JP2010509171A - ナノワイヤー成長用システム及び方法 - Google Patents
ナノワイヤー成長用システム及び方法 Download PDFInfo
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- JP2010509171A JP2010509171A JP2009536280A JP2009536280A JP2010509171A JP 2010509171 A JP2010509171 A JP 2010509171A JP 2009536280 A JP2009536280 A JP 2009536280A JP 2009536280 A JP2009536280 A JP 2009536280A JP 2010509171 A JP2010509171 A JP 2010509171A
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- 239000011159 matrix material Substances 0.000 description 1
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- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
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- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
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- 229910052762 osmium Inorganic materials 0.000 description 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
- SLIUAWYAILUBJU-UHFFFAOYSA-N pentacene Chemical compound C1=CC=CC2=CC3=CC4=CC5=CC=CC=C5C=C4C=C3C=C21 SLIUAWYAILUBJU-UHFFFAOYSA-N 0.000 description 1
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- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
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- 230000008313 sensitization Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- ADZWSOLPGZMUMY-UHFFFAOYSA-M silver bromide Chemical compound [Ag]Br ADZWSOLPGZMUMY-UHFFFAOYSA-M 0.000 description 1
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 description 1
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- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
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- 238000013519 translation Methods 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
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- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
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- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
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Abstract
【選択図】図1
Description
本願は米国仮特許出願第60/857,450号(出願日2006年11月7日)の出願日の優先権を主張し、その開示内容全体を本明細書に援用する。
本発明はナノワイヤーに関し、より詳細には改善型ナノワイヤー成長法に関する。
図1Aは単結晶半導体ナノワイヤーコア(以下、「ナノワイヤー」と言う)100を示す。図1Aは均一にドープした単結晶ナノワイヤーであるナノワイヤー100を示す。このような単結晶ナノワイヤーは相当制御された方法でp型又はn型半導体にドープすることができる。ナノワイヤー100のようなドープナノワイヤーは改善された電子的性質を示す。例えば、このようなナノワイヤーはバルク単結晶材料と同等のキャリア移動度レベルをもつようにドープすることができる。
シリコンナノワイヤー等の高品質単結晶ナノワイヤーは一般に金属触媒化学蒸着法(CVD)により成長させる。この蒸気−液体−固体(VLS)成長プロセス中には、金核生成粒子等のナノ寸法金属触媒を使用し、シラン(SiH4)等の前駆体ガスの分解を触媒する。液体Au−Si合金が形成され、過飽和に達すると、シリコンが析出し、触媒粒子と同等直径のシリコンナノワイヤーを形成する。この方法の好ましいナノワイヤー成長方向は<111>、<110>及び<112>を含むことができる。
本発明の方法により製造されたナノワイヤーの薄膜を組込んだ半導体又は他の型のデバイスは多数の電子デバイス及びシステムに搭載することができる。本発明のいくつかの典型的な用途を以下又は本明細書の他の箇所に例証の目的で記載するが、これらに限定するものではない。本明細書に記載する用途としてはナノワイヤーの整列又は非整列薄膜と、ナノワイヤーの複合又は非複合薄膜が挙げられる。
以上、本発明の典型的態様について記載した。本発明はこれらの例に限定されない。これらの例は限定の目的ではなく、例証の目的で本明細書に記載した。本明細書に含まれる教示に基づいて代替態様(本明細書の記載と等価、拡張、変形、誘導等)が当業者に想到されよう。このような代替態様も本発明の範囲と精神に含まれる。
Claims (35)
- (a)1個以上の核生成粒子を堆積した基板材料を反応チャンバーに準備する段階と;
(b)基板材料の表面の洗浄を助長するエッチャントガスを第1の温度で反応チャンバーに導入する段階と;
(c)核生成粒子を少なくとも第1の前駆体ガスと接触させ、ナノワイヤー成長を開始する段階と;
(d)基板材料を第2の温度まで加熱することにより、核生成粒子の部位にナノワイヤーを成長させる段階を含むナノワイヤーの製造方法。 - 前駆体ガスがSiH4又はSi2H6を含む請求項1に記載の方法。
- 段階(b)における前記導入が約800℃の温度で実施される請求項1に記載の方法。
- 段階(b)における前記導入が約600℃の温度で実施される請求項1に記載の方法。
- 前記第1の温度が前記第2の温度よりも高い請求項3に記載の方法。
- 第2の温度が約600℃〜700℃である請求項5に記載の方法。
- 第2の温度が約600℃である請求項5に記載の方法。
- 前記第1の温度が前記第2の温度とほぼ同一である請求項1に記載の方法。
- 前記第1及び第2の温度が約600℃である請求項8に記載の方法。
- エッチャントガスが塩化水素(HCl)を含む請求項1に記載の方法。
- 段階(b)において約1Torrの分圧で前記塩化水素を反応チャンバーに導入する請求項10に記載の方法。
- 段階(c)及び/又は段階(d)中に塩化水素ガスを反応チャンバーに導入する段階を更に含む請求項11に記載の方法。
- 段階(c)及び/又は段階(d)において約0.15Torrの分圧で前記塩化水素を反応チャンバーに導入する請求項12に記載の方法。
- 段階(c)及び/又は段階(d)中に1種類以上のドーパントガスを反応チャンバーに導入する段階を更に含む請求項1に記載の方法。
- 段階(c)及び/又は段階(d)中に少なくとも1種類のドーパントガスを反応チャンバーに導入し、ナノワイヤーの末端の1個以上をドーピングする段階を更に含む請求項14に記載の方法。
- 前記少なくとも1種類のドーパントガスがホウ素含有ガスを含む請求項14に記載の方法。
- 段階(c)を実施する前に段階(b)を実施する請求項1に記載の方法。
- 1個以上の核生成粒子を含む基板を準備する段階がAu、Al、Pt、Fe、Ti、Ga、Ni、Sn又はInを含む複数の核生成粒子を基板上に堆積する段階を含む請求項1に記載の方法。
- 核生成粒子が金属コロイドを含む請求項18に記載の方法。
- 金属コロイドがAuコロイドを含む請求項19に記載の方法。
- 1個以上の核生成粒子を含む基板を準備する段階が金属膜を基板上に堆積する段階を含む請求項1に記載の方法。
- 金属膜が金膜を含む請求項21に記載の方法。
- 請求項1に記載の方法により製造されたナノワイヤー。
- 請求項1に記載の方法により製造され、ナノワイヤーの長さに沿うテーパー率が約2nm/ミクロン未満であるナノワイヤー。
- 請求項1に記載の方法により製造され、ナノワイヤーの長さに沿うテーパー率が約1nm/ミクロン未満であるナノワイヤー。
- 請求項1に記載の方法により製造され、ナノワイヤーの長さに沿うテーパー率が約0.5nm/ミクロン未満であるナノワイヤー。
- 請求項1に記載の方法により製造されたナノワイヤーを含む電子回路。
- 各々ナノワイヤーの長さに沿うテーパー率が約2nm/ミクロン未満である少なくとも4本の半導体ナノワイヤーの集合。
- ナノワイヤーの各々の長さに沿うテーパー率が約1nm/ミクロン未満である請求項28に記載の半導体ナノワイヤーの集合。
- ナノワイヤーの各々の長さに沿うテーパー率が約0.5nm/ミクロン未満である請求項29に記載の半導体ナノワイヤーの集合。
- ナノワイヤーの各々の長さに沿うテーパー率が約0.3nm/ミクロン未満である請求項30に記載の半導体ナノワイヤーの集合。
- ナノワイヤーがシリコンを含む請求項30に記載の半導体ナノワイヤーの集合。
- ナノワイヤーがシリコンとゲルマニウムを含む請求項30に記載の半導体ナノワイヤーの集合。
- ナノワイヤーがシリコンから形成されたコアと、コアの周囲に配置され、酸化物から形成された1層以上のシェル層を含む請求項32に記載の半導体ナノワイヤーの集合。
- ナノワイヤーがシリコンを含む第1の長手方向セグメントと、第1のセグメントから長手方向に離間して配置され、ゲルマニウムを含む少なくとも1個以上の第2の長手方向セグメントを含む請求項32に記載の半導体ナノワイヤーの集合。
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PCT/US2007/023434 WO2008057558A2 (en) | 2006-11-07 | 2007-11-06 | Systems and methods for nanowire growth |
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JP2010076044A (ja) * | 2008-09-26 | 2010-04-08 | National Institute For Materials Science | 有機高分子ナノワイヤーとその製造方法 |
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EP2082419A2 (en) | 2009-07-29 |
KR20090087467A (ko) | 2009-08-17 |
US7776760B2 (en) | 2010-08-17 |
WO2008057558A3 (en) | 2008-08-21 |
US20090127540A1 (en) | 2009-05-21 |
WO2008057558A2 (en) | 2008-05-15 |
CN101573778A (zh) | 2009-11-04 |
US20110156003A1 (en) | 2011-06-30 |
EP2082419A4 (en) | 2014-06-11 |
CN101573778B (zh) | 2013-01-02 |
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