JP2011054960A - ダイオードレーザポンプアレイを均一化する方法及びシステム - Google Patents
ダイオードレーザポンプアレイを均一化する方法及びシステム Download PDFInfo
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
- G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
- G02B19/0057—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode in the form of a laser diode array, e.g. laser diode bar
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
- G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0944—Diffractive optical elements, e.g. gratings, holograms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Lasers (AREA)
- Glass Compositions (AREA)
Abstract
【解決手段】アレイ構成で配設された複数の半導体ダイオードレーザバーにより構成されるダイオードポンプアレイ100から出射する不均一な光強度プロファイルを持つレーザビームを、回折型ホモジナイザ410を通過させることで均一化し利得媒体420に照射する。
【選択図】図4
Description
2009年8月19日に出願した「Method and System for Homogenizing Diode Laser Pump Arrays」(代理人整理番号027512−001300US)と題する米国特許出願第12/544,147号、及び
2009年8月19日に出願した「Diffractive Laser Beam Homogenizer including a Photo−Active Material and Method of Fabricating the Same」(代理人整理番号027512−001400US)と題する米国特許出願第12/544,161号は、
同時に出願したものであり、他方の出願の開示全体を、あらゆる目的のために参照することにより本出願に援用する。
Claims (20)
- アレイ構成で配設された複数の半導体ダイオードレーザバーを備え、隣り合う半導体ダイオードレーザバーの間の周期的な距離によって特徴付けられるダイオードポンプアレイであって、前記周期的な距離が、前記複数の半導体ダイオードレーザバーそれぞれに垂直な第1の方向において測定されるものであり、該ダイオードポンプアレイが、光路に沿って伝搬し、且つ、前記第1の方向の関数として測定されると共に10%より大きい変化を有する第1の強度プロファイルによって特徴付けられるポンプ出力を与える、該ダイオードポンプアレイと、
前記光路に沿って配設された回折光学部品であって、光熱屈折ガラス部材を含む該回折光学部品と、
入射面を有し、前記光路に沿っており且つ所定の距離だけ前記回折光学部品から離れた位置に存在する増幅器スラブであって、前記第1の方向の関数として該増幅器スラブの前記入射面で測定される第2の強度プロファイルが10%未満の変化を有する、該増幅器スラブと、
を備える光増幅器システム。 - 前記光熱屈折性ガラス部材が、屈折率の連続的変化を有する、請求項1に記載の光増幅器システム。
- 前記光熱屈折性ガラス部材が、正弦曲線の格子構造を実質的に有していない、請求項1に記載の光増幅器システム。
- 前記格子構造が、周期的であるか、又はチャープを有する、請求項3に記載の光増幅器システム。
- 前記回折光学部品と前記増幅器スラブの間の前記光路に沿って配設された1以上のレンズを更に備える、請求項1に記載の光増幅器システム。
- 前記光熱屈折性ガラス部材が、第2の平坦面に対向する第1の平坦面を有する、請求項1に記載の光増幅器システム。
- 前記第1の強度プロファイルが、10%〜300%の変化を有する、請求項1に記載の光増幅器システム。
- 前記第1の強度プロファイルが、10%〜100%の変化を有する、請求項7に記載の光増幅器システム。
- 前記第1の強度プロファイルが、10%〜50%の変化を有する、請求項8に記載の光増幅器システム。
- 前記第2の強度プロファイルが、1%〜10%の変化を有する、請求項1に記載の光増幅器システム。
- 前記第2の強度プロファイルが、2%〜5%の変化を有する、請求項10に記載の光増幅器システム。
- 回折型ホモジナイザを製造する方法であって、
所定のグレイスケール強度パターンを有する部分的に透過性の光学要素を用意するステップと、
透明光学素子を用意するステップと、
UV放射を、前記部分的に透過性の光学要素を介して前記透明光学素子に入射するように向けるステップと、
前記透明光学素子の所定部分を前記UV放射に露光するステップと、
前記透明光学素子を熱処理して、前記透明光学素子内の位置の関数としての連続的に変化する屈折率プロファイルによって特徴付けられる前記回折型ホモジナイザを製作するステップと、
を含む方法。 - 前記連続的に変化する屈折率プロファイルが、光放射のための回折効果を有する面によって特徴付けられる、請求項12に記載の方法。
- 前記透明光学素子が、光熱屈折性(PTR)ガラスを含む、請求項12に記載の方法。
- 前記透明光学素子の第2の所定部分を前記UV放射に露光するステップを更に含む、請求項12に記載の方法。
- 前記所定のグレイスケール強度パターンの範囲が、前記透明光学素子の前記所定部分の範囲及び前記透明光学素子の前記第2の所定部分の範囲よりも小さい、請求項15に記載の方法。
- 前記部分的に透過性の光学要素が、写真イメージを含む、請求項12に記載の方法。
- 前記部分的に透過性の光学要素が、空間光変調器アレイを含む、請求項12に記載の方法。
- 前記透明光学素子が、PTRガラスを含む、請求項12に記載の方法。
- 前記PTRガラスが、直方体を構成し、前記UV放射が、前記直方体の最小面に垂直な面で該直方体に入射する、請求項19に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/544,147 US8547632B2 (en) | 2009-08-19 | 2009-08-19 | Method and system for homogenizing diode laser pump arrays |
US12/544,147 | 2009-08-19 |
Publications (2)
Publication Number | Publication Date |
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JP2011054960A true JP2011054960A (ja) | 2011-03-17 |
JP5574376B2 JP5574376B2 (ja) | 2014-08-20 |
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JP2010179478A Active JP5574376B2 (ja) | 2009-08-19 | 2010-08-10 | ダイオードレーザポンプアレイを均一化する方法及びシステム |
Country Status (4)
Country | Link |
---|---|
US (1) | US8547632B2 (ja) |
JP (1) | JP5574376B2 (ja) |
CN (1) | CN101997266A (ja) |
RU (1) | RU2010134536A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2018181991A (ja) * | 2017-04-10 | 2018-11-15 | 株式会社島津製作所 | 固体レーザ装置 |
JP2020013659A (ja) * | 2018-07-13 | 2020-01-23 | 大日本印刷株式会社 | 照明装置および照明装置ユニット |
Families Citing this family (14)
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EP3709061B1 (en) | 2009-08-19 | 2022-12-14 | Lawrence Livermore National Security, LLC | Method of fabricating and method of using a diffractive optic |
US8728719B2 (en) * | 2009-08-19 | 2014-05-20 | Lawrence Livermore National Security, Llc | Diffractive laser beam homogenizer including a photo-active material and method of fabricating the same |
US10095016B2 (en) | 2011-01-04 | 2018-10-09 | Nlight, Inc. | High power laser system |
US9429742B1 (en) * | 2011-01-04 | 2016-08-30 | Nlight, Inc. | High power laser imaging systems |
US9409255B1 (en) | 2011-01-04 | 2016-08-09 | Nlight, Inc. | High power laser imaging systems |
US9720244B1 (en) | 2011-09-30 | 2017-08-01 | Nlight, Inc. | Intensity distribution management system and method in pixel imaging |
CN104428879B (zh) | 2012-05-30 | 2018-01-30 | 应用材料公司 | 用于快速热处理的设备及方法 |
US9310248B2 (en) | 2013-03-14 | 2016-04-12 | Nlight, Inc. | Active monitoring of multi-laser systems |
US9709810B2 (en) | 2014-02-05 | 2017-07-18 | Nlight, Inc. | Single-emitter line beam system |
CN103972777B (zh) * | 2014-04-23 | 2017-12-26 | 中国科学院物理研究所 | 激光多通放大器 |
US10008822B2 (en) * | 2014-10-10 | 2018-06-26 | The Boeing Company | Laser system and method for controlling the wave front of a laser beam |
CN105092216B (zh) * | 2015-08-29 | 2020-08-07 | 中国科学院光电研究院 | 一种激光二极管面阵泵浦均匀性检测装置 |
JP6376412B2 (ja) * | 2016-02-16 | 2018-08-22 | ウシオ電機株式会社 | レーザシート光源装置 |
CN109555994A (zh) * | 2018-12-24 | 2019-04-02 | 中山市永乐电子有限公司 | 一种双发光二合一手电筒 |
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- 2010-08-18 RU RU2010134536/28A patent/RU2010134536A/ru not_active Application Discontinuation
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US6215598B1 (en) * | 1998-10-05 | 2001-04-10 | Ruey Jennifer Hwu | Apparatus and method for concentrating beams from broad area diode lasers, diode laser bars and/ or diode laser arrays |
JP2004126312A (ja) * | 2002-10-03 | 2004-04-22 | Japan Science & Technology Corp | 三次元ホログラフィック記録方法および三次元ホログラフィック記録装置 |
JP2005285812A (ja) * | 2004-03-26 | 2005-10-13 | Hamamatsu Photonics Kk | 固体レーザ媒質の励起分布を制御する装置および方法 |
JP2008511131A (ja) * | 2004-08-21 | 2008-04-10 | ディラス ディオーデンレーザー ゲゼルシャフト ミット ベシュレンクテル ハフツング | ダイオードレーザ |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2018181991A (ja) * | 2017-04-10 | 2018-11-15 | 株式会社島津製作所 | 固体レーザ装置 |
JP2020013659A (ja) * | 2018-07-13 | 2020-01-23 | 大日本印刷株式会社 | 照明装置および照明装置ユニット |
JP7131153B2 (ja) | 2018-07-13 | 2022-09-06 | 大日本印刷株式会社 | 照明装置および照明装置ユニット |
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JP5574376B2 (ja) | 2014-08-20 |
CN101997266A (zh) | 2011-03-30 |
US20110043900A1 (en) | 2011-02-24 |
US8547632B2 (en) | 2013-10-01 |
RU2010134536A (ru) | 2012-02-27 |
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