JP2010517769A5 - - Google Patents
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- Publication number
- JP2010517769A5 JP2010517769A5 JP2009549479A JP2009549479A JP2010517769A5 JP 2010517769 A5 JP2010517769 A5 JP 2010517769A5 JP 2009549479 A JP2009549479 A JP 2009549479A JP 2009549479 A JP2009549479 A JP 2009549479A JP 2010517769 A5 JP2010517769 A5 JP 2010517769A5
- Authority
- JP
- Japan
- Prior art keywords
- gas stream
- liquid
- pump
- gas
- gaseous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims 48
- 239000007788 liquid Substances 0.000 claims 27
- 238000000034 method Methods 0.000 claims 21
- 239000007800 oxidant agent Substances 0.000 claims 8
- 230000001590 oxidative effect Effects 0.000 claims 8
- 238000000197 pyrolysis Methods 0.000 claims 5
- 238000000926 separation method Methods 0.000 claims 4
- 239000004215 Carbon black (E152) Substances 0.000 claims 2
- 230000002378 acidificating effect Effects 0.000 claims 2
- 239000003054 catalyst Substances 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 2
- 229910052736 halogen Inorganic materials 0.000 claims 2
- 150000002367 halogens Chemical class 0.000 claims 2
- 229930195733 hydrocarbon Natural products 0.000 claims 2
- 150000002430 hydrocarbons Chemical class 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims 1
- 239000007864 aqueous solution Substances 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 claims 1
- 239000000567 combustion gas Substances 0.000 claims 1
- 238000009833 condensation Methods 0.000 claims 1
- 230000005494 condensation Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 229910052717 sulfur Inorganic materials 0.000 claims 1
- 239000011593 sulfur Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB0702837.6 | 2007-02-14 | ||
| GBGB0702837.6A GB0702837D0 (en) | 2007-02-14 | 2007-02-14 | Method of treating a gas stream |
| PCT/GB2008/050045 WO2008099206A1 (en) | 2007-02-14 | 2008-01-23 | Method of treating a gas stream |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010517769A JP2010517769A (ja) | 2010-05-27 |
| JP2010517769A5 true JP2010517769A5 (https=) | 2011-03-10 |
| JP5264784B2 JP5264784B2 (ja) | 2013-08-14 |
Family
ID=37908602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009549479A Expired - Fee Related JP5264784B2 (ja) | 2007-02-14 | 2008-01-23 | ガス流を処理する方法 |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US8394179B2 (https=) |
| EP (1) | EP2111283A1 (https=) |
| JP (1) | JP5264784B2 (https=) |
| KR (1) | KR20090110343A (https=) |
| CN (1) | CN101610829A (https=) |
| AU (1) | AU2008215944B2 (https=) |
| BR (1) | BRPI0807585A2 (https=) |
| EA (1) | EA200970762A1 (https=) |
| GB (1) | GB0702837D0 (https=) |
| TW (1) | TW200841925A (https=) |
| WO (1) | WO2008099206A1 (https=) |
| ZA (1) | ZA200904863B (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FI123904B (fi) * | 2012-02-24 | 2013-12-13 | Teknologian Tutkimuskeskus Vtt | Menetelmä ja laitteisto pyrolyysinesteen valmistamiseksi |
| GB2513300B (en) * | 2013-04-04 | 2017-10-11 | Edwards Ltd | Vacuum pumping and abatement system |
| GB2540582A (en) * | 2015-07-22 | 2017-01-25 | Edwards Ltd | Apparatus for evacuating a corrosive effluent gas stream from a processing chamber |
| GB2540580A (en) | 2015-07-22 | 2017-01-25 | Edwards Ltd | Liquid ring pump |
| GB2540581A (en) * | 2015-07-22 | 2017-01-25 | Edwards Ltd | Abatement system |
| GB2561899B (en) | 2017-04-28 | 2020-11-04 | Edwards Ltd | Vacuum pumping system |
| US11905955B1 (en) * | 2019-05-01 | 2024-02-20 | Kashiyama Industries, Ltd. | Extending life cycles of vacuum pumps used in manufacturing processes |
| TWI699234B (zh) | 2019-11-21 | 2020-07-21 | 財團法人工業技術研究院 | 微粒捕集裝置 |
| US12515169B2 (en) * | 2020-06-26 | 2026-01-06 | Zimmer, Inc. | Vacuum generation process for deposition of biomedical implant materials |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BR6803024D0 (pt) * | 1967-12-15 | 1973-01-04 | Siemens Ag | Processo para a producao de hidrogenio |
| US4001332A (en) * | 1973-01-13 | 1977-01-04 | Hoechst Aktiengesellschaft | Process for compressing ketene |
| DE2832401C3 (de) * | 1978-07-24 | 1981-04-02 | Siemens AG, 1000 Berlin und 8000 München | Flüssigkeitsringpumpenanordnung |
| DE3024352A1 (de) * | 1980-06-27 | 1982-01-21 | Karlheinz 8000 München Geiger | Verfahren und anlage zur gewinnung von brenngas durch ausfaulen organischer stoffe |
| JPH0714451B2 (ja) * | 1988-05-23 | 1995-02-22 | 日本電気株式会社 | 廃ガス処理方法 |
| JPH05154334A (ja) * | 1991-12-11 | 1993-06-22 | Fujitsu Ltd | 半導体製造装置の排気ポンプシステム |
| US5178823A (en) * | 1992-03-12 | 1993-01-12 | Container Products Corp. | Decontamination apparatus |
| US5287589A (en) * | 1992-08-31 | 1994-02-22 | Container Products Corp. | Self-contained cleaning and retrieval apparatus |
| US5817284A (en) * | 1995-10-30 | 1998-10-06 | Central Glass Company, Limited | Method for decomposing halide-containing gas |
| US6083572A (en) * | 1998-02-27 | 2000-07-04 | Hewlett-Packard Company | Organic low-dielectric constant films deposited by plasma enhanced chemical vapor deposition |
| JP3866412B2 (ja) * | 1998-05-28 | 2007-01-10 | カンケンテクノ株式会社 | 半導体製造排ガスの除害方法及び除害装置 |
| US6368567B2 (en) * | 1998-10-07 | 2002-04-09 | Applied Materials, Inc. | Point-of-use exhaust by-product reactor |
| GB9902099D0 (en) * | 1999-01-29 | 1999-03-24 | Boc Group Plc | Vacuum pump systems |
| JP3976459B2 (ja) * | 1999-11-18 | 2007-09-19 | 株式会社荏原製作所 | フッ素含有化合物を含む排ガスの処理方法及び装置 |
| JP2001293335A (ja) * | 2000-04-12 | 2001-10-23 | Ebara Corp | フッ素含有化合物を含む排ガスの処理方法 |
| AU2001284325A1 (en) | 2000-08-31 | 2002-03-13 | Barthlo Von_Moltitz Harmse | A method of treating an effluent gas stream, and apparatus for use in such method |
| NO20010345L (no) * | 2001-01-19 | 2002-07-22 | Abb Gas Technology As | Fremgangsmåte og anordning til behandling av gasser, samt anvendelse derav |
| WO2002095800A2 (en) * | 2001-05-22 | 2002-11-28 | Reflectivity, Inc. | A method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants |
| WO2003047729A1 (en) | 2001-12-04 | 2003-06-12 | Ebara Corporation | Method and apparatus for treating exhaust gas |
| JP2005131509A (ja) * | 2003-10-29 | 2005-05-26 | Unisem Co Ltd | 廃ガス処理処置及び廃ガス処理方法 |
| ZA200701036B (en) * | 2004-07-16 | 2008-05-28 | Cipla Ltd | Anti-histaminic composition |
| GB0416385D0 (en) * | 2004-07-22 | 2004-08-25 | Boc Group Plc | Gas abatement |
| JP4218618B2 (ja) * | 2004-09-10 | 2009-02-04 | 株式会社日立製作所 | 排ガス分解処理装置 |
| GB0505852D0 (en) | 2005-03-22 | 2005-04-27 | Boc Group Plc | Method of treating a gas stream |
-
2007
- 2007-02-14 GB GBGB0702837.6A patent/GB0702837D0/en not_active Ceased
-
2008
- 2008-01-23 EA EA200970762A patent/EA200970762A1/ru unknown
- 2008-01-23 CN CNA2008800051909A patent/CN101610829A/zh active Pending
- 2008-01-23 US US12/526,485 patent/US8394179B2/en not_active Expired - Fee Related
- 2008-01-23 JP JP2009549479A patent/JP5264784B2/ja not_active Expired - Fee Related
- 2008-01-23 KR KR1020097016882A patent/KR20090110343A/ko not_active Ceased
- 2008-01-23 WO PCT/GB2008/050045 patent/WO2008099206A1/en not_active Ceased
- 2008-01-23 EP EP08702128A patent/EP2111283A1/en not_active Withdrawn
- 2008-01-23 BR BRPI0807585-9A patent/BRPI0807585A2/pt not_active IP Right Cessation
- 2008-01-23 AU AU2008215944A patent/AU2008215944B2/en not_active Ceased
- 2008-02-12 TW TW097104859A patent/TW200841925A/zh unknown
-
2009
- 2009-07-10 ZA ZA200904863A patent/ZA200904863B/xx unknown
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