JP2010539684A5 - - Google Patents

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Publication number
JP2010539684A5
JP2010539684A5 JP2010524219A JP2010524219A JP2010539684A5 JP 2010539684 A5 JP2010539684 A5 JP 2010539684A5 JP 2010524219 A JP2010524219 A JP 2010524219A JP 2010524219 A JP2010524219 A JP 2010524219A JP 2010539684 A5 JP2010539684 A5 JP 2010539684A5
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JP
Japan
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JP2010524219A
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JP2010539684A (ja
JP5580738B2 (ja
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Priority claimed from US12/205,514 external-priority patent/US7820460B2/en
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Publication of JP2010539684A publication Critical patent/JP2010539684A/ja
Publication of JP2010539684A5 publication Critical patent/JP2010539684A5/ja
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Publication of JP5580738B2 publication Critical patent/JP5580738B2/ja
Expired - Fee Related legal-status Critical Current
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JP2010524219A 2007-09-07 2008-09-08 太陽電池製造用のパターン化アセンブリ及び太陽電池の製造方法 Expired - Fee Related JP5580738B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US97066407P 2007-09-07 2007-09-07
US60/970,664 2007-09-07
US12/205,514 US7820460B2 (en) 2007-09-07 2008-09-05 Patterned assembly for manufacturing a solar cell and a method thereof
US12/205,514 2008-09-05
PCT/US2008/075551 WO2009033134A2 (en) 2007-09-07 2008-09-08 A patterned assembly for manufacturing a solar cell and a method thereof

Publications (3)

Publication Number Publication Date
JP2010539684A JP2010539684A (ja) 2010-12-16
JP2010539684A5 true JP2010539684A5 (ja) 2011-09-15
JP5580738B2 JP5580738B2 (ja) 2014-08-27

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010524219A Expired - Fee Related JP5580738B2 (ja) 2007-09-07 2008-09-08 太陽電池製造用のパターン化アセンブリ及び太陽電池の製造方法

Country Status (7)

Country Link
US (3) US7820460B2 (ja)
EP (1) EP2186138A4 (ja)
JP (1) JP5580738B2 (ja)
KR (1) KR101589228B1 (ja)
CN (1) CN101842911B (ja)
TW (1) TWI427813B (ja)
WO (1) WO2009033134A2 (ja)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7820460B2 (en) * 2007-09-07 2010-10-26 Varian Semiconductor Equipment Associates, Inc. Patterned assembly for manufacturing a solar cell and a method thereof
US7727866B2 (en) * 2008-03-05 2010-06-01 Varian Semiconductor Equipment Associates, Inc. Use of chained implants in solar cells
US20090227061A1 (en) * 2008-03-05 2009-09-10 Nicholas Bateman Establishing a high phosphorus concentration in solar cells
US8461032B2 (en) 2008-03-05 2013-06-11 Varian Semiconductor Equipment Associates, Inc. Use of dopants with different diffusivities for solar cell manufacture
US20090317937A1 (en) * 2008-06-20 2009-12-24 Atul Gupta Maskless Doping Technique for Solar Cells
EP2304803A1 (en) * 2008-06-11 2011-04-06 Solar Implant Technologies Inc. Solar cell fabrication using implantation
US20100154870A1 (en) * 2008-06-20 2010-06-24 Nicholas Bateman Use of Pattern Recognition to Align Patterns in a Downstream Process
WO2010030645A2 (en) * 2008-09-10 2010-03-18 Varian Semiconductor Equipment Associates, Inc. Techniques for manufacturing solar cells
US8202789B2 (en) 2008-09-10 2012-06-19 Varian Semiconductor Equipment Associates, Inc. Implanting a solar cell substrate using a mask
US20100184250A1 (en) * 2009-01-22 2010-07-22 Julian Blake Self-aligned selective emitter formed by counterdoping
WO2010108151A1 (en) * 2009-03-20 2010-09-23 Solar Implant Technologies, Inc. Advanced high efficiency crystalline solar cell fabrication method
US9006688B2 (en) * 2009-04-08 2015-04-14 Varian Semiconductor Equipment Associates, Inc. Techniques for processing a substrate using a mask
US8900982B2 (en) * 2009-04-08 2014-12-02 Varian Semiconductor Equipment Associates, Inc. Techniques for processing a substrate
US9076914B2 (en) * 2009-04-08 2015-07-07 Varian Semiconductor Equipment Associates, Inc. Techniques for processing a substrate
US8330128B2 (en) * 2009-04-17 2012-12-11 Varian Semiconductor Equipment Associates, Inc. Implant mask with moveable hinged mask segments
US20110027463A1 (en) * 2009-06-16 2011-02-03 Varian Semiconductor Equipment Associates, Inc. Workpiece handling system
US8749053B2 (en) 2009-06-23 2014-06-10 Intevac, Inc. Plasma grid implant system for use in solar cell fabrications
US8008176B2 (en) * 2009-08-11 2011-08-30 Varian Semiconductor Equipment Associates, Inc. Masked ion implant with fast-slow scan
US8461030B2 (en) 2009-11-17 2013-06-11 Varian Semiconductor Equipment Associates, Inc. Apparatus and method for controllably implanting workpieces
US20110120549A1 (en) * 2009-11-20 2011-05-26 Auria Solar Co., Ltd. Thin film solar cell and manufacturing method threof, method for increasing carrier mobility in semiconductor device, and semiconductor device
US8153456B2 (en) * 2010-01-20 2012-04-10 Varian Semiconductor Equipment Associates, Inc. Bifacial solar cell using ion implantation
US20110180131A1 (en) * 2010-01-27 2011-07-28 Varian Semiconductor Equipment Associates, Inc. Method for attaching contacts to a solar cell without cell efficiency loss
KR20110089497A (ko) * 2010-02-01 2011-08-09 삼성전자주식회사 기판에의 불순물 도핑 방법, 이를 이용한 태양 전지의 제조 방법 및 이를 이용하여 제조된 태양 전지
US8921149B2 (en) * 2010-03-04 2014-12-30 Varian Semiconductor Equipment Associates, Inc. Aligning successive implants with a soft mask
US8912082B2 (en) * 2010-03-25 2014-12-16 Varian Semiconductor Equipment Associates, Inc. Implant alignment through a mask
US8084293B2 (en) 2010-04-06 2011-12-27 Varian Semiconductor Equipment Associates, Inc. Continuously optimized solar cell metallization design through feed-forward process
JP5510070B2 (ja) * 2010-05-26 2014-06-04 トヨタ自動車株式会社 半導体装置の製造方法
US8110431B2 (en) 2010-06-03 2012-02-07 Suniva, Inc. Ion implanted selective emitter solar cells with in situ surface passivation
US8071418B2 (en) 2010-06-03 2011-12-06 Suniva, Inc. Selective emitter solar cells formed by a hybrid diffusion and ion implantation process
US8563351B2 (en) * 2010-06-25 2013-10-22 Taiwan Semiconductor Manufacturing Co., Ltd. Method for manufacturing photovoltaic device
US8664100B2 (en) 2010-07-07 2014-03-04 Varian Semiconductor Equipment Associates, Inc. Manufacturing high efficiency solar cell with directional doping
US20110139231A1 (en) * 2010-08-25 2011-06-16 Daniel Meier Back junction solar cell with selective front surface field
US8216923B2 (en) 2010-10-01 2012-07-10 Varian Semiconductor Equipment Associates, Inc. Integrated shadow mask/carrier for patterned ion implantation
US9231061B2 (en) 2010-10-25 2016-01-05 The Research Foundation Of State University Of New York Fabrication of surface textures by ion implantation for antireflection of silicon crystals
US8242005B1 (en) 2011-01-24 2012-08-14 Varian Semiconductor Equipment Associates, Inc. Using multiple masks to form independent features on a workpiece
US8153496B1 (en) 2011-03-07 2012-04-10 Varian Semiconductor Equipment Associates, Inc. Self-aligned process and method for fabrication of high efficiency solar cells
US8716682B2 (en) * 2011-04-04 2014-05-06 Varian Semiconductor Equipment Associates, Inc. Apparatus and method for multiple slot ion implantation
KR101724005B1 (ko) * 2011-04-29 2017-04-07 삼성에스디아이 주식회사 태양전지와 그 제조 방법
US8697559B2 (en) 2011-07-07 2014-04-15 Varian Semiconductor Equipment Associates, Inc. Use of ion beam tails to manufacture a workpiece
US9190548B2 (en) 2011-10-11 2015-11-17 Varian Semiconductor Equipment Associates, Inc. Method of creating two dimensional doping patterns in solar cells
US9437392B2 (en) 2011-11-02 2016-09-06 Varian Semiconductor Equipment Associates, Inc. High-throughput ion implanter
SG10201508582WA (en) 2011-11-08 2015-11-27 Intevac Inc Substrate processing system and method
US8507298B2 (en) 2011-12-02 2013-08-13 Varian Semiconductor Equipment Associates, Inc. Patterned implant of a dielectric layer
JP5892802B2 (ja) * 2012-02-09 2016-03-23 住友重機械工業株式会社 イオン注入方法、搬送容器及びイオン注入装置
US9412895B2 (en) 2012-04-04 2016-08-09 Samsung Sdi Co., Ltd. Method of manufacturing photoelectric device
US9082799B2 (en) 2012-09-20 2015-07-14 Varian Semiconductor Equipment Associates, Inc. System and method for 2D workpiece alignment
MY178951A (en) 2012-12-19 2020-10-23 Intevac Inc Grid for plasma ion implant
US9577134B2 (en) 2013-12-09 2017-02-21 Sunpower Corporation Solar cell emitter region fabrication using self-aligned implant and cap
US9401450B2 (en) 2013-12-09 2016-07-26 Sunpower Corporation Solar cell emitter region fabrication using ion implantation
US9722129B2 (en) 2014-02-12 2017-08-01 Varian Semiconductor Equipment Associates, Inc. Complementary traveling masks
JP6338416B2 (ja) * 2014-03-27 2018-06-06 住重アテックス株式会社 イオン照射方法およびイオン照射に用いる固定装置
US9263625B2 (en) 2014-06-30 2016-02-16 Sunpower Corporation Solar cell emitter region fabrication using ion implantation
US20160284913A1 (en) 2015-03-27 2016-09-29 Staffan WESTERBERG Solar cell emitter region fabrication using substrate-level ion implantation
ES2773989T3 (es) * 2017-05-19 2020-07-16 Total Sa Aparato y método para el procesamiento de texturizado
US11615939B2 (en) 2021-03-24 2023-03-28 Kla Corporation Shaped aperture set for multi-beam array configurations

Family Cites Families (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4968660A (ja) * 1972-11-04 1974-07-03
JPS531483A (en) 1976-06-28 1978-01-09 Futaba Denshi Kogyo Kk Pn junction solar battery and method of producing same
JPS5360561A (en) * 1976-11-12 1978-05-31 Hitachi Ltd Injection method of ion to treated substance surface
US4086102A (en) 1976-12-13 1978-04-25 King William J Inexpensive solar cell and method therefor
FR2383702A1 (fr) * 1977-03-18 1978-10-13 Anvar Perfectionnements aux procedes et dispositifs de dopage de materiaux semi-conducteurs
JPS61500757A (ja) * 1983-12-19 1986-04-17 モ−ビル・ソラ−・エナ−ジ−・コ−ポレ−ション 太陽電池の製造方法
US4608112A (en) * 1984-05-16 1986-08-26 The United States Of America As Represented By The Secretary Of The Air Force Mask aligner for solar cell fabrication
US4667060A (en) 1985-05-28 1987-05-19 Spire Corporation Back junction photovoltaic solar cell
JPH06124673A (ja) 1992-10-08 1994-05-06 Nissin Electric Co Ltd イオン注入装置におけるプラズマ発生方法
JPH08213339A (ja) * 1995-02-02 1996-08-20 Hitachi Ltd イオン注入方法およびその装置
JPH09259779A (ja) 1996-03-15 1997-10-03 Nissin Electric Co Ltd イオン源およびそれを用いたイオン注入装置
US6335534B1 (en) * 1998-04-17 2002-01-01 Kabushiki Kaisha Toshiba Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes
US6291326B1 (en) 1998-06-23 2001-09-18 Silicon Genesis Corporation Pre-semiconductor process implant and post-process film separation
JP2000340810A (ja) * 1999-05-27 2000-12-08 Hitachi Ltd 太陽電池セル及びその製造方法
JP2001189483A (ja) * 1999-10-18 2001-07-10 Sharp Corp バイパス機能付太陽電池セルおよびバイパス機能付き多接合積層型太陽電池セルおよびそれらの製造方法
JP2002110637A (ja) * 2000-09-26 2002-04-12 Applied Materials Inc マスク部材、マスク部材セット、基体処理方法、半導体装置の製造方法、及び、半導体装置の製造条件決定方法
JP2002203806A (ja) * 2000-10-31 2002-07-19 Toshiba Corp 半導体装置の製造方法、ステンシルマスク及びその製造方法
JP5142114B2 (ja) * 2000-12-05 2013-02-13 株式会社アルバック イオン注入方法およびイオン注入装置
JP4252237B2 (ja) * 2000-12-06 2009-04-08 株式会社アルバック イオン注入装置およびイオン注入方法
JP3898599B2 (ja) * 2002-08-27 2007-03-28 京セラ株式会社 太陽電池の製造方法
JP4124437B2 (ja) * 2002-11-20 2008-07-23 株式会社アルバック イオン注入装置およびイオン注入方法
JP2004193350A (ja) * 2002-12-11 2004-07-08 Sharp Corp 太陽電池セルおよびその製造方法
JP2004207385A (ja) 2002-12-24 2004-07-22 Rohm Co Ltd マスク、その製造方法およびこれを用いた半導体装置の製造方法
JP2004207571A (ja) 2002-12-26 2004-07-22 Toshiba Corp 半導体装置の製造方法、半導体製造装置及びステンシルマスク
JP2004349508A (ja) * 2003-05-22 2004-12-09 Applied Materials Inc 基体処理方法、マスク部材セット、基体処理装置、素子又は半導体装置の製造方法、及び、素子又は半導体装置の製造条件決定方法
US7087913B2 (en) * 2003-10-17 2006-08-08 Applied Materials, Inc. Ion implanter electrodes
JP2005340362A (ja) * 2004-05-25 2005-12-08 Sharp Corp 太陽電池セルおよび太陽電池モジュール
US20060011582A1 (en) 2004-07-14 2006-01-19 Savas Stephen E Fast isotropic etching system and process for large, non-circular substrates
JP4540447B2 (ja) * 2004-10-27 2010-09-08 シャープ株式会社 太陽電池および太陽電池の製造方法
WO2006075426A1 (ja) * 2004-12-27 2006-07-20 Naoetsu Electronics Co., Ltd. 裏面接合型太陽電池及びその製造方法
JP4969781B2 (ja) * 2005-01-14 2012-07-04 株式会社アルバック プラズマドーピング装置
US20060258128A1 (en) 2005-03-09 2006-11-16 Peter Nunan Methods and apparatus for enabling multiple process steps on a single substrate
JP4656996B2 (ja) * 2005-04-21 2011-03-23 シャープ株式会社 太陽電池
KR100684655B1 (ko) * 2005-05-04 2007-02-22 (주)울텍 태양전지 디바이스 제조용 인라인 장치
JP4843252B2 (ja) * 2005-05-18 2011-12-21 株式会社アルバック 表面処理装置及び表面処理方法
JP2007019259A (ja) * 2005-07-07 2007-01-25 Sharp Corp 太陽電池およびその製造方法
US7846823B2 (en) * 2005-08-12 2010-12-07 Sharp Kabushiki Kaisha Masking paste, method of manufacturing same, and method of manufacturing solar cell using masking paste
CN100401533C (zh) * 2005-12-06 2008-07-09 淮阴师范学院 光伏型红外探测器碲镉汞材料离子注入剂量优化方法
JP4827550B2 (ja) 2006-02-14 2011-11-30 シャープ株式会社 太陽電池の製造方法
US8008575B2 (en) 2006-07-24 2011-08-30 Sunpower Corporation Solar cell with reduced base diffusion area
US20080073569A1 (en) 2006-09-23 2008-03-27 Varian Semiconductor Equipment Associates, Inc. Mask position detection
US20080072953A1 (en) * 2006-09-27 2008-03-27 Thinsilicon Corp. Back contact device for photovoltaic cells and method of manufacturing a back contact device
JP2008098530A (ja) * 2006-10-13 2008-04-24 Toshiba Corp 半導体装置の製造方法
WO2009029900A1 (en) 2007-08-31 2009-03-05 Applied Materials, Inc. Improved methods of emitter formation in solar cells
US7820460B2 (en) * 2007-09-07 2010-10-26 Varian Semiconductor Equipment Associates, Inc. Patterned assembly for manufacturing a solar cell and a method thereof

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