JP2010522991A5 - - Google Patents
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- Publication number
- JP2010522991A5 JP2010522991A5 JP2010500999A JP2010500999A JP2010522991A5 JP 2010522991 A5 JP2010522991 A5 JP 2010522991A5 JP 2010500999 A JP2010500999 A JP 2010500999A JP 2010500999 A JP2010500999 A JP 2010500999A JP 2010522991 A5 JP2010522991 A5 JP 2010522991A5
- Authority
- JP
- Japan
- Prior art keywords
- memory cell
- level
- conductor
- carbon nanotube
- memory
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims 27
- OKTJSMMVPCPJKN-UHFFFAOYSA-N carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 17
- 239000002041 carbon nanotube Substances 0.000 claims 4
- 229910021393 carbon nanotube Inorganic materials 0.000 claims 4
- 229910052751 metal Inorganic materials 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 3
- 239000002184 metal Substances 0.000 claims 2
- 229910021332 silicide Inorganic materials 0.000 claims 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N Tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 239000002071 nanotube Substances 0.000 claims 1
- -1 silicon-germanium Chemical compound 0.000 claims 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/692,148 US7982209B2 (en) | 2007-03-27 | 2007-03-27 | Memory cell comprising a carbon nanotube fabric element and a steering element |
US11/692,144 US7667999B2 (en) | 2007-03-27 | 2007-03-27 | Method to program a memory cell comprising a carbon nanotube fabric and a steering element |
PCT/US2008/004018 WO2008118486A1 (en) | 2007-03-27 | 2008-03-26 | Memory cell comprising a carbon nanotube fabric element and a steering element and methods of forming the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010522991A JP2010522991A (ja) | 2010-07-08 |
JP2010522991A5 true JP2010522991A5 (zh) | 2011-04-21 |
Family
ID=39590778
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010500999A Pending JP2010522991A (ja) | 2007-03-27 | 2008-03-26 | カーボンナノチューブ構造素子およびステアリング素子を含むメモリセルおよびそれを形成する方法 |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP2140492A1 (zh) |
JP (1) | JP2010522991A (zh) |
KR (1) | KR20100014547A (zh) |
CN (1) | CN101681921B (zh) |
TW (1) | TW200903782A (zh) |
WO (1) | WO2008118486A1 (zh) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100655078B1 (ko) * | 2005-09-16 | 2006-12-08 | 삼성전자주식회사 | 비트 레지스터링 레이어를 갖는 반도체 메모리 장치 및그의 구동 방법 |
US8294098B2 (en) | 2007-03-30 | 2012-10-23 | Tsinghua University | Transmission electron microscope micro-grid |
US8878235B2 (en) | 2007-12-31 | 2014-11-04 | Sandisk 3D Llc | Memory cell that employs a selectively fabricated carbon nano-tube reversible resistance-switching element and methods of forming the same |
US8558220B2 (en) * | 2007-12-31 | 2013-10-15 | Sandisk 3D Llc | Memory cell that employs a selectively fabricated carbon nano-tube reversible resistance-switching element formed over a bottom conductor and methods of forming the same |
US8110476B2 (en) | 2008-04-11 | 2012-02-07 | Sandisk 3D Llc | Memory cell that includes a carbon-based memory element and methods of forming the same |
US8530318B2 (en) | 2008-04-11 | 2013-09-10 | Sandisk 3D Llc | Memory cell that employs a selectively fabricated carbon nano-tube reversible resistance-switching element formed over a bottom conductor and methods of forming the same |
US20100032639A1 (en) | 2008-08-07 | 2010-02-11 | Sandisk 3D Llc | Memory cell that includes a carbon-based memory element and methods of forming the same |
CN102265400A (zh) * | 2008-10-23 | 2011-11-30 | 桑迪士克3D有限责任公司 | 展示减少的分层的基于碳的存储器元件和形成其的方法 |
KR20100052080A (ko) * | 2008-11-10 | 2010-05-19 | 주식회사 하이닉스반도체 | 저항성 메모리 소자 및 그 제조 방법 |
JP2010123646A (ja) * | 2008-11-18 | 2010-06-03 | Toshiba Corp | 電気素子、スイッチング素子、メモリ素子、スイッチング方法及びメモリ方法 |
US8114765B2 (en) | 2008-12-31 | 2012-02-14 | Sandisk 3D Llc | Methods for increased array feature density |
US8084347B2 (en) * | 2008-12-31 | 2011-12-27 | Sandisk 3D Llc | Resist feature and removable spacer pitch doubling patterning method for pillar structures |
US8023310B2 (en) * | 2009-01-14 | 2011-09-20 | Sandisk 3D Llc | Nonvolatile memory cell including carbon storage element formed on a silicide layer |
JP4829320B2 (ja) * | 2009-03-17 | 2011-12-07 | 株式会社東芝 | 不揮発性半導体記憶装置の製造方法 |
CN101848564B (zh) | 2009-03-27 | 2012-06-20 | 清华大学 | 加热器件 |
US7955981B2 (en) * | 2009-06-30 | 2011-06-07 | Sandisk 3D Llc | Method of making a two-terminal non-volatile memory pillar device with rounded corner |
CN101991364B (zh) | 2009-08-14 | 2013-08-28 | 清华大学 | 电烤箱 |
CN101998706B (zh) | 2009-08-14 | 2015-07-01 | 清华大学 | 碳纳米管织物及应用该碳纳米管织物的发热体 |
IN2012DN01961A (zh) | 2009-08-17 | 2015-08-21 | Intellikine Llc | |
CN102019039B (zh) | 2009-09-11 | 2013-08-21 | 清华大学 | 红外理疗设备 |
JP5611574B2 (ja) | 2009-11-30 | 2014-10-22 | 株式会社東芝 | 抵抗変化メモリ及びその製造方法 |
WO2011149937A1 (en) | 2010-05-24 | 2011-12-01 | Intellikine, Inc. | Heterocyclic compounds and uses thereof |
JP5808826B2 (ja) | 2011-02-23 | 2015-11-10 | インテリカイン, エルエルシー | 複素環化合物およびその使用 |
CN104613620B (zh) * | 2015-02-02 | 2017-05-10 | 广东美的制冷设备有限公司 | 空调器及其出风控制方法 |
CN104613545B (zh) * | 2015-02-02 | 2017-05-10 | 广东美的制冷设备有限公司 | 空调器室内机及空调器的出风控制方法 |
US10580778B2 (en) * | 2018-07-18 | 2020-03-03 | Nanya Technology Corporation | Dynamic random access memory structure and method for preparing the same |
US11502105B2 (en) * | 2021-04-06 | 2022-11-15 | Macronix International Co., Ltd. | Semiconductor structure and a method for manufacturing the same |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7858185B2 (en) * | 2003-09-08 | 2010-12-28 | Nantero, Inc. | High purity nanotube fabrics and films |
CN1849718A (zh) * | 2003-07-09 | 2006-10-18 | 先进微装置公司 | 存储器件和使用及制造该器件的方法 |
JP4448356B2 (ja) * | 2004-03-26 | 2010-04-07 | 富士通株式会社 | 半導体装置およびその製造方法 |
JP2005343744A (ja) * | 2004-06-03 | 2005-12-15 | Matsushita Electric Ind Co Ltd | カーボンナノチューブ半導体の製造方法およびカーボンナノチューブ構造体 |
US7812404B2 (en) * | 2005-05-09 | 2010-10-12 | Sandisk 3D Llc | Nonvolatile memory cell comprising a diode and a resistance-switching material |
US7479654B2 (en) * | 2005-05-09 | 2009-01-20 | Nantero, Inc. | Memory arrays using nanotube articles with reprogrammable resistance |
US20060273298A1 (en) * | 2005-06-02 | 2006-12-07 | Matrix Semiconductor, Inc. | Rewriteable memory cell comprising a transistor and resistance-switching material in series |
JP4975289B2 (ja) * | 2005-09-06 | 2012-07-11 | 国立大学法人名古屋大学 | カーボンナノウォールを用いた電子素子 |
JP5410974B2 (ja) * | 2006-08-08 | 2014-02-05 | ナンテロ,インク. | 不揮発性ナノチューブダイオード及び不揮発性ナノチューブブロック、並びにそれらを用いるシステム及びその製造方法 |
-
2008
- 2008-03-26 EP EP08742323A patent/EP2140492A1/en not_active Withdrawn
- 2008-03-26 WO PCT/US2008/004018 patent/WO2008118486A1/en active Application Filing
- 2008-03-26 JP JP2010500999A patent/JP2010522991A/ja active Pending
- 2008-03-26 KR KR1020097019877A patent/KR20100014547A/ko not_active Application Discontinuation
- 2008-03-26 CN CN2008800165825A patent/CN101681921B/zh not_active Expired - Fee Related
- 2008-03-27 TW TW097111114A patent/TW200903782A/zh unknown
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