JP2011124212A - 有機発光表示装置及びその製造方法 - Google Patents
有機発光表示装置及びその製造方法 Download PDFInfo
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- JP2011124212A JP2011124212A JP2010182294A JP2010182294A JP2011124212A JP 2011124212 A JP2011124212 A JP 2011124212A JP 2010182294 A JP2010182294 A JP 2010182294A JP 2010182294 A JP2010182294 A JP 2010182294A JP 2011124212 A JP2011124212 A JP 2011124212A
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- organic light
- light emitting
- conductive layer
- display device
- pixel electrode
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- H10K50/85—Arrangements for extracting light from the devices
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- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
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- H01L2924/01—Chemical elements
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Abstract
【解決手段】基板上に第1副画素、第2副画素及び第3副画素が配された表示領域及び非表示領域が定義される有機発光表示装置であって、各副画素は、薄膜トランジスタと、薄膜トランジスタと電気的に連結される画素電極と、画素電極と電気的に連結される有機発光層と、有機発光層の上部に形成される対向電極と、を備え、非表示領域には、外部に露出された少なくとも一面を備えるパッド部が配され、第1副画素は、画素電極と有機発光層との間に順次に積層された第1透過性導電層、第2透過性導電層を備え、第2副画素は、画素電極と有機発光層との間に第1透過性導電層を備える有機発光表示装置及びその製造方法。
【選択図】図1
Description
101、201 基板
105、205 活性層
106、206 ゲート絶縁膜
107、207 ゲート電極
108、208 層間絶縁膜
109、209 ソース電極
110、210 ドレイン電極
112、212 パッド部
113、213 平坦化膜
114、214 保護層
115、215 画素電極
121、221 第1透過性導電層
122、222 第2透過性導電層
125、225 画素定義膜
130、230 有機発光層
140、240 対向電極
216 絶縁部材
SP1 第1副画素
SP2 第2副画素
SP3 第3副画素
Claims (27)
- 基板上に第1副画素、第2副画素及び第3副画素が配された表示領域及び非表示領域が定義される有機発光表示装置であって、
前記各副画素は、薄膜トランジスタと、
前記薄膜トランジスタと電気的に連結される画素電極と、
前記画素電極と電気的に連結される有機発光層と、
前記有機発光層の上部に形成される対向電極と、を備え、
前記非表示領域には、外部に露出された少なくとも一面を備えるパッド部が配され、
前記第1副画素は、前記画素電極と前記有機発光層との間に順次に積層された第1透過性導電層、第2透過性導電層を備え、前記第2副画素は、前記画素電極と前記有機発光層との間に前記第1透過性導電層を備える有機発光表示装置。 - 前記画素電極は、ITOを含む請求項1に記載の有機発光表示装置。
- 前記画素電極は、ITO/Ag/ITOの積層構造で形成される請求項1に記載の有機発光表示装置。
- 前記有機発光層は、前記第1副画素に対応する赤色可視光線を発光させる有機発光層、前記第2副画素に対応する緑色可視光線を発光させる有機発光層、及び前記第3副画素に対応する青色可視光線を発光させる有機発光層を備える請求項1に記載の有機発光表示装置。
- 前記パッド部は、前記薄膜トランジスタのソース及びドレイン電極と同じ材料で形成される請求項1に記載の有機発光表示装置。
- 前記パッド部は、Tiを含む請求項1に記載の有機発光表示装置。
- 前記パッド部は、Ti/Al/Tiの積層構造で形成される請求項1に記載の有機発光表示装置。
- 前記第1透過性導電層及び第2透過性導電層は、ITOを含む請求項1に記載の有機発光表示装置。
- 前記画素電極の外郭エッジを覆うように配された絶縁部材をさらに備える請求項1に記載の有機発光表示装置。
- 前記絶縁部材は、前記画素電極の上面のエッジ及び側面を覆うように配された請求項9に記載の有機発光表示装置。
- 前記絶縁部材は、アクリルを含む請求項9に記載の有機発光表示装置。
- 前記第1透過性導電層及び前記第2透過性導電層は、前記絶縁部材の側面に接するように配された請求項9に記載の有機発光表示装置。
- 基板上に第1副画素、第2副画素及び第3副画素が配された表示領域及び非表示領域が定義される有機発光表示装置の製造方法に係り、
前記各副画素を形成するステップは、
前記基板上に薄膜トランジスタを形成するステップと、
前記薄膜トランジスタと電気的に連結される画素電極を形成するステップと、
前記画素電極と電気的に連結される有機発光層を形成するステップと、
前記有機発光層上に対向電極を形成するステップと、を含み、
前記非表示領域には、外部に露出された少なくとも一面を備えるパッド部が配され、
前記第1副画素は、前記画素電極と前記有機発光層との間に順次に第1透過性導電層、第2透過性導電層を備え、前記第2副画素は、前記画素電極と前記有機発光層との間に前記第1透過性導電層を備える有機発光表示装置の製造方法。 - 前記画素電極は、ITOを含むように形成する請求項13に記載の有機発光表示装置の製造方法。
- 前記画素電極は、ITO/Ag/ITOの積層構造で形成する請求項13に記載の有機発光表示装置の製造方法。
- 前記有機発光層は、前記第1副画素に対応する赤色可視光線を発光させる有機発光層、前記第2副画素に対応する緑色可視光線を発光させる有機発光層、及び前記第3副画素に対応する青色可視光線を発光させる有機発光層を備えるように形成する請求項13に記載の有機発光表示装置の製造方法。
- 前記パッド部は、前記薄膜トランジスタのソース及びドレイン電極と同じ材料で形成する請求項13に記載の有機発光表示装置の製造方法。
- 前記パッド部は、Tiを含むように形成する請求項13に記載の有機発光表示装置の製造方法。
- 前記パッド部は、Ti/Al/Tiの積層構造で形成する請求項13に記載の有機発光表示装置の製造方法。
- 前記第1透過性導電層及び第2透過性導電層は、ITOを含むように形成する請求項13に記載の有機発光表示装置の製造方法。
- 前記第1透過性導電層及び第2透過性導電層は、ウェットエッチング方法を利用してパターニングされる請求項20に記載の有機発光表示装置の製造方法。
- 前記ウェットエッチング方法を利用して前記第1透過性導電層及び第2透過性導電層をパターニングする間に、前記パッド部の露出面がウェットエッチング溶液と接触する請求項21に記載の有機発光表示装置の製造方法。
- 前記画素電極の外郭エッジを覆うように配された絶縁部材を形成するステップをさらに含む請求項13に記載の有機発光表示装置の製造方法。
- 前記絶縁部材は、前記画素電極の上面のエッジ及び側面を覆うように形成する請求項23に記載の有機発光表示装置の製造方法。
- 前記絶縁部材は、アクリルを含むように形成する請求項23に記載の有機発光表示装置の製造方法。
- 前記第1透過性導電層及び前記第2透過性導電層を形成するステップは、前記絶縁部材を形成した後に行う請求項23に記載の有機発光表示装置の製造方法。
- 前記第1透過性導電層及び前記第2透過性導電層は、前記絶縁部材の側面に接するように形成する請求項23に記載の有機発光表示装置の製造方法。
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018502442A (ja) * | 2014-11-03 | 2018-01-25 | 深▲セン▼市華星光電技術有限公司 | Amoledバックパネルの製造方法 |
CN108074953A (zh) * | 2016-11-15 | 2018-05-25 | 三星显示有限公司 | 有机发光显示装置及其制造方法 |
JP2018092929A (ja) * | 2016-11-30 | 2018-06-14 | エルジー ディスプレイ カンパニー リミテッド | 有機発光表示装置 |
JP7438971B2 (ja) | 2019-01-10 | 2024-02-27 | 京東方科技集團股▲ふん▼有限公司 | フレキシブル基板、その作製方法、ディスプレイ装置 |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101705822B1 (ko) * | 2010-10-27 | 2017-02-23 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
US8936965B2 (en) * | 2010-11-26 | 2015-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
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KR101747264B1 (ko) * | 2015-11-30 | 2017-06-15 | 엘지디스플레이 주식회사 | 표시 장치와 그의 제조 방법 |
KR102387859B1 (ko) * | 2016-09-30 | 2022-04-15 | 엘지디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
KR20180093192A (ko) * | 2017-02-10 | 2018-08-21 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 |
KR102485169B1 (ko) | 2017-09-08 | 2023-01-09 | 삼성디스플레이 주식회사 | 표시 장치, 이의 제조 방법, 및 전극 형성 방법 |
KR102503788B1 (ko) * | 2017-11-21 | 2023-02-27 | 삼성디스플레이 주식회사 | 식각액 조성물 및 이를 이용한 디스플레이 장치의 제조방법 |
CN110164911B (zh) * | 2018-07-10 | 2021-02-26 | 合肥视涯技术有限公司 | 一种顶发射式微腔oled显示装置 |
KR20200046196A (ko) * | 2018-10-23 | 2020-05-07 | 삼성디스플레이 주식회사 | 표시 장치 및 이의 제조 방법 |
US10872944B2 (en) * | 2018-11-26 | 2020-12-22 | Samsung Display Co., Ltd. | Display substrate, method of manufacturing display substrate, and display device including display substrate |
KR20200062863A (ko) * | 2018-11-27 | 2020-06-04 | 삼성전자주식회사 | 디스플레이 장치 및 제조 방법 |
CN109917593B (zh) * | 2019-02-22 | 2022-05-13 | 京东方科技集团股份有限公司 | 一种显示面板及其制备方法、显示装置 |
CN110137381B (zh) | 2019-06-11 | 2020-08-11 | 武汉华星光电半导体显示技术有限公司 | 一种oled显示面板 |
CN110389685A (zh) | 2019-07-23 | 2019-10-29 | 京东方科技集团股份有限公司 | 触控显示面板及其制作方法、和显示装置 |
TWI796079B (zh) * | 2022-01-07 | 2023-03-11 | 友達光電股份有限公司 | 元件基板及其製造方法 |
CN115132749B (zh) * | 2022-06-28 | 2023-05-02 | 昆山国显光电有限公司 | 阵列基板及显示面板 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004055461A (ja) * | 2002-07-23 | 2004-02-19 | Seiko Epson Corp | 発光装置及びその製造方法、並びに電子機器 |
JP2005093329A (ja) * | 2003-09-19 | 2005-04-07 | Sony Corp | 表示素子およびこれを用いた表示装置 |
JP2005197011A (ja) * | 2003-12-26 | 2005-07-21 | Sanyo Electric Co Ltd | 表示装置及びその製造方法 |
JP2007025557A (ja) * | 2005-07-21 | 2007-02-01 | Toshiba Matsushita Display Technology Co Ltd | 表示装置及びその製造方法 |
WO2007148540A1 (ja) * | 2006-06-19 | 2007-12-27 | Sony Corporation | 発光表示装置およびその製造方法 |
JP2008233844A (ja) * | 2007-03-22 | 2008-10-02 | Samsung Sdi Co Ltd | 半導体装置およびその製造方法 |
JP2010092665A (ja) * | 2008-10-06 | 2010-04-22 | Toshiba Mobile Display Co Ltd | 有機el表示装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4439260B2 (ja) | 2003-12-26 | 2010-03-24 | 三洋電機株式会社 | 表示装置の製造方法 |
JP2005197009A (ja) | 2003-12-26 | 2005-07-21 | Sanyo Electric Co Ltd | 表示装置及びその製造方法及び製造装置 |
JP4739185B2 (ja) | 2004-03-05 | 2011-08-03 | 出光興産株式会社 | 有機エレクトロルミネッセンス表示装置 |
KR100721554B1 (ko) * | 2004-07-22 | 2007-05-23 | 삼성에스디아이 주식회사 | 유기 전계 발광 소자 및 그의 제조 방법 |
KR100669742B1 (ko) * | 2004-10-28 | 2007-01-16 | 삼성에스디아이 주식회사 | 테스트패드를 구비한 유기전계 발광표시장치 |
KR100709255B1 (ko) * | 2005-08-11 | 2007-04-19 | 삼성에스디아이 주식회사 | 평판 표시 장치 및 그 제조 방법 |
JP4899418B2 (ja) | 2005-10-28 | 2012-03-21 | セイコーエプソン株式会社 | 発光装置および電子機器 |
US7801716B2 (en) * | 2005-11-30 | 2010-09-21 | 3M Innovative Properties Company | Computerized modeling for design and evaluation of organic light emitting diodes |
KR20080061675A (ko) | 2006-12-28 | 2008-07-03 | 엘지디스플레이 주식회사 | 유기 발광 소자 및 그의 제조방법 |
-
2009
- 2009-12-10 KR KR1020090122530A patent/KR101108160B1/ko active IP Right Grant
-
2010
- 2010-08-17 JP JP2010182294A patent/JP5979773B2/ja active Active
- 2010-10-12 US US12/902,509 patent/US8513652B2/en active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004055461A (ja) * | 2002-07-23 | 2004-02-19 | Seiko Epson Corp | 発光装置及びその製造方法、並びに電子機器 |
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WO2007148540A1 (ja) * | 2006-06-19 | 2007-12-27 | Sony Corporation | 発光表示装置およびその製造方法 |
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KR20110065852A (ko) | 2011-06-16 |
US8513652B2 (en) | 2013-08-20 |
JP5979773B2 (ja) | 2016-08-31 |
KR101108160B1 (ko) | 2012-01-31 |
US20110140114A1 (en) | 2011-06-16 |
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