の半導体素子A’に分割され、接着剤層2は複数のフィルム状接着剤2aに分割される。
次に、図6に示されるように、フィルム状接着剤2aが付着した半導体素子A’の回路電極20と、半導体素子搭載用支持部材8の回路電極22とを位置合わせし、フィルム状接着剤付半導体素子12と半導体素子搭載用支持部材8とを熱圧着する。この熱圧着により、回路電極20と回路電極22とが電気的に接続されるとともに、半導体素子A’と半導体素子搭載用支持部材8との間にフィルム状接着剤2aの硬化物が形成される。
熱可塑性樹脂としてフェノキシ樹脂「FX293」(東都化成株式会社製、製品名)100質量部、エポキシ樹脂として「1032H60」(ジャパンエポキシレジン株式会社製、製品名)80質量部及び「YL−980」(ジャパンエポキシレジン株式会社製、製品名)60質量部、放射線重合性化合物として「FA−513AS」(日立化成工業株式会社製、製品名)80質量部、光開始剤として「Irg−184」(チバスペシャリティーケミカルズ(株)製、製品名)4.0質量部、マイクロカプセル型硬化促進剤として「HX−3941HP」(旭化成ケミカルズ株式会社製、製品名)160質量部、並びに、シランカップリング剤として「SH−6040」(東レダウコーニングシリコーン製、製品名)4質量部を混合した混合物を、トルエンと酢酸エチルの混合溶媒中に溶解して接着剤組成物のワニスを得た。得られたワニスを計量した後、ここに、フィラーとしてシリカ粒子「SE−2050」(株式会社アドマテックス社製、製品名、平均粒径0.5μm)を、ワニス中の「FX293」100質量部に対して400質量部の割合で加え、撹拌し分散した。得られた分散物を、支持基材としてのセパレータフィルム(PETフィルム、厚み38μm)上にロールコータを用いて塗布した後、70℃のオーブンで10分間乾燥させた。こうして、支持基材上に厚み30μmの接着剤層が形成されてなる回路部材接続用接着剤シートを得た。
「YL−980」に代えて「EX−1020」(大阪ガスケミカル株式会社製、製品名)を60質量部配合した以外は実施例1と同様にして、回路部材接続用接着剤シートを得た。
「FA−513AS」に代えて「A−DPH」(新中村工業化学株式会社製、製品名)を80質量部配合した以外は実施例1と同様にして、回路部材接続用接着剤シートを得た。
「FX293」に代えて「YP−70」(東都化成株式会社製、製品名)100質量部配合した以外は実施例1と同様にして、回路部材接続用接着剤シートを得た。
メチロール化合物である「DML―POP」(本州化学工業株式会社、製品名)20質量部を更に配合した以外は実施例3と同様にして、回路部材接続用接着剤シートを得た。
まず、バックグラインド(BG)テープAを以下の手順で作製した。主モノマーとして2−エチルヘキシルアクリレートとメチルメタクリレートとを、官能基モノマーとしてヒドロキシエチルアクリレートとアクリル酸とを用いて、溶液重合法によってアクリル共重合体を合成した。得られたアクリル共重合体の重量平均分子量は40万、ガラス転移点は−38℃であった。次いで、アクリル共重合体100質量部に対し、多官能イソシアネート架橋剤(日本ポリウレタン工業株式会社製、商品名:コローネートHL)10質量部を配合して粘着剤ワニスを調製し、ポリオレフィンフィルム(オカモト株式会社製、商品名:WNH−2110、厚さ100μm)上に乾燥時の粘着剤層の厚さが10μmになるよう塗工乾燥した。更に、シリコーン系離型剤を塗布したニ軸延伸ポリエステルフィルム(帝人デュポンフィルム株式会社製、商品名:A3171、厚さ25μm)を粘着剤面にラミネートした。この粘着剤層付きフィルムを室温で1週間放置し十分にエージングを行った。エージング後の粘着剤層付きフィルムからニ軸延伸ポリエステルフィルムを剥がしたものをBGテープAとした。
「FA−513AS」及び「Irg−184」を配合しなかった以外は実施例1と同様にして、回路部材接続用接着剤シートを得た。
「FA−513AS」及び「Irg−184」を配合しなかった以外は実施例4と同様にして、回路部材接続用接着剤シートを得た。
「HX−3941HP」を配合しなかった以外は実施例1と同様にして、回路部材接続用接着剤シートを得た。
「HX−3941HP」に代えて「2MAOK」(四国化成工業株式会社製、製品名)を14質量部配合した以外は実施例1と同様にして、回路部材接続用接着剤シートを得た。
「HX−3941HP」を配合しなかった以外は実施例6と同様にして、回路部材接続用接着剤シートを得た。
上記で得られた回路部材接続用接着剤シートについて、下記の試験手順にしたがって、ウエハ貼付性、ウエハ裏面研削性及び埋込性を評価した。結果を表2に示す。
支持台上に載せたシリコンウエハ(6インチ径、厚さ625μm)の回路電極が設けられている面に、回路部材接続用接着剤シートを、接着剤層をシリコンウエハ側にしてラミネート条件(温度80℃、線圧0.5〜2kgf/cm、送り速度0.5〜5m/分)で加圧することにより積層した。このときの接着剤層の貼付状態を目視及び顕微鏡観察で視察し、下記の基準に基づいてウエハ貼付性を評価した。
A:剥離、ボイドが観察されない。
C:剥離、ボイドが観察される。
上記と同様にして回路部材接続用接着剤シートとシリコンウエハ(厚み625μm)との積層体を作製し、これをバックグラインダーに配置し、厚みが280μmとなるまでシリコンウエハの裏面を研削(バックグラインド)した。研削したウエハを目視及び顕微鏡観察で視察し、下記の基準に基づいてウエハ裏面研削性を評価した。
A:ウエハの破損及びマイクロクラックの発生がない。
C:ウエハの破損又はマイクロクラックの発生がある。
金ワイヤーバンプ(レベリング済み、バンプ高さ30μm、184バンプ)付きチップ(10mm角、厚み280μm)を、バンプ面を上に向けて仮圧着装置のステージ上に置いた。次に、回路部材接続用接着剤シートを支持基材ごと11mm角に切断し、これを接着層側がバンプ面に向くようにしてチップに被せ、さらに、シリコーン製熱伝導性カバーフィルムを載せて、80℃、1MPaで加熱、加圧を行った。
A:ボイドがほとんどなく、ボイドが埋込面積の10%未満である。
C:ボイドが多く存在し、ボイドが埋込面積の10%以上である。
上記ウエハ裏面研削性の評価サンプルを、照度:20mW/cm2、露光量:500mJの条件で紫外線照射し、その後、回路部材接続用接着剤シートの支持基材(又はBGテープ)を5mm/秒の速度で剥離した。剥離した後の支持基材(又はBGテープ)と回路部材接続用接着剤付きウエハの表面を目視及び顕微鏡観察で視察し、下記の基準に基づいて支持基材剥離性を評価した。
A:支持基材(又はBGテープ)が接着剤層から剥離でき、接着剤層とウエハの剥離が無い。
B:支持基材(又はBGテープ)が接着剤層から一部剥離できず、一部接着剤層ごとウエハから剥離してしまう。(接着剤層のウエハからの剥離面積が30%未満)
C:支持基材(又はBGテープ)が接着剤層から剥離できず、接着剤層ごとウエハから剥離してしまう。(接着剤層のウエハからの剥離面積が30%以上)
Claims (4)
- (A)重量平均分子量が2万以上10万以下の熱可塑性樹脂と、
(B)エポキシ樹脂と、
(C)放射線重合性化合物と、
(D)光開始剤と、
(E)マイクロカプセル型の硬化促進剤と、
を含む、接着剤組成物であって、
主面の一方に複数の回路電極を有する半導体ウエハを準備し、該半導体ウエハの前記回路電極が設けられている側に、前記接着剤組成物を含む回路部材接続用接着剤シートの接着剤層を貼付け、前記半導体ウエハの前記回路電極が設けられている側とは反対側を研削して前記半導体ウエハを薄化し、半導体素子搭載用支持部材に接着するために用いられる、接着剤組成物。 - 無機フィラーを更に含む、請求項1に記載の接着剤組成物。
- カップリング剤を更に含む、請求項1又は2に記載の接着剤組成物。
- 主面の一方に複数の回路電極を有する半導体ウエハを準備し、該半導体ウエハの前記回路電極が設けられている側に、回路部材接続用接着剤シートの接着剤層を貼付ける工程と、
前記半導体ウエハの前記回路電極が設けられている側とは反対側を研削して前記半導体ウエハを薄化する工程と、
前記接着剤層に放射線を照射する工程と、
前記薄化した半導体ウエハ及び前記放射線が照射された接着剤層をダイシングしてフィルム状接着剤付半導体素子に個片化する工程と、
前記フィルム状接着剤付半導体素子と半導体素子搭載用支持部材とを前記フィルム状接着剤付半導体素子のフィルム状接着剤を介して接着する工程と、
を備え、前記回路部材接続用接着剤シートが、(A)重量平均分子量が2万以上10万以下の熱可塑性樹脂と、(B)エポキシ樹脂と、(C)放射線重合性化合物と、(D)光開始剤と、(E)マイクロカプセル型の硬化促進剤と、を含む、半導体装置の製造方法。
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JP2015098565A (ja) * | 2013-11-20 | 2015-05-28 | 東京応化工業株式会社 | 処理方法 |
US9458365B2 (en) | 2013-07-22 | 2016-10-04 | Shin-Etsu Chemical Co., Ltd. | Temporary bonding adhesive compositions and methods of manufacturing a semiconductor device using the same |
KR20210114489A (ko) * | 2019-02-25 | 2021-09-23 | 미쓰비시덴키 가부시키가이샤 | 반도체 소자의 제조 방법 |
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