CN101610829A - 处理气体物流的方法 - Google Patents

处理气体物流的方法 Download PDF

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Publication number
CN101610829A
CN101610829A CNA2008800051909A CN200880005190A CN101610829A CN 101610829 A CN101610829 A CN 101610829A CN A2008800051909 A CNA2008800051909 A CN A2008800051909A CN 200880005190 A CN200880005190 A CN 200880005190A CN 101610829 A CN101610829 A CN 101610829A
Authority
CN
China
Prior art keywords
gas
gas stream
pump
liquid
equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2008800051909A
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English (en)
Chinese (zh)
Inventor
J·R·史密斯
G·P·奈特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Edwards Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Publication of CN101610829A publication Critical patent/CN101610829A/zh
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B01D53/18—Absorbing units; Liquid distributors therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/10—Oxidants
    • B01D2251/11—Air
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
CNA2008800051909A 2007-02-14 2008-01-23 处理气体物流的方法 Pending CN101610829A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0702837.6A GB0702837D0 (en) 2007-02-14 2007-02-14 Method of treating a gas stream
GB0702837.6 2007-02-14
PCT/GB2008/050045 WO2008099206A1 (en) 2007-02-14 2008-01-23 Method of treating a gas stream

Publications (1)

Publication Number Publication Date
CN101610829A true CN101610829A (zh) 2009-12-23

Family

ID=37908602

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2008800051909A Pending CN101610829A (zh) 2007-02-14 2008-01-23 处理气体物流的方法

Country Status (12)

Country Link
US (1) US8394179B2 (https=)
EP (1) EP2111283A1 (https=)
JP (1) JP5264784B2 (https=)
KR (1) KR20090110343A (https=)
CN (1) CN101610829A (https=)
AU (1) AU2008215944B2 (https=)
BR (1) BRPI0807585A2 (https=)
EA (1) EA200970762A1 (https=)
GB (1) GB0702837D0 (https=)
TW (1) TW200841925A (https=)
WO (1) WO2008099206A1 (https=)
ZA (1) ZA200904863B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107847858A (zh) * 2015-07-22 2018-03-27 爱德华兹有限公司 用于排空来自处理室的腐蚀性流出气体流的装置

Families Citing this family (8)

* Cited by examiner, † Cited by third party
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FI123904B (fi) * 2012-02-24 2013-12-13 Teknologian Tutkimuskeskus Vtt Menetelmä ja laitteisto pyrolyysinesteen valmistamiseksi
GB2513300B (en) * 2013-04-04 2017-10-11 Edwards Ltd Vacuum pumping and abatement system
GB2540580A (en) 2015-07-22 2017-01-25 Edwards Ltd Liquid ring pump
GB2540581A (en) * 2015-07-22 2017-01-25 Edwards Ltd Abatement system
GB2561899B (en) 2017-04-28 2020-11-04 Edwards Ltd Vacuum pumping system
US11905955B1 (en) * 2019-05-01 2024-02-20 Kashiyama Industries, Ltd. Extending life cycles of vacuum pumps used in manufacturing processes
TWI699234B (zh) 2019-11-21 2020-07-21 財團法人工業技術研究院 微粒捕集裝置
US12515169B2 (en) * 2020-06-26 2026-01-06 Zimmer, Inc. Vacuum generation process for deposition of biomedical implant materials

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DE2832401C3 (de) * 1978-07-24 1981-04-02 Siemens AG, 1000 Berlin und 8000 München Flüssigkeitsringpumpenanordnung
DE3024352A1 (de) * 1980-06-27 1982-01-21 Karlheinz 8000 München Geiger Verfahren und anlage zur gewinnung von brenngas durch ausfaulen organischer stoffe
JPH0714451B2 (ja) * 1988-05-23 1995-02-22 日本電気株式会社 廃ガス処理方法
JPH05154334A (ja) * 1991-12-11 1993-06-22 Fujitsu Ltd 半導体製造装置の排気ポンプシステム
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JP3866412B2 (ja) * 1998-05-28 2007-01-10 カンケンテクノ株式会社 半導体製造排ガスの除害方法及び除害装置
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JP3976459B2 (ja) * 1999-11-18 2007-09-19 株式会社荏原製作所 フッ素含有化合物を含む排ガスの処理方法及び装置
JP2001293335A (ja) * 2000-04-12 2001-10-23 Ebara Corp フッ素含有化合物を含む排ガスの処理方法
AU2001284325A1 (en) 2000-08-31 2002-03-13 Barthlo Von_Moltitz Harmse A method of treating an effluent gas stream, and apparatus for use in such method
NO20010345L (no) * 2001-01-19 2002-07-22 Abb Gas Technology As Fremgangsmåte og anordning til behandling av gasser, samt anvendelse derav
AU2002303842A1 (en) * 2001-05-22 2002-12-03 Reflectivity, Inc. A method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants
CN100488598C (zh) 2001-12-04 2009-05-20 株式会社荏原制作所 处理废气的方法和装置
JP2005131509A (ja) * 2003-10-29 2005-05-26 Unisem Co Ltd 廃ガス処理処置及び廃ガス処理方法
CA2574188A1 (en) * 2004-07-16 2006-01-26 Cipla Limited Anti-histaminic composition
GB0416385D0 (en) * 2004-07-22 2004-08-25 Boc Group Plc Gas abatement
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GB0505852D0 (en) 2005-03-22 2005-04-27 Boc Group Plc Method of treating a gas stream

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107847858A (zh) * 2015-07-22 2018-03-27 爱德华兹有限公司 用于排空来自处理室的腐蚀性流出气体流的装置

Also Published As

Publication number Publication date
US8394179B2 (en) 2013-03-12
ZA200904863B (en) 2010-04-28
AU2008215944A1 (en) 2008-08-21
AU2008215944B2 (en) 2012-05-10
EP2111283A1 (en) 2009-10-28
JP5264784B2 (ja) 2013-08-14
US20100101414A1 (en) 2010-04-29
BRPI0807585A2 (pt) 2014-07-01
GB0702837D0 (en) 2007-03-28
WO2008099206A1 (en) 2008-08-21
KR20090110343A (ko) 2009-10-21
TW200841925A (en) 2008-11-01
JP2010517769A (ja) 2010-05-27
EA200970762A1 (ru) 2009-12-30

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Application publication date: 20091223