JP2010281573A - 圧力センサー - Google Patents

圧力センサー Download PDF

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Publication number
JP2010281573A
JP2010281573A JP2009132695A JP2009132695A JP2010281573A JP 2010281573 A JP2010281573 A JP 2010281573A JP 2009132695 A JP2009132695 A JP 2009132695A JP 2009132695 A JP2009132695 A JP 2009132695A JP 2010281573 A JP2010281573 A JP 2010281573A
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JP
Japan
Prior art keywords
pressure sensor
pressure
sensor element
diaphragm
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2009132695A
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English (en)
Japanese (ja)
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JP2010281573A5 (enExample
Inventor
Yoshikuni Saito
佳邦 齋藤
Toshinobu Sakurai
俊信 櫻井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2009132695A priority Critical patent/JP2010281573A/ja
Publication of JP2010281573A publication Critical patent/JP2010281573A/ja
Publication of JP2010281573A5 publication Critical patent/JP2010281573A5/ja
Withdrawn legal-status Critical Current

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JP2009132695A 2009-06-02 2009-06-02 圧力センサー Withdrawn JP2010281573A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009132695A JP2010281573A (ja) 2009-06-02 2009-06-02 圧力センサー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009132695A JP2010281573A (ja) 2009-06-02 2009-06-02 圧力センサー

Publications (2)

Publication Number Publication Date
JP2010281573A true JP2010281573A (ja) 2010-12-16
JP2010281573A5 JP2010281573A5 (enExample) 2012-05-31

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ID=43538456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009132695A Withdrawn JP2010281573A (ja) 2009-06-02 2009-06-02 圧力センサー

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JP (1) JP2010281573A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012132806A (ja) * 2010-12-22 2012-07-12 Yokogawa Electric Corp 振動式絶対圧トランスデューサ
CN114858326A (zh) * 2021-02-04 2022-08-05 中国航发商用航空发动机有限责任公司 航空发动机机匣轴向力测量装置及航空发动机

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005249795A (ja) * 2004-03-04 2005-09-15 Robert Bosch Gmbh 半導体チップを実装する方法および相応の半導体チップ配置構造
JP2007333452A (ja) * 2006-06-13 2007-12-27 Epson Toyocom Corp 圧力センサ用感圧素子、及び圧力センサ
JP2008241287A (ja) * 2007-03-26 2008-10-09 Epson Toyocom Corp 圧力センサ用の感圧素子、及びその製造方法
JP2009092403A (ja) * 2007-10-04 2009-04-30 Epson Toyocom Corp 圧力センサ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005249795A (ja) * 2004-03-04 2005-09-15 Robert Bosch Gmbh 半導体チップを実装する方法および相応の半導体チップ配置構造
JP2007333452A (ja) * 2006-06-13 2007-12-27 Epson Toyocom Corp 圧力センサ用感圧素子、及び圧力センサ
JP2008241287A (ja) * 2007-03-26 2008-10-09 Epson Toyocom Corp 圧力センサ用の感圧素子、及びその製造方法
JP2009092403A (ja) * 2007-10-04 2009-04-30 Epson Toyocom Corp 圧力センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012132806A (ja) * 2010-12-22 2012-07-12 Yokogawa Electric Corp 振動式絶対圧トランスデューサ
CN114858326A (zh) * 2021-02-04 2022-08-05 中国航发商用航空发动机有限责任公司 航空发动机机匣轴向力测量装置及航空发动机

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