JP2010527514A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2010527514A5 JP2010527514A5 JP2010508414A JP2010508414A JP2010527514A5 JP 2010527514 A5 JP2010527514 A5 JP 2010527514A5 JP 2010508414 A JP2010508414 A JP 2010508414A JP 2010508414 A JP2010508414 A JP 2010508414A JP 2010527514 A5 JP2010527514 A5 JP 2010527514A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- protective layer
- processing chamber
- layer
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000000034 method Methods 0.000 claims 17
- 239000011241 protective layer Substances 0.000 claims 11
- 239000000758 substrate Substances 0.000 claims 10
- 239000010410 layer Substances 0.000 claims 9
- 239000011247 coating layer Substances 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims 2
- 229910021417 amorphous silicon Inorganic materials 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910021529 ammonia Inorganic materials 0.000 claims 1
- 229910003481 amorphous carbon Inorganic materials 0.000 claims 1
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000005240 physical vapour deposition Methods 0.000 claims 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims 1
- 229910000077 silane Inorganic materials 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US93080007P | 2007-05-17 | 2007-05-17 | |
| US12/106,561 US7670638B2 (en) | 2007-05-17 | 2008-04-21 | Protection layer for fabricating a solar cell |
| PCT/US2008/006165 WO2008143885A2 (en) | 2007-05-17 | 2008-05-13 | Protection layer for fabricating a solar cell |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010527514A JP2010527514A (ja) | 2010-08-12 |
| JP2010527514A5 true JP2010527514A5 (enExample) | 2011-06-30 |
Family
ID=40026447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010508414A Abandoned JP2010527514A (ja) | 2007-05-17 | 2008-05-13 | 太陽電池を製造するための保護層 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US7670638B2 (enExample) |
| EP (1) | EP2158613A4 (enExample) |
| JP (1) | JP2010527514A (enExample) |
| KR (1) | KR20100019522A (enExample) |
| CN (1) | CN101681944A (enExample) |
| AU (1) | AU2008254968A1 (enExample) |
| WO (1) | WO2008143885A2 (enExample) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2293351B1 (en) * | 2009-09-07 | 2017-04-12 | Lg Electronics Inc. | Solar cell |
| US9064999B2 (en) | 2009-09-07 | 2015-06-23 | Lg Electronics Inc. | Solar cell and method for manufacturing the same |
| US20110174362A1 (en) * | 2010-01-18 | 2011-07-21 | Applied Materials, Inc. | Manufacture of thin film solar cells with high conversion efficiency |
| JP2011253987A (ja) | 2010-06-03 | 2011-12-15 | Mitsubishi Electric Corp | 半導体受光素子及び光モジュール |
| CN103311320B (zh) * | 2012-03-14 | 2016-12-14 | 江苏新源动力有限公司 | 太阳能电池用透明导电薄膜及其制备方法 |
| CN102800716B (zh) | 2012-07-09 | 2015-06-17 | 友达光电股份有限公司 | 太阳能电池及其制作方法 |
| CN102779866B (zh) * | 2012-08-17 | 2014-12-24 | 天津中环半导体股份有限公司 | 一种深孔交错背接触太阳能电池结构及其制造方法 |
| US9018516B2 (en) | 2012-12-19 | 2015-04-28 | Sunpower Corporation | Solar cell with silicon oxynitride dielectric layer |
| TWI484647B (zh) * | 2013-02-08 | 2015-05-11 | Motech Ind Inc | 太陽能電池及其模組 |
| TWI612682B (zh) * | 2013-12-10 | 2018-01-21 | 太陽電子公司 | 具氮氧化矽介電層之太陽能電池 |
| CN105226110B (zh) * | 2014-06-26 | 2017-02-15 | 英稳达科技股份有限公司 | 一种太阳能电池元件 |
| CN105489667B (zh) * | 2016-02-23 | 2018-01-02 | 深圳市创益科技发展有限公司 | 一种用背接触式太阳能电池加工制成小芯片的电极引出方法 |
| FR3050870B1 (fr) * | 2016-04-28 | 2018-05-25 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede de realisation d’un dispositif de detection de rayonnement electromagnetique comportant une couche en un materiau getter |
| USD822890S1 (en) | 2016-09-07 | 2018-07-10 | Felxtronics Ap, Llc | Lighting apparatus |
| US10775030B2 (en) | 2017-05-05 | 2020-09-15 | Flex Ltd. | Light fixture device including rotatable light modules |
| USD846793S1 (en) | 2017-08-09 | 2019-04-23 | Flex Ltd. | Lighting module locking mechanism |
| USD833061S1 (en) | 2017-08-09 | 2018-11-06 | Flex Ltd. | Lighting module locking endcap |
| USD872319S1 (en) | 2017-08-09 | 2020-01-07 | Flex Ltd. | Lighting module LED light board |
| USD862777S1 (en) | 2017-08-09 | 2019-10-08 | Flex Ltd. | Lighting module wide distribution lens |
| USD832494S1 (en) | 2017-08-09 | 2018-10-30 | Flex Ltd. | Lighting module heatsink |
| USD877964S1 (en) | 2017-08-09 | 2020-03-10 | Flex Ltd. | Lighting module |
| USD832495S1 (en) | 2017-08-18 | 2018-10-30 | Flex Ltd. | Lighting module locking mechanism |
| USD862778S1 (en) | 2017-08-22 | 2019-10-08 | Flex Ltd | Lighting module lens |
| USD888323S1 (en) | 2017-09-07 | 2020-06-23 | Flex Ltd | Lighting module wire guard |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4945065A (en) * | 1988-06-02 | 1990-07-31 | Mobil Solar Energy Corporation | Method of passivating crystalline substrates |
| US4927770A (en) * | 1988-11-14 | 1990-05-22 | Electric Power Research Inst. Corp. Of District Of Columbia | Method of fabricating back surface point contact solar cells |
| US5053083A (en) * | 1989-05-08 | 1991-10-01 | The Board Of Trustees Of The Leland Stanford Junior University | Bilevel contact solar cells |
| US5360491A (en) * | 1993-04-07 | 1994-11-01 | The United States Of America As Represented By The United States Department Of Energy | β-silicon carbide protective coating and method for fabricating same |
| US5871591A (en) * | 1996-11-01 | 1999-02-16 | Sandia Corporation | Silicon solar cells made by a self-aligned, selective-emitter, plasma-etchback process |
| JP3796069B2 (ja) | 1999-07-15 | 2006-07-12 | 三洋電機株式会社 | 太陽電池モジュール |
| JP2004039751A (ja) | 2002-07-01 | 2004-02-05 | Toyota Motor Corp | 光起電力素子 |
| US7402448B2 (en) * | 2003-01-31 | 2008-07-22 | Bp Corporation North America Inc. | Photovoltaic cell and production thereof |
| US7388147B2 (en) * | 2003-04-10 | 2008-06-17 | Sunpower Corporation | Metal contact structure for solar cell and method of manufacture |
| US7339110B1 (en) * | 2003-04-10 | 2008-03-04 | Sunpower Corporation | Solar cell and method of manufacture |
| US7354631B2 (en) * | 2003-11-06 | 2008-04-08 | Micron Technology, Inc. | Chemical vapor deposition apparatus and methods |
| DE102005004410B4 (de) * | 2005-01-31 | 2010-09-16 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren zum Ausbilden einer Halbleiterstruktur mit Bemustern einer Schicht aus einem Material |
| US7554031B2 (en) * | 2005-03-03 | 2009-06-30 | Sunpower Corporation | Preventing harmful polarization of solar cells |
-
2008
- 2008-04-21 US US12/106,561 patent/US7670638B2/en active Active
- 2008-05-13 CN CN200880015716A patent/CN101681944A/zh active Pending
- 2008-05-13 AU AU2008254968A patent/AU2008254968A1/en not_active Abandoned
- 2008-05-13 KR KR1020097026224A patent/KR20100019522A/ko not_active Withdrawn
- 2008-05-13 JP JP2010508414A patent/JP2010527514A/ja not_active Abandoned
- 2008-05-13 EP EP08754454A patent/EP2158613A4/en not_active Withdrawn
- 2008-05-13 WO PCT/US2008/006165 patent/WO2008143885A2/en not_active Ceased
-
2010
- 2010-01-14 US US12/687,810 patent/US20100129955A1/en not_active Abandoned
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2010527514A5 (enExample) | ||
| JP2013546169A5 (enExample) | ||
| KR101381305B1 (ko) | 고효율 태양 전지 극 저 표면 재결합 속도를 달성하기 위한 패시베이션 방법 및 장치 | |
| JP2016197719A5 (enExample) | ||
| WO2010009295A3 (en) | Hybrid heterojunction solar cell fabrication using a metal layer mask | |
| WO2011126748A3 (en) | Depositing conformal boron nitride films | |
| JP2009533844A5 (enExample) | ||
| WO2007103598A3 (en) | Silicon photovoltaic cell junction formed from thin film doping source | |
| WO2006107532A3 (en) | Single wafer thermal cvd processes for hemispherical grained silicon and nano-crystalline grain-sized polysilicon | |
| JP2010527514A (ja) | 太陽電池を製造するための保護層 | |
| JP2013538009A5 (ja) | 太陽電池のエミッタ領域を製造する方法及び太陽電池基板 | |
| WO2012044622A3 (en) | Low-temperature dielectric film formation by chemical vapor deposition | |
| JP2007311584A5 (enExample) | ||
| JP2012089854A5 (enExample) | ||
| JP2009111382A5 (enExample) | ||
| WO2012014653A1 (ja) | ガスバリア性フィルム、ガスバリア性フィルムの製造方法及び電子デバイス | |
| CN110121786B (zh) | 半导体材料的表面钝化方法以及半导体基板 | |
| JP2017504186A5 (enExample) | ||
| CN101652865A (zh) | 太阳能电池的氮氧化物钝化 | |
| WO2010080358A3 (en) | Edge film removal process for thin film solar cell applications | |
| JP2011511476A5 (enExample) | ||
| US10151030B2 (en) | Protective layer for PECVD graphite boats | |
| WO2011084292A3 (en) | Silicon thin film solar cell having improved haze and methods of making the same | |
| JP2007531304A5 (enExample) | ||
| CN104851923A (zh) | 一种提升晶体硅太阳能电池效率减反射膜制备方法 |