JP2011014909A - 自己整列式縦ヒータと低抵抗率界面を備えた相変化メモリセル - Google Patents
自己整列式縦ヒータと低抵抗率界面を備えた相変化メモリセル Download PDFInfo
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- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
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- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/30—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors
- H10B63/32—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors of the bipolar type
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
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- H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
- H10B63/84—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays arranged in a direction perpendicular to the substrate, e.g. 3D cell arrays
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- H10N70/063—Patterning of the switching material by etching of pre-deposited switching material layers, e.g. lithography
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- H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
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- H10N70/881—Switching materials
- H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
- H10N70/8828—Tellurides, e.g. GeSbTe
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0004—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements comprising amorphous/crystalline phase transition cells
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0021—Auxiliary circuits
- G11C13/0069—Writing or programming circuits or methods
- G11C2013/008—Write by generating heat in the surroundings of the memory material, e.g. thermowrite
Abstract
【解決手段】自己整列式縦ヒータ素子と選択デバイスの接点領域の間に低抵抗率界面材料が提供されている。相変化カルコゲナイド材料を、縦ヒータ素子の上に直接堆積させている。或る実施形態では、縦ヒータ素子は、ワード線方向に沿った曲線状の縦壁と横基部を有するL字形である。或る実施形態では、低抵抗率界面材料は、PVD技法を使用して、負の輪郭を有するトレンチの中へ堆積させてゆく。低抵抗率界面材料の上側面は、先細の鳥のくちばし状伸張部を有していてもよい。
【選択図】図2
Description
12 p型コレクタ(共通)
14 n型ワード線
14a 14の上側部分
14b 14の下側部分
16 エミッタピラー
17 p+エミッタ領域
18 基部接点
19 n+基部領域
20、22 トレンチ隔離部
21、23 誘電性材料
26 ケイ化物接点領域
30、31、38、56 誘電層
32 トレンチ
34 側壁
36 導電層
42 スペーサ
44 低抵抗率界面層
50 L字形ヒータ素子
52 曲線状の縦壁
54 横基部
60 相変化材料
62 キャップ層
70 ビット線
72 ワード線
74、76 プラグ
1200 システム
1210 コントローラ
1220 入力/出力(I/O)デバイス
1230 メモリ
1240 無線インターフェース
1250 バス
1260 スタティックランダムアクセスメモリ(SRAM)
1280 バッテリ
Claims (20)
- 相変化メモリセルにおいて、
選択デバイスと、
前記選択デバイス上の接点領域と、
前記接点領域と直接接触している界面層と、
前記界面層と直接接触している縦ヒータ素子と、
前記縦ヒータ素子と直接接触している相変化材料と、を備えている相変化メモリセル。 - 前記接点領域はケイ化物であり、前記選択デバイスはpnp−BJTである、請求項1に記載の相変化メモリ。
- 前記縦ヒータ素子はL字形である、請求項1に記載の相変化メモリ。
- 前記L字形ヒータ素子は、曲線状の縦壁と横基部を有している、請求項3に記載の相変化メモリ。
- 前記相変化材料はカルコゲナイドを備えている、請求項1に記載の相変化メモリ。
- 前記縦ヒータ素子は金属窒化物を備えている、請求項1に記載の相変化メモリ。
- 前記界面層は金属系の層である、請求項1に記載の相変化メモリ。
- 前記金属系の層は、コバルト、チタン、タンタル、及びタングステンから成る群から選択された金属を備えている、請求項7に記載の相変化メモリ。
- 前記金属系の層は、大凡5nm乃至10nmの厚さを有している、請求項7に記載の相変化メモリ。
- 前記界面層の最上部分は、先細の鳥のくちばし状伸張部を備えている、請求項1に記載の相変化メモリ。
- 前記横基部上に配置されているスペーサを更に備えている、請求項4に記載の相変化メモリ。
- 相変化メモリアレイにおいて、
複数の選択デバイスと、
前記複数の選択デバイスの各デバイス上のケイ化物接点領域と、
前記ケイ化物接点領域の各領域上に当該領域と直接接触して形成されている界面材料と、
前記相変化メモリアレイのワード線方向に沿って前記複数の界面材料と直接接触して伸張している複数のL字形ヒータ素子と、
前記複数のL字形ヒータ素子と直接接触している相変化材料と、を備えており、
前記複数のL字形ヒータ素子は、前記相変化メモリアレイのビット線方向に沿って伸張している前記相変化材料と自己整列している、相変化メモリアレイ。 - 前記L字形ヒータ素子は、それぞれ、曲線状の縦壁を備えている、請求項12に記載の相変化メモリアレイ。
- 前記界面材料の最上部分は、先細の鳥のくちばし状伸張部を備えている、請求項12に記載の相変化メモリアレイ。
- 相変化メモリセルを形成する方法において、
選択デバイスの接点領域を覆って第1の誘電層を堆積させる段階と、
前記第1の誘電層にトレンチを形成して、前記トレンチの底に前記接点領域を露出する段階と、
前記第1の誘電層をエッチングして、負の輪郭を有するトレンチ側壁を形成する段階と、
前記トレンチに界面層を堆積させる段階、及び
前記界面層の上と前記トレンチの中に共形導電層を堆積させる段階と、
前記導電層の上と前記トレンチの中に第2の共形誘電層を堆積させる段階であって、このとき前記導電層と前記第2の共形誘電層は前記トレンチを完全に埋めない、前記堆積させる段階と、
前記界面層、導電層、及び前記第2の誘電層を異方的にエッチングバックする段階と、
前記導電層の上面と直接接触して相変化材料を堆積させる段階と、から成る方法。 - 前記第1の誘電層にトレンチを形成して、前記トレンチの底に前記接点領域を露出する段階は、
前記第1の誘電層を覆って第3の誘電層を堆積させる段階と、
前記第1と前記第2の誘電層をエッチングして、前記第1の誘電層に前記トレンチを形成する段階と、を含んでいる、請求項15に記載の方法。 - 前記相変化材料上に金属系のキャップを堆積させる段階を更に含んでいる、請求項15に記載の方法。
- 前記接点領域はケイ化物であり、前記選択デバイスはpnp−BJTである、請求項15に記載の方法。
- 界面層は金属系の層である、請求項15に記載の方法。
- 前記金属系の層の最上部分は、先細の鳥のくちばし状伸張部を備えている、請求項19に記載の方法。
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US12/496,503 | 2009-07-01 | ||
US12/496,503 US9246093B2 (en) | 2009-07-01 | 2009-07-01 | Phase change memory cell with self-aligned vertical heater and low resistivity interface |
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- 2010-06-29 CN CN2010102153018A patent/CN101944568A/zh active Pending
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US8614433B2 (en) | 2011-06-07 | 2013-12-24 | Samsung Electronics Co., Ltd. | Semiconductor devices and methods of manufacturing the same |
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KR20200138412A (ko) * | 2018-04-27 | 2020-12-09 | 마이크론 테크놀로지, 인크 | 트랜지스터, 트랜지스터의 어레이, 커패시터 및 고도방향으로 연장된 트랜지스터를 개별적으로 포함하는 메모리 셀의 어레이, 및 트랜지스터의 어레이를 형성하는 방법 |
KR102424126B1 (ko) | 2018-04-27 | 2022-07-22 | 마이크론 테크놀로지, 인크 | 트랜지스터, 트랜지스터의 어레이, 커패시터 및 고도방향으로 연장된 트랜지스터를 개별적으로 포함하는 메모리 셀의 어레이, 및 트랜지스터의 어레이를 형성하는 방법 |
US11545492B2 (en) | 2018-04-27 | 2023-01-03 | Micron Technology, Inc. | Transistors, arrays of transistors, arrays of memory cells individually comprising a capacitor and an elevationally-extending transistor, and methods of forming an array of transistors |
Also Published As
Publication number | Publication date |
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CN101944568A (zh) | 2011-01-12 |
TWI521757B (zh) | 2016-02-11 |
US20110001114A1 (en) | 2011-01-06 |
TW201114081A (en) | 2011-04-16 |
JP5631645B2 (ja) | 2014-11-26 |
US9412941B2 (en) | 2016-08-09 |
US9246093B2 (en) | 2016-01-26 |
KR20110002436A (ko) | 2011-01-07 |
US20150188040A1 (en) | 2015-07-02 |
DE102010023957A1 (de) | 2011-02-24 |
KR101619069B1 (ko) | 2016-05-10 |
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