JP2010501336A - 浄化要素を備える流体アセンブリ - Google Patents

浄化要素を備える流体アセンブリ Download PDF

Info

Publication number
JP2010501336A
JP2010501336A JP2009525704A JP2009525704A JP2010501336A JP 2010501336 A JP2010501336 A JP 2010501336A JP 2009525704 A JP2009525704 A JP 2009525704A JP 2009525704 A JP2009525704 A JP 2009525704A JP 2010501336 A JP2010501336 A JP 2010501336A
Authority
JP
Japan
Prior art keywords
fluid
substrate
block
handling device
purifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009525704A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010501336A5 (enExample
Inventor
ブライアン パラーモ，
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pall Corp
Original Assignee
Pall Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pall Corp filed Critical Pall Corp
Publication of JP2010501336A publication Critical patent/JP2010501336A/ja
Publication of JP2010501336A5 publication Critical patent/JP2010501336A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP2009525704A 2006-08-25 2007-08-17 浄化要素を備える流体アセンブリ Pending JP2010501336A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US84002506P 2006-08-25 2006-08-25
PCT/US2007/076210 WO2008024683A1 (en) 2006-08-25 2007-08-17 Fluid assemblies comprising a purification element

Publications (2)

Publication Number Publication Date
JP2010501336A true JP2010501336A (ja) 2010-01-21
JP2010501336A5 JP2010501336A5 (enExample) 2010-09-02

Family

ID=38780804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009525704A Pending JP2010501336A (ja) 2006-08-25 2007-08-17 浄化要素を備える流体アセンブリ

Country Status (4)

Country Link
US (1) US20110041470A1 (enExample)
JP (1) JP2010501336A (enExample)
KR (1) KR101423586B1 (enExample)
WO (1) WO2008024683A1 (enExample)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48109246U (enExample) * 1972-03-24 1973-12-17
JP2000035148A (ja) * 1998-07-22 2000-02-02 Hitachi Metals Ltd 集積形流体制御装置
JP2000167318A (ja) * 1998-12-01 2000-06-20 Ultra Clean Technology Kaihatsu Kenkyusho:Kk ガスケットフィルタ
JP2002130479A (ja) * 2000-10-23 2002-05-09 Tokyo Electron Ltd 集積化流体供給装置及びこれに用いるシール材及びこれを用いた半導体製造装置
JP2002518167A (ja) * 1998-06-24 2002-06-25 ポール・コーポレーション 浄化組立体及び浄化方法
JP2002250645A (ja) * 2001-02-26 2002-09-06 Stec Inc 集積タイプのマスフローコントローラを用いた流体供給機構
JP2004183771A (ja) * 2002-12-03 2004-07-02 Fujikin Inc 流体制御装置
JP2006038525A (ja) * 2004-07-23 2006-02-09 Fuji Photo Film Co Ltd 液体濾過器具及び乾式分析素子
JP2006046502A (ja) * 2004-08-04 2006-02-16 Ckd Corp ガス供給集積ユニット

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5849394Y2 (ja) * 1977-12-13 1983-11-11 アイシン精機株式会社 塵埃濾過負圧管路継手
US4382808A (en) * 1981-06-26 1983-05-10 Beckman Instruments, Inc. Assembly for holding a filter
US4487618A (en) * 1982-08-19 1984-12-11 La-Man Corporation Airline vapor trap
JPS61108861A (ja) * 1984-11-01 1986-05-27 Honda Motor Co Ltd エアクリ−ナ
US4600416A (en) * 1985-02-08 1986-07-15 La-Man Corporation Air line vapor trap
US5330723A (en) * 1987-06-01 1994-07-19 Mst, Inc. In-line compressed air carbon monoxide filter
US5192348A (en) * 1991-08-21 1993-03-09 Brod & Mcclung-Pace Co. Directional air diffuser panel for clean room ventilation system
US5234165A (en) * 1992-02-25 1993-08-10 Tri-Tech Services, Inc. Agricultural sprayers
US5663476A (en) * 1994-04-29 1997-09-02 Motorola, Inc. Apparatus and method for decomposition of chemical compounds by increasing residence time of a chemical compound in a reaction chamber
US5558688A (en) * 1994-07-14 1996-09-24 Semi-Gas Systems, Inc. Block filter-purifier
US5545242A (en) * 1994-07-19 1996-08-13 Pall Corporation In-line filter for tubing
US5922344A (en) * 1995-02-10 1999-07-13 Abbott Laboratories Product for prevention of respiratory virus infection and method of use
US5605179A (en) * 1995-03-17 1997-02-25 Insync Systems, Inc. Integrated gas panel
KR100232112B1 (ko) * 1996-01-05 1999-12-01 아마노 시게루 가스공급유닛
JP4132143B2 (ja) * 1996-09-05 2008-08-13 日揮株式会社 ガス移送配管
US6302141B1 (en) * 1996-12-03 2001-10-16 Insync Systems, Inc. Building blocks for integrated gas panel
US5888259A (en) * 1997-05-22 1999-03-30 Maeda Limited Filter device for compressed air
JP4378553B2 (ja) * 1997-10-13 2009-12-09 忠弘 大見 流体制御装置
US6123340A (en) * 1998-01-09 2000-09-26 Swagelok Company Modular flow devices
US6015444A (en) * 1998-02-27 2000-01-18 Eaton Corporation Apparatus and system for venting a transmission
US6123752A (en) * 1998-09-03 2000-09-26 3M Innovative Properties Company High efficiency synthetic filter medium
US6149718A (en) * 1998-10-16 2000-11-21 Mott Mettallurgical Corporation Contamination control system
SE512980C2 (sv) * 1998-10-22 2000-06-12 Flaekt Ab Filteranordning för luftkanaler eller luftbehandlingsaggregat
WO2000031462A1 (en) * 1998-11-20 2000-06-02 Mykrolis Corporation System and method for integrating gas components
US6283143B1 (en) * 2000-03-31 2001-09-04 Lam Research Corporation System and method for providing an integrated gas stick
JP4156184B2 (ja) * 2000-08-01 2008-09-24 株式会社キッツエスシーティー 集積化ガス制御装置
US6447565B1 (en) * 2001-05-03 2002-09-10 General Motors Corporation Transmission vent assembly
US6769463B2 (en) * 2001-05-16 2004-08-03 Celerity Group, Inc. Fluid flow system
JP3969082B2 (ja) * 2001-08-10 2007-08-29 株式会社デンソー 車両用送風装置
JP3564115B2 (ja) * 2001-12-06 2004-09-08 シーケーディ株式会社 ガス供給ユニット
US6966940B2 (en) * 2002-04-04 2005-11-22 Donaldson Company, Inc. Air filter cartridge
JP4092164B2 (ja) * 2002-09-20 2008-05-28 シーケーディ株式会社 ガス供給ユニット
US7105037B2 (en) * 2002-10-31 2006-09-12 Advanced Technology Materials, Inc. Semiconductor manufacturing facility utilizing exhaust recirculation
US7083663B2 (en) * 2003-10-30 2006-08-01 The Regents Of The University Of Michigan Active filtration of airborne contaminants employing heated porous resistance-heated filters
US20050186901A1 (en) * 2004-02-23 2005-08-25 Moore Fred D.Jr. Adjustable ceiling mounted filter access frame and return system
US7410519B1 (en) * 2005-08-16 2008-08-12 Ewald Dieter H Sandwich filter block
US7566353B2 (en) * 2005-12-08 2009-07-28 Noam Lanker Modular air purification system
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
US7879123B2 (en) * 2007-09-27 2011-02-01 Pall Corporation Inertial separator

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48109246U (enExample) * 1972-03-24 1973-12-17
JP2002518167A (ja) * 1998-06-24 2002-06-25 ポール・コーポレーション 浄化組立体及び浄化方法
JP2000035148A (ja) * 1998-07-22 2000-02-02 Hitachi Metals Ltd 集積形流体制御装置
JP2000167318A (ja) * 1998-12-01 2000-06-20 Ultra Clean Technology Kaihatsu Kenkyusho:Kk ガスケットフィルタ
JP2002130479A (ja) * 2000-10-23 2002-05-09 Tokyo Electron Ltd 集積化流体供給装置及びこれに用いるシール材及びこれを用いた半導体製造装置
JP2002250645A (ja) * 2001-02-26 2002-09-06 Stec Inc 集積タイプのマスフローコントローラを用いた流体供給機構
JP2004183771A (ja) * 2002-12-03 2004-07-02 Fujikin Inc 流体制御装置
JP2006038525A (ja) * 2004-07-23 2006-02-09 Fuji Photo Film Co Ltd 液体濾過器具及び乾式分析素子
JP2006046502A (ja) * 2004-08-04 2006-02-16 Ckd Corp ガス供給集積ユニット

Also Published As

Publication number Publication date
KR20090069268A (ko) 2009-06-30
WO2008024683A1 (en) 2008-02-28
US20110041470A1 (en) 2011-02-24
KR101423586B1 (ko) 2014-07-25

Similar Documents

Publication Publication Date Title
JP5127304B2 (ja) 流体制御装置
KR101343692B1 (ko) 여과 모듈
US7213618B2 (en) Gas-panel assembly
US5116499A (en) High-strength spin-on tube filter
US8961644B2 (en) Seal devices for filters
JPH0852311A (ja) インライン型フィルタ
JP2006507463A5 (enExample)
CN101370639A (zh) 低轮廓表面安装过滤器
US20180147524A1 (en) Purification column
US8202422B2 (en) Fluid system
WO2004094022A3 (en) Pleated construction for effecting gas transfer membrane
US6149718A (en) Contamination control system
CN104838240A (zh) 垫片一体型陶瓷孔板
US7410519B1 (en) Sandwich filter block
JP4411656B2 (ja) フィルタ装置
JP2010501336A (ja) 浄化要素を備える流体アセンブリ
JP5630743B2 (ja) 浄化アセンブリ及び浄化アセンブリの組立方法
JP2007321833A (ja) ガス供給機器用流路ブロックおよび半導体製造用ガス供給ユニット
US6514323B1 (en) Purification assemblies and purification methods
JP2000320697A (ja) ガス供給制御ライン用弁
JPH04322711A (ja) 精密濾過用金属フィルターの製造方法
JP3157490B2 (ja) 反応性媒体を隔離及び収納するための装置
JP3123099U (ja) ガス供給機器用流路ブロック、及び半導体製造用ガス供給ユニット
JPH0611079Y2 (ja) 精密濾過フィルタ
WO2000053289A1 (en) Purifier assemblies

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100713

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100713

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20111125

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120110

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20120409

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20120416

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20120509

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20120516

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20120611

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20120618

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20121023

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20130123

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20130130

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20130225

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20130304

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20130325

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20130401

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20140107