JP2011040548A5 - - Google Patents

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Publication number
JP2011040548A5
JP2011040548A5 JP2009186143A JP2009186143A JP2011040548A5 JP 2011040548 A5 JP2011040548 A5 JP 2011040548A5 JP 2009186143 A JP2009186143 A JP 2009186143A JP 2009186143 A JP2009186143 A JP 2009186143A JP 2011040548 A5 JP2011040548 A5 JP 2011040548A5
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JP
Japan
Prior art keywords
light
measurement
intensity
regions
measured
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JP2009186143A
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English (en)
Japanese (ja)
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JP2011040548A (ja
JP5406623B2 (ja
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Priority to JP2009186143A priority Critical patent/JP5406623B2/ja
Priority claimed from JP2009186143A external-priority patent/JP5406623B2/ja
Priority to US12/840,553 priority patent/US8593615B2/en
Priority to TW099125098A priority patent/TWI427433B/zh
Priority to KR1020100074657A priority patent/KR20110016400A/ko
Publication of JP2011040548A publication Critical patent/JP2011040548A/ja
Publication of JP2011040548A5 publication Critical patent/JP2011040548A5/ja
Application granted granted Critical
Publication of JP5406623B2 publication Critical patent/JP5406623B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2009186143A 2009-08-10 2009-08-10 計測装置、露光装置及びデバイスの製造方法 Expired - Fee Related JP5406623B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009186143A JP5406623B2 (ja) 2009-08-10 2009-08-10 計測装置、露光装置及びデバイスの製造方法
US12/840,553 US8593615B2 (en) 2009-08-10 2010-07-21 Height measurement apparatus, exposure apparatus, and device fabrication method
TW099125098A TWI427433B (zh) 2009-08-10 2010-07-29 測量設備、曝光設備，以及裝置製造方法
KR1020100074657A KR20110016400A (ko) 2009-08-10 2010-08-02 측정 장치, 노광 장치 및 디바이스 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009186143A JP5406623B2 (ja) 2009-08-10 2009-08-10 計測装置、露光装置及びデバイスの製造方法

Publications (3)

Publication Number Publication Date
JP2011040548A JP2011040548A (ja) 2011-02-24
JP2011040548A5 true JP2011040548A5 (enExample) 2012-09-13
JP5406623B2 JP5406623B2 (ja) 2014-02-05

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ID=43534614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009186143A Expired - Fee Related JP5406623B2 (ja) 2009-08-10 2009-08-10 計測装置、露光装置及びデバイスの製造方法

Country Status (4)

Country Link
US (1) US8593615B2 (enExample)
JP (1) JP5406623B2 (enExample)
KR (1) KR20110016400A (enExample)
TW (1) TWI427433B (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5971965B2 (ja) * 2012-02-07 2016-08-17 キヤノン株式会社 面形状計測方法、面形状計測装置、プログラム、および、光学素子の製造方法
CN103309163B (zh) * 2012-03-07 2015-08-26 上海微电子装备有限公司 外参考干涉硅片对准系统
CN103207532B (zh) * 2013-04-21 2014-10-22 中国科学院光电技术研究所 一种同轴检焦测量系统及其测量方法
US10152998B2 (en) * 2014-04-07 2018-12-11 Seagate Technology Llc Features maps of articles with polarized light
JP6412710B2 (ja) * 2014-04-08 2018-10-24 株式会社ミツトヨ 光干渉測定装置
WO2016084194A1 (ja) * 2014-11-27 2016-06-02 株式会社東京精密 形状測定装置
JP6685741B2 (ja) * 2015-02-16 2020-04-22 キヤノン株式会社 形状計測方法、形状計測装置、プログラム、記録媒体及び光学素子の製造方法
JP2017090395A (ja) * 2015-11-17 2017-05-25 株式会社ミツトヨ 干渉対物レンズ及び参照面ユニットセット
JP6704813B2 (ja) * 2016-08-05 2020-06-03 キヤノン株式会社 計測装置、露光装置、および物品の製造方法
CN107966453B (zh) * 2016-10-20 2020-08-04 上海微电子装备（集团）股份有限公司 一种芯片缺陷检测装置及检测方法
US10794688B2 (en) * 2018-03-07 2020-10-06 Mitutoyo Corporation Optical interference measuring device
KR20230099850A (ko) * 2021-12-28 2023-07-05 삼성전자주식회사 이미징 어셈블리 및 이를 포함하는 분광 영상 타원분광기

Family Cites Families (13)

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Publication number Priority date Publication date Assignee Title
US4340306A (en) * 1980-02-04 1982-07-20 Balasubramanian N Optical system for surface topography measurement
US6560299B1 (en) * 1999-07-30 2003-05-06 Christopher H Strolle Diversity receiver with joint signal processing
DE10039239A1 (de) * 2000-08-11 2002-03-07 Bosch Gmbh Robert Optische Messvorrichtung
AU2003253725A1 (en) * 2002-07-01 2004-01-19 Lightgace, Inc. Frequency-scanning interferometer with non-specular reference surface
KR100641885B1 (ko) 2004-06-15 2006-11-02 주식회사 나노시스템 수평 방향 스캐닝 방식의 광위상 간섭측정방법 및 장치
JP4554385B2 (ja) * 2005-01-27 2010-09-29 浜松ホトニクス株式会社 表面形状計測方法及び計測装置
JP2006242570A (ja) * 2005-02-28 2006-09-14 Fuji Xerox Co Ltd 表面形状測定装置
US7636168B2 (en) * 2005-10-11 2009-12-22 Zygo Corporation Interferometry method and system including spectral decomposition
KR101257538B1 (ko) 2006-02-01 2013-04-24 토레 엔지니어링 가부시키가이샤 표면형상의 측정방법 및 이것을 이용한 장치
JP4884850B2 (ja) * 2006-06-13 2012-02-29 浜松ホトニクス株式会社 干渉測定装置
JP4987359B2 (ja) * 2006-06-13 2012-07-25 浜松ホトニクス株式会社 表面形状計測装置
US7916284B2 (en) 2006-07-18 2011-03-29 Asml Netherlands B.V. Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
JP4512627B2 (ja) 2007-10-03 2010-07-28 キヤノン株式会社 測定装置、露光装置及びデバイス製造方法

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