KR20090110343A - 기체 스트림 처리 방법 - Google Patents

기체 스트림 처리 방법 Download PDF

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Publication number
KR20090110343A
KR20090110343A KR1020097016882A KR20097016882A KR20090110343A KR 20090110343 A KR20090110343 A KR 20090110343A KR 1020097016882 A KR1020097016882 A KR 1020097016882A KR 20097016882 A KR20097016882 A KR 20097016882A KR 20090110343 A KR20090110343 A KR 20090110343A
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KR
South Korea
Prior art keywords
gas stream
gas
pump
liquid
stream
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020097016882A
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English (en)
Korean (ko)
Inventor
제임스 로버트 스미쓰
개리 피터 나이트
Original Assignee
에드워즈 리미티드
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Filing date
Publication date
Application filed by 에드워즈 리미티드 filed Critical 에드워즈 리미티드
Publication of KR20090110343A publication Critical patent/KR20090110343A/ko
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B01D53/18—Absorbing units; Liquid distributors therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/10—Oxidants
    • B01D2251/11—Air
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
KR1020097016882A 2007-02-14 2008-01-23 기체 스트림 처리 방법 Ceased KR20090110343A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0702837.6A GB0702837D0 (en) 2007-02-14 2007-02-14 Method of treating a gas stream
GB0702837.6 2007-02-14
PCT/GB2008/050045 WO2008099206A1 (en) 2007-02-14 2008-01-23 Method of treating a gas stream

Publications (1)

Publication Number Publication Date
KR20090110343A true KR20090110343A (ko) 2009-10-21

Family

ID=37908602

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020097016882A Ceased KR20090110343A (ko) 2007-02-14 2008-01-23 기체 스트림 처리 방법

Country Status (12)

Country Link
US (1) US8394179B2 (https=)
EP (1) EP2111283A1 (https=)
JP (1) JP5264784B2 (https=)
KR (1) KR20090110343A (https=)
CN (1) CN101610829A (https=)
AU (1) AU2008215944B2 (https=)
BR (1) BRPI0807585A2 (https=)
EA (1) EA200970762A1 (https=)
GB (1) GB0702837D0 (https=)
TW (1) TW200841925A (https=)
WO (1) WO2008099206A1 (https=)
ZA (1) ZA200904863B (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180031685A (ko) * 2015-07-22 2018-03-28 에드워즈 리미티드 저감 시스템
KR20180033181A (ko) * 2015-07-22 2018-04-02 에드워즈 리미티드 처리 챔버로부터 나오는 부식성 배출 가스 스트림을 배기하기 위한 장치

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI123904B (fi) * 2012-02-24 2013-12-13 Teknologian Tutkimuskeskus Vtt Menetelmä ja laitteisto pyrolyysinesteen valmistamiseksi
GB2513300B (en) * 2013-04-04 2017-10-11 Edwards Ltd Vacuum pumping and abatement system
GB2540580A (en) 2015-07-22 2017-01-25 Edwards Ltd Liquid ring pump
GB2561899B (en) 2017-04-28 2020-11-04 Edwards Ltd Vacuum pumping system
US11905955B1 (en) * 2019-05-01 2024-02-20 Kashiyama Industries, Ltd. Extending life cycles of vacuum pumps used in manufacturing processes
TWI699234B (zh) 2019-11-21 2020-07-21 財團法人工業技術研究院 微粒捕集裝置
US12515169B2 (en) * 2020-06-26 2026-01-06 Zimmer, Inc. Vacuum generation process for deposition of biomedical implant materials

Family Cites Families (24)

* Cited by examiner, † Cited by third party
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BR6803024D0 (pt) * 1967-12-15 1973-01-04 Siemens Ag Processo para a producao de hidrogenio
US4001332A (en) * 1973-01-13 1977-01-04 Hoechst Aktiengesellschaft Process for compressing ketene
DE2832401C3 (de) * 1978-07-24 1981-04-02 Siemens AG, 1000 Berlin und 8000 München Flüssigkeitsringpumpenanordnung
DE3024352A1 (de) * 1980-06-27 1982-01-21 Karlheinz 8000 München Geiger Verfahren und anlage zur gewinnung von brenngas durch ausfaulen organischer stoffe
JPH0714451B2 (ja) * 1988-05-23 1995-02-22 日本電気株式会社 廃ガス処理方法
JPH05154334A (ja) * 1991-12-11 1993-06-22 Fujitsu Ltd 半導体製造装置の排気ポンプシステム
US5178823A (en) * 1992-03-12 1993-01-12 Container Products Corp. Decontamination apparatus
US5287589A (en) * 1992-08-31 1994-02-22 Container Products Corp. Self-contained cleaning and retrieval apparatus
US5817284A (en) * 1995-10-30 1998-10-06 Central Glass Company, Limited Method for decomposing halide-containing gas
US6083572A (en) * 1998-02-27 2000-07-04 Hewlett-Packard Company Organic low-dielectric constant films deposited by plasma enhanced chemical vapor deposition
JP3866412B2 (ja) * 1998-05-28 2007-01-10 カンケンテクノ株式会社 半導体製造排ガスの除害方法及び除害装置
US6368567B2 (en) * 1998-10-07 2002-04-09 Applied Materials, Inc. Point-of-use exhaust by-product reactor
GB9902099D0 (en) * 1999-01-29 1999-03-24 Boc Group Plc Vacuum pump systems
JP3976459B2 (ja) * 1999-11-18 2007-09-19 株式会社荏原製作所 フッ素含有化合物を含む排ガスの処理方法及び装置
JP2001293335A (ja) * 2000-04-12 2001-10-23 Ebara Corp フッ素含有化合物を含む排ガスの処理方法
AU2001284325A1 (en) 2000-08-31 2002-03-13 Barthlo Von_Moltitz Harmse A method of treating an effluent gas stream, and apparatus for use in such method
NO20010345L (no) * 2001-01-19 2002-07-22 Abb Gas Technology As Fremgangsmåte og anordning til behandling av gasser, samt anvendelse derav
AU2002303842A1 (en) * 2001-05-22 2002-12-03 Reflectivity, Inc. A method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants
CN100488598C (zh) 2001-12-04 2009-05-20 株式会社荏原制作所 处理废气的方法和装置
JP2005131509A (ja) * 2003-10-29 2005-05-26 Unisem Co Ltd 廃ガス処理処置及び廃ガス処理方法
CA2574188A1 (en) * 2004-07-16 2006-01-26 Cipla Limited Anti-histaminic composition
GB0416385D0 (en) * 2004-07-22 2004-08-25 Boc Group Plc Gas abatement
JP4218618B2 (ja) * 2004-09-10 2009-02-04 株式会社日立製作所 排ガス分解処理装置
GB0505852D0 (en) 2005-03-22 2005-04-27 Boc Group Plc Method of treating a gas stream

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180031685A (ko) * 2015-07-22 2018-03-28 에드워즈 리미티드 저감 시스템
KR20180033181A (ko) * 2015-07-22 2018-04-02 에드워즈 리미티드 처리 챔버로부터 나오는 부식성 배출 가스 스트림을 배기하기 위한 장치

Also Published As

Publication number Publication date
US8394179B2 (en) 2013-03-12
ZA200904863B (en) 2010-04-28
AU2008215944A1 (en) 2008-08-21
AU2008215944B2 (en) 2012-05-10
EP2111283A1 (en) 2009-10-28
JP5264784B2 (ja) 2013-08-14
US20100101414A1 (en) 2010-04-29
BRPI0807585A2 (pt) 2014-07-01
GB0702837D0 (en) 2007-03-28
WO2008099206A1 (en) 2008-08-21
TW200841925A (en) 2008-11-01
JP2010517769A (ja) 2010-05-27
CN101610829A (zh) 2009-12-23
EA200970762A1 (ru) 2009-12-30

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