JP2010281573A5 - - Google Patents

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Publication number
JP2010281573A5
JP2010281573A5 JP2009132695A JP2009132695A JP2010281573A5 JP 2010281573 A5 JP2010281573 A5 JP 2010281573A5 JP 2009132695 A JP2009132695 A JP 2009132695A JP 2009132695 A JP2009132695 A JP 2009132695A JP 2010281573 A5 JP2010281573 A5 JP 2010281573A5
Authority
JP
Japan
Prior art keywords
pressure sensor
pressure
sensor according
base
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2009132695A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010281573A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2009132695A priority Critical patent/JP2010281573A/ja
Priority claimed from JP2009132695A external-priority patent/JP2010281573A/ja
Publication of JP2010281573A publication Critical patent/JP2010281573A/ja
Publication of JP2010281573A5 publication Critical patent/JP2010281573A5/ja
Withdrawn legal-status Critical Current

Links

JP2009132695A 2009-06-02 2009-06-02 圧力センサー Withdrawn JP2010281573A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009132695A JP2010281573A (ja) 2009-06-02 2009-06-02 圧力センサー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009132695A JP2010281573A (ja) 2009-06-02 2009-06-02 圧力センサー

Publications (2)

Publication Number Publication Date
JP2010281573A JP2010281573A (ja) 2010-12-16
JP2010281573A5 true JP2010281573A5 (enExample) 2012-05-31

Family

ID=43538456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009132695A Withdrawn JP2010281573A (ja) 2009-06-02 2009-06-02 圧力センサー

Country Status (1)

Country Link
JP (1) JP2010281573A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5656070B2 (ja) * 2010-12-22 2015-01-21 横河電機株式会社 振動式絶対圧トランスデューサ
CN114858326B (zh) * 2021-02-04 2024-11-26 中国航发商用航空发动机有限责任公司 航空发动机机匣轴向力测量装置及航空发动机

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004011203B4 (de) * 2004-03-04 2010-09-16 Robert Bosch Gmbh Verfahren zum Montieren von Halbleiterchips und entsprechende Halbleiterchipanordnung
JP2007333452A (ja) * 2006-06-13 2007-12-27 Epson Toyocom Corp 圧力センサ用感圧素子、及び圧力センサ
JP4888715B2 (ja) * 2007-03-26 2012-02-29 セイコーエプソン株式会社 圧力センサ用の感圧素子、及びその製造方法
JP4984068B2 (ja) * 2007-10-04 2012-07-25 セイコーエプソン株式会社 圧力センサ

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