JP2010536066A5 - - Google Patents

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Publication number
JP2010536066A5
JP2010536066A5 JP2010520148A JP2010520148A JP2010536066A5 JP 2010536066 A5 JP2010536066 A5 JP 2010536066A5 JP 2010520148 A JP2010520148 A JP 2010520148A JP 2010520148 A JP2010520148 A JP 2010520148A JP 2010536066 A5 JP2010536066 A5 JP 2010536066A5
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Japan
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substrate
temperature
laser
energy source
thin film
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JP2010520148A
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Japanese (ja)
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JP5174910B2 (ja
JP2010536066A (ja
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Priority claimed from US12/055,178 external-priority patent/US7993464B2/en
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JP2010520148A 2007-08-09 2008-07-30 間接表面清浄化のための方法 Active JP5174910B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US95498907P 2007-08-09 2007-08-09
US60/954,989 2007-08-09
US12/055,178 2008-03-25
US12/055,178 US7993464B2 (en) 2007-08-09 2008-03-25 Apparatus and method for indirect surface cleaning
PCT/US2008/071546 WO2009020808A1 (en) 2007-08-09 2008-07-30 Apparatus and method for indirect surface cleaning

Publications (3)

Publication Number Publication Date
JP2010536066A JP2010536066A (ja) 2010-11-25
JP2010536066A5 true JP2010536066A5 (enExample) 2011-09-15
JP5174910B2 JP5174910B2 (ja) 2013-04-03

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JP2010520148A Active JP5174910B2 (ja) 2007-08-09 2008-07-30 間接表面清浄化のための方法

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US (5) US7993464B2 (enExample)
EP (1) EP2178655B1 (enExample)
JP (1) JP5174910B2 (enExample)
KR (1) KR20100083125A (enExample)
WO (1) WO2009020808A1 (enExample)

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