EA200970762A1 - Способ очистки газового потока - Google Patents

Способ очистки газового потока

Info

Publication number
EA200970762A1
EA200970762A1 EA200970762A EA200970762A EA200970762A1 EA 200970762 A1 EA200970762 A1 EA 200970762A1 EA 200970762 A EA200970762 A EA 200970762A EA 200970762 A EA200970762 A EA 200970762A EA 200970762 A1 EA200970762 A1 EA 200970762A1
Authority
EA
Eurasian Patent Office
Prior art keywords
gas stream
water
pyrolysis
gas flow
cleaning gas
Prior art date
Application number
EA200970762A
Other languages
English (en)
Russian (ru)
Inventor
Джеймс Роберт Смит
Гэри Питер Найт
Original Assignee
Эдвардс Лимитед
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Эдвардс Лимитед filed Critical Эдвардс Лимитед
Publication of EA200970762A1 publication Critical patent/EA200970762A1/ru

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B01D53/18—Absorbing units; Liquid distributors therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/10—Oxidants
    • B01D2251/11—Air
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
EA200970762A 2007-02-14 2008-01-23 Способ очистки газового потока EA200970762A1 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0702837.6A GB0702837D0 (en) 2007-02-14 2007-02-14 Method of treating a gas stream
PCT/GB2008/050045 WO2008099206A1 (en) 2007-02-14 2008-01-23 Method of treating a gas stream

Publications (1)

Publication Number Publication Date
EA200970762A1 true EA200970762A1 (ru) 2009-12-30

Family

ID=37908602

Family Applications (1)

Application Number Title Priority Date Filing Date
EA200970762A EA200970762A1 (ru) 2007-02-14 2008-01-23 Способ очистки газового потока

Country Status (12)

Country Link
US (1) US8394179B2 (https=)
EP (1) EP2111283A1 (https=)
JP (1) JP5264784B2 (https=)
KR (1) KR20090110343A (https=)
CN (1) CN101610829A (https=)
AU (1) AU2008215944B2 (https=)
BR (1) BRPI0807585A2 (https=)
EA (1) EA200970762A1 (https=)
GB (1) GB0702837D0 (https=)
TW (1) TW200841925A (https=)
WO (1) WO2008099206A1 (https=)
ZA (1) ZA200904863B (https=)

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* Cited by examiner, † Cited by third party
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FI123904B (fi) * 2012-02-24 2013-12-13 Teknologian Tutkimuskeskus Vtt Menetelmä ja laitteisto pyrolyysinesteen valmistamiseksi
GB2513300B (en) * 2013-04-04 2017-10-11 Edwards Ltd Vacuum pumping and abatement system
GB2540582A (en) * 2015-07-22 2017-01-25 Edwards Ltd Apparatus for evacuating a corrosive effluent gas stream from a processing chamber
GB2540580A (en) 2015-07-22 2017-01-25 Edwards Ltd Liquid ring pump
GB2540581A (en) * 2015-07-22 2017-01-25 Edwards Ltd Abatement system
GB2561899B (en) 2017-04-28 2020-11-04 Edwards Ltd Vacuum pumping system
US11905955B1 (en) * 2019-05-01 2024-02-20 Kashiyama Industries, Ltd. Extending life cycles of vacuum pumps used in manufacturing processes
TWI699234B (zh) 2019-11-21 2020-07-21 財團法人工業技術研究院 微粒捕集裝置
US12515169B2 (en) * 2020-06-26 2026-01-06 Zimmer, Inc. Vacuum generation process for deposition of biomedical implant materials

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US4001332A (en) * 1973-01-13 1977-01-04 Hoechst Aktiengesellschaft Process for compressing ketene
DE2832401C3 (de) * 1978-07-24 1981-04-02 Siemens AG, 1000 Berlin und 8000 München Flüssigkeitsringpumpenanordnung
DE3024352A1 (de) * 1980-06-27 1982-01-21 Karlheinz 8000 München Geiger Verfahren und anlage zur gewinnung von brenngas durch ausfaulen organischer stoffe
JPH0714451B2 (ja) * 1988-05-23 1995-02-22 日本電気株式会社 廃ガス処理方法
JPH05154334A (ja) * 1991-12-11 1993-06-22 Fujitsu Ltd 半導体製造装置の排気ポンプシステム
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US5817284A (en) * 1995-10-30 1998-10-06 Central Glass Company, Limited Method for decomposing halide-containing gas
US6083572A (en) * 1998-02-27 2000-07-04 Hewlett-Packard Company Organic low-dielectric constant films deposited by plasma enhanced chemical vapor deposition
JP3866412B2 (ja) * 1998-05-28 2007-01-10 カンケンテクノ株式会社 半導体製造排ガスの除害方法及び除害装置
US6368567B2 (en) * 1998-10-07 2002-04-09 Applied Materials, Inc. Point-of-use exhaust by-product reactor
GB9902099D0 (en) * 1999-01-29 1999-03-24 Boc Group Plc Vacuum pump systems
JP3976459B2 (ja) * 1999-11-18 2007-09-19 株式会社荏原製作所 フッ素含有化合物を含む排ガスの処理方法及び装置
JP2001293335A (ja) * 2000-04-12 2001-10-23 Ebara Corp フッ素含有化合物を含む排ガスの処理方法
AU2001284325A1 (en) 2000-08-31 2002-03-13 Barthlo Von_Moltitz Harmse A method of treating an effluent gas stream, and apparatus for use in such method
NO20010345L (no) * 2001-01-19 2002-07-22 Abb Gas Technology As Fremgangsmåte og anordning til behandling av gasser, samt anvendelse derav
AU2002303842A1 (en) * 2001-05-22 2002-12-03 Reflectivity, Inc. A method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants
CN100488598C (zh) 2001-12-04 2009-05-20 株式会社荏原制作所 处理废气的方法和装置
JP2005131509A (ja) * 2003-10-29 2005-05-26 Unisem Co Ltd 廃ガス処理処置及び廃ガス処理方法
CA2574188A1 (en) * 2004-07-16 2006-01-26 Cipla Limited Anti-histaminic composition
GB0416385D0 (en) * 2004-07-22 2004-08-25 Boc Group Plc Gas abatement
JP4218618B2 (ja) * 2004-09-10 2009-02-04 株式会社日立製作所 排ガス分解処理装置
GB0505852D0 (en) 2005-03-22 2005-04-27 Boc Group Plc Method of treating a gas stream

Also Published As

Publication number Publication date
US8394179B2 (en) 2013-03-12
ZA200904863B (en) 2010-04-28
AU2008215944A1 (en) 2008-08-21
AU2008215944B2 (en) 2012-05-10
EP2111283A1 (en) 2009-10-28
JP5264784B2 (ja) 2013-08-14
US20100101414A1 (en) 2010-04-29
BRPI0807585A2 (pt) 2014-07-01
GB0702837D0 (en) 2007-03-28
WO2008099206A1 (en) 2008-08-21
KR20090110343A (ko) 2009-10-21
TW200841925A (en) 2008-11-01
JP2010517769A (ja) 2010-05-27
CN101610829A (zh) 2009-12-23

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