JP2011040641A - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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- JP2011040641A JP2011040641A JP2009188000A JP2009188000A JP2011040641A JP 2011040641 A JP2011040641 A JP 2011040641A JP 2009188000 A JP2009188000 A JP 2009188000A JP 2009188000 A JP2009188000 A JP 2009188000A JP 2011040641 A JP2011040641 A JP 2011040641A
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Abstract
【解決手段】半導体基板1上に複数のロジック用pチャネル型MISFETQp1と、複数のロジック用nチャネル型MISFETQn1と、複数のメモリ用pチャネル型MISFETQp2と、複数のメモリ用nチャネル型MISFETQn2とが混載されている。複数のロジック用pチャネル型MISFETQp1のうちの少なくとも一部は、シリコンゲルマニウムで構成されたソース・ドレイン領域を有し、複数のロジック用nチャネル型MISFETQn1の全ては、それぞれシリコンで構成されたソース・ドレイン領域を有している。複数のメモリ用pチャネル型MISFETQp2の全ては、それぞれシリコンで構成されたソース・ドレイン領域を有し、複数のメモリ用nチャネル型MISFETQn2の全ては、それぞれシリコンで構成されたソース・ドレイン領域を有している。
【選択図】図19
Description
このシリコンゲルマニウムで構成されたソース・ドレイン領域によって、pチャネル型MISFETQp1のチャネル領域に圧縮応力を作用させるSiGe歪み技術により、pチャネル型MISFETのチャネル領域における正孔の移動度を増加させることができる。これにより、pチャネル型MISFETのチャネルを流れるオン電流を増加させることができる。
本実施の形態の半導体装置の製造工程を図面を参照して説明する。図1〜図13、図16〜図19は、本発明の一実施の形態である半導体装置、ここではCMISFET(Complementary Metal Insulator Semiconductor Field Effect Transistor)を有する半導体装置(後述の半導体装置SM1に対応)の製造工程中の要部断面図である。図14および図15は、第1の熱処理の手法の好ましい一例を示す説明図である。
図27〜図32は、本実施の形態の半導体装置の製造工程中の要部断面図である。
1A ロジックnMIS領域
1B ロジックpMIS領域
1C メモリnMIS領域
1D メモリpMIS領域
2 素子分離領域
3 ゲート絶縁膜
4 シリコン膜
5 酸化シリコン膜
6 窒化シリコン膜
7 酸化シリコン膜
8 窒化シリコン膜
9 溝
10 シリコンゲルマニウム領域
11 シリコン領域
21 ニッケル合金膜
22 バリア膜
23,23a 金属シリサイド層
23b 偏析領域
31 絶縁膜
32 層間絶縁膜
33 ストッパ絶縁膜
34 絶縁膜
41 メモリ領域
42 周辺回路領域
42a ロジック回路領域
51 絶縁膜
52 絶縁膜
123 ニッケルシリサイド層
123c NiSi2異常成長領域
CMB チャンバ
CNT コンタクトホール
EX エクステンション領域
EX1,EX3 n−型半導体領域
EX2,EX4 p−型半導体領域
GE,GE1,GE2,GE3,GE4 ゲート電極
H1 噴出孔
HB1,HB2 ヒータブロック
M1 配線
NW1,NW2 n型ウエル
PD パッド電極
PG プラグ
PW,PW1,PW2 p型ウエル
Qn1,Qn2 nチャネル型MISFET
Qp1,Qp2 pチャネル型MISFET
SD ソース・ドレイン領域
SD1,SD3 n+型半導体領域
SD2,SD4 p+型半導体領域
SM1 半導体装置
SW1,SW2 サイドウォール
WF 半導体ウエハ
Claims (21)
- 半導体基板上に複数のロジック用pチャネル型電界効果トランジスタと複数のロジック用nチャネル型電界効果トランジスタと複数のメモリ用pチャネル型電界効果トランジスタとが混載された半導体装置であって、
前記複数のロジック用pチャネル型電界効果トランジスタのうちの少なくとも一部は、シリコンゲルマニウムで構成された第1ソース・ドレイン領域を有し、
前記複数のロジック用nチャネル型電界効果トランジスタの全ては、それぞれシリコンで構成された第2ソース・ドレイン領域を有し、
前記複数のメモリ用pチャネル型電界効果トランジスタの全ては、それぞれシリコンで構成された第3ソース・ドレイン領域を有していることを特徴とする半導体装置。 - 請求項1記載の半導体装置において、
前記半導体基板上に形成された複数のメモリ用nチャネル型電界効果トランジスタを更に有し、
前記複数のメモリ用nチャネル型電界効果トランジスタの全ては、それぞれシリコンで構成された第4ソース・ドレイン領域を有していることを特徴とする半導体装置。 - 請求項2記載の半導体装置において、
前記複数のロジック用pチャネル型電界効果トランジスタのうち、演算回路に用いられる前記ロジック用pチャネル型電界効果トランジスタは、シリコンゲルマニウムで構成された前記第1ソース・ドレイン領域を有していることを特徴とする半導体装置。 - 請求項3記載の半導体装置において、
前記半導体基板は、シリコン基板であり、面方位は(100)方位であることを特徴とする半導体装置。 - 請求項4記載の半導体装置において、
シリコンゲルマニウムで構成された前記第1ソース・ドレイン領域を有する前記ロジック用pチャネル型電界効果トランジスタは、チャネル領域のゲート長方向が<110>方向であることを特徴とする半導体装置。 - 請求項5記載の半導体装置において、
前記複数のロジック用nチャネル型トランジスタの前記第2ソース・ドレイン領域および前記複数のメモリ用nチャネル型電界効果トランジスタの前記第4ソース・ドレイン領域上には、それぞれ金属シリサイド層が形成されており、
前記金属シリサイド層は、Pt,Pd,Hf,V,Al,Er,Yb,Coからなる群から選択された少なくとも一種以上の金属元素とNiとを含有していることを特徴とする半導体装置。 - 請求項6記載の半導体装置において、
前記複数のロジック用nチャネル型電界効果トランジスタおよび前記複数のメモリ用nチャネル型電界効果トランジスタは、チャネル領域のゲート長方向が<110>方向であるnチャネル型電界効果トランジスタを含むことを特徴とする半導体装置。 - 請求項7記載の半導体装置において、
シリコンで構成された前記第2、第3および第4ソース・ドレイン領域は、前記半導体基板に不純物を導入することで形成され、
シリコンゲルマニウムで構成された前記第1ソース・ドレイン領域は、前記半導体基板に設けた溝内にエピタキシャル成長したシリコンゲルマニウムで形成されていることを特徴とする半導体装置。 - 請求項8記載の半導体装置において、
前記金属シリサイド層は、シリコンで構成された前記半導体基板との界面近傍に前記金属元素が偏析していることを特徴とする半導体装置。 - 請求項9記載の半導体装置において、
前記金属元素はPtであることを特徴とする半導体装置。 - 請求項10記載の半導体装置において、
前記複数のロジック用pチャネル型電界効果トランジスタおよび前記複数のメモリ用pチャネル型電界効果トランジスタを覆うように前記半導体基板上に形成された圧縮応力膜と、前記複数のロジック用nチャネル型電界効果トランジスタおよび前記複数のメモリ用nチャネル型電界効果トランジスタを覆うように前記半導体基板上に形成された引張応力膜とを更に有していることを特徴とする半導体装置。 - 半導体基板のロジック第1領域にロジック用pチャネル型電界効果トランジスタを有し、前記半導体基板のロジック第2領域にロジック用nチャネル型電界効果トランジスタを有し、前記半導体基板のメモリ第1領域にメモリ用pチャネル型電界効果トランジスタを有し、かつ前記半導体基板のメモリ第2領域にメモリ用nチャネル型電界効果トランジスタを有する半導体装置の製造方法であって、
(a)前記半導体基板を準備する工程、
(b)前記(a)工程後、前記ロジック第1領域に前記ロジック用pチャネル型電界効果トランジスタの第1ゲート電極を、前記ロジック第2領域に前記ロジック用nチャネル型電界効果トランジスタの第2ゲート電極を、前記メモリ第1領域の前記メモリ用pチャネル型電界効果トランジスタの第3ゲート電極を、前記メモリ第2領域に前記メモリ用nチャネル型電界効果トランジスタの第4ゲート電極を、前記半導体基板上にそれぞれゲート絶縁膜を介して形成する工程、
(c)前記ロジック第1領域に溝を形成し、該溝内にシリコンゲルマニウム領域をエピタキシャル成長させることで、前記ロジック用pチャネル型電界効果トランジスタのシリコンゲルマニウムで構成された第1ソース・ドレイン領域を形成する工程、
(d)前記ロジック第2領域に前記ロジック用nチャネル型電界効果トランジスタの第2ソース・ドレイン領域を、前記メモリ第1領域に前記メモリ用pチャネル型電界効果トランジスタの第3ソース・ドレイン領域を、前記メモリ第2領域に前記メモリ用nチャネル型電界効果トランジスタの第4ソース・ドレイン領域を、それぞれ前記半導体基板に不純物をイオン注入することによって形成する工程、
を有し、
前記溝および前記シリコンゲルマニウム領域は、前記ロジック第1領域には形成されるが、前記ロジック第2領域、前記メモリ第1領域および前記メモリ第2領域には形成されないことを特徴とする半導体装置の製造方法。 - 請求項12記載の半導体装置の製造方法において、
前記半導体基板は、シリコン基板で、面方位は(100)方位であり、
前記ロジック用pチャネル型電界効果トランジスタは、チャネル領域のゲート長方向が<110>方向であることを特徴とする半導体装置の製造方法。 - 請求項13記載の半導体装置の製造方法において、
前記(d)工程後に、
(e)前記第2および第4ソース・ドレイン領域上を含む前記半導体基板上に、ニッケル合金膜を形成する工程、
(f)前記(e)工程後、第1熱処理を行って前記ニッケル合金膜と前記第2および第4ソース・ドレイン領域とを反応させて、前記第2および第4ソース・ドレイン領域上に金属シリサイド層を形成する工程、
(g)前記(f)工程後、前記(f)工程にて反応しなかった前記ニッケル合金膜を除去する工程、
(h)前記(g)工程後、前記第1熱処理よりも高い熱処理温度で第2熱処理を行って、前記金属シリサイド層を前記第2および第4ソース・ドレイン領域と更に反応させる工程、
を有することを特徴とする半導体装置の製造方法。 - 請求項14記載の半導体装置の製造方法において、
前記ニッケル合金膜は、Pt,Pd,Hf,V,Al,Er,Yb,Coからなる群から選択された少なくとも一種以上の元素とNiとの合金膜であることを特徴とする半導体装置の製造方法。 - 請求項15記載の半導体装置の製造方法において、
前記ニッケル合金膜は、ニッケル白金合金膜であることを特徴とする半導体装置の製造方法。 - 請求項16記載の半導体装置の製造方法において、
前記(f)工程の前記第1熱処理の熱処理温度は200〜300℃の範囲内で、熱処理時間は10〜60秒の範囲内であり、
前記(h)工程の前記第2熱処理の熱処理温度は400〜600℃の範囲内で、熱処理時間は30秒以下であることを特徴とする半導体装置の製造方法。 - 請求項17記載の半導体装置の製造方法において、
前記(f)工程の前記第1熱処理の熱処理温度は240〜280℃の範囲内であり、
前記(h)工程の前記第2熱処理の熱処理温度は500〜550℃の範囲内であることを特徴とする半導体装置の製造方法。 - 請求項18記載の半導体装置の製造方法において、
前記ニッケル合金膜における白金濃度は、3〜7原子%であることを特徴とする半導体装置の製造方法。 - 請求項19記載の半導体装置の製造方法において、
前記(h)工程後、前記半導体基板上に引張応力膜または圧縮応力膜を形成する工程、
を更に有することを特徴とする半導体装置の製造方法。 - 請求項20記載の半導体装置の製造方法において、
前記(f)工程で前記第1の熱処理を行った段階の前記金属シリサイド層および前記(h)工程で前記第2の熱処理を行った段階の前記金属シリサイド層は、シリコンで構成された前記半導体基板との界面近傍にPtが偏析していることを特徴とする半導体装置の製造方法。
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