JP2010269983A - 圧電磁器組成物及び圧電素子 - Google Patents
圧電磁器組成物及び圧電素子 Download PDFInfo
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- 239000000919 ceramic Substances 0.000 title claims abstract description 111
- 239000000203 mixture Substances 0.000 title claims abstract description 84
- 230000007704 transition Effects 0.000 claims abstract description 44
- 239000013078 crystal Substances 0.000 claims abstract description 43
- 229910052712 strontium Inorganic materials 0.000 claims abstract description 10
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 10
- 229910052700 potassium Inorganic materials 0.000 claims abstract description 8
- 229910052708 sodium Inorganic materials 0.000 claims abstract description 8
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 8
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 6
- 239000010410 layer Substances 0.000 description 30
- 238000005259 measurement Methods 0.000 description 17
- 239000000843 powder Substances 0.000 description 17
- 238000010304 firing Methods 0.000 description 13
- 239000002003 electrode paste Substances 0.000 description 12
- 239000011734 sodium Substances 0.000 description 10
- 238000002441 X-ray diffraction Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 239000010955 niobium Substances 0.000 description 9
- 239000011230 binding agent Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 7
- 239000002994 raw material Substances 0.000 description 7
- 239000010931 gold Substances 0.000 description 6
- 239000011241 protective layer Substances 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 5
- 230000006866 deterioration Effects 0.000 description 5
- 238000000113 differential scanning calorimetry Methods 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000011812 mixed powder Substances 0.000 description 5
- 239000003960 organic solvent Substances 0.000 description 5
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- 230000035939 shock Effects 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000006104 solid solution Substances 0.000 description 4
- 229910052788 barium Inorganic materials 0.000 description 3
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 2
- 229910001252 Pd alloy Inorganic materials 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 150000002736 metal compounds Chemical class 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000007088 Archimedes method Methods 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000003916 acid precipitation Methods 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 150000001447 alkali salts Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 238000001027 hydrothermal synthesis Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000000462 isostatic pressing Methods 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 229910002076 stabilized zirconia Inorganic materials 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Abstract
【解決手段】ペロブスカイト型酸化物を含有する圧電磁器組成物であって、ペロブスカイト型酸化物は、AサイトにNa、K、Li、Ba及びSr、並びにBサイトにNb、Ta及びZrを有し、−50〜150℃の温度範囲内において結晶相転移をするものであり、結晶相転移に伴う吸熱量が4J/g以下である圧電磁器組成物。
【選択図】なし
Description
(1−n)(K1−x−y―wNaxLiyBaw)m(Nb1−zTaz)O3−nSrZrO3・・・(1)
[式(1)中、x、y、z、w、m、及びnは、それぞれ
0.4<x≦0.7、
0.02≦y≦0.3、
0.5≦x+y<0.75、
0<z≦0.3、
0<w≦0.01、
0.98≦m≦1.0、及び
0.045≦n≦0.07を満たす。]
(1−n)(K1−x−y―wNaxLiyBaw)m(Nb1−zTaz)O3−nSrZrO3・・・(1)
[式(1)中、x、y、z、w、m、及びnは、それぞれ
0.4<x≦0.7、
0.02≦y≦0.3、
0.5≦x+y<0.75、
0<z≦0.3、
0<w≦0.01、
0.98≦m≦1.0、及び
0.045≦n≦0.07を満たす。]
実施例に何ら限定されるものではない。
[圧電素子の作製]
以下の手順で図1に示すような圧電素子20を作製した。まず、ペロブスカイト型酸化物の原料粉末として、K2CO3粉末、Nb2O5粉末、BaCO3粉末、TiO2粉末、Ta2O5,ZrO2粉末、Li2CO3粉末、SrCO3粉末、PbO2粉末,ZnO2粉末、Sb2O3粉末を準備した。これらの原料粉末を十分に乾燥させた後、表1に示す組成となるような比率で配合し、ボールミルを用いて純水中で十分に混合して混合粉末を得た。その後、当該混合粉末を乾燥し、700〜950℃で2時間仮焼した。仮焼して得られた粉体に、ポリビニルアルコール(PVA)を加え、一軸成形してペレット化した後、バインダを除去し、温度950〜1160℃、2時間の焼成条件にて、密閉系で焼成して焼結体を得た。
圧電素子20を電気炉中に設置した後、LCRメータ(商品名:HP4284A)を用い、−40〜300℃の温度範囲に亘って昇温する過程及び降温する過程において、圧電素子の静電容量が極大となるときの温度をそれぞれ測定した。そして、これらの測定値の平均値を求め、これを結晶相転移温度とした。その結果を表1に示す。なお、結晶の相転移(斜方晶−正方晶)が発生していることは、X線回折装置(リガク製、商品名:UltimaIII)を用いて確認した。X線回折の測定条件は以下の通りとした。
走査速度:20°/min
サンプリングステップ:0.02°
実施例1〜4、比較例1〜8及び参考例1の組成を有する、焼結体(圧電磁器)を粉砕し、粉末状の圧電磁器組成物を調製した。この圧電磁器組成物の結晶相転移(斜方晶−正方晶)に伴う吸熱量を以下の手順で測定した。まず、圧電磁器組成物を、−40℃から300℃まで20℃/minで昇温しながら、示差走査熱量計(リガク製、商品名:DSC8230)とX線回折装置(リガク製、商品名:UltimaIII)を用いて、示差走査熱量分析とX線回折パターン測定とを並行して行った。そして、X線回折パターン測定によって、結晶の相転移を確認しながら、示差走査熱量計で熱流量を測定し、図3に示すような、結晶相転移の温度付近における吸熱ピークを求めた。
測定試料の量:試料ホルダー(7mm×7mm×0.25mm)に充填
DSCリファレンス:アルミニウム
圧電素子20の圧電定数d33は、室温(20℃)において、d33メータ(IAAS製、商品名:ZJ−4B)を用いて測定した。その結果を表1に示す。
圧電素子20を、試験槽(TABAI製、商品名:MC810)に投入し、下記i)〜iv)の工程を1サイクルとする熱サイクル試験を行った。10サイクル実施後の圧電素子20の圧電定数d33を上述の「圧電定数の測定」と同様にして行った。その結果を表1に示す。
i)125℃で30分間保持
ii)5℃/minで120℃から−40℃まで降温
iii)−40℃で30分間保持
iv)5℃/minで−40℃から125℃まで昇温
圧電素子20を、試験槽(TABAI製、商品名:MC810)に投入し、下記i)〜iv)の工程を1サイクルとする耐熱衝撃試験を行った。1000サイクル実施後の圧電素子20の圧電定数d33を上述の「圧電定数の測定」と同様にして行った。その結果を表1に示す。
i)125℃で15分間保持
ii)72℃/minで125℃から−55℃まで降温
iii)−55℃で15分間保持
iv)72℃/minで−55℃から125℃まで昇温
Claims (5)
- ペロブスカイト型酸化物を含有する圧電磁器組成物であって、
前記ペロブスカイト型酸化物は、AサイトにNa、K、Li、Ba及びSr、並びにBサイトにNb、Ta及びZrを有し、−50〜150℃の温度範囲内において結晶相転移をするものであり、
前記結晶相転移に伴う吸熱量が4J/g以下である圧電磁器組成物。 - 前記ペロブスカイト型酸化物全体に対し、Sr及びZrの含有割合がSrZrO3換算で4.5〜7mol%である請求項1記載の圧電磁器組成物。
- 下記一般式(1)で表されるペロブスカイト型酸化物を含む圧電磁器組成物。
(1−n)(K1−x−y―wNaxLiyBaw)m(Nb1−zTaz)O3−nSrZrO3・・・(1)
[式(1)中、x、y、z、w、m、及びnは、それぞれ
0.4<x≦0.7、
0.02≦y≦0.3、
0.5≦x+y<0.75、
0<z≦0.3、
0<w≦0.01、
0.98≦m≦1.0、及び
0.045≦n≦0.07を満たす。] - 請求項1〜3のいずれか一項記載の圧電磁器組成物からなる圧電磁器と、該圧電磁器の表面上に設けられた電極と、を備える圧電素子。
- 内部電極と請求項1〜3のいずれか一項記載の圧電磁器組成物からなる圧電磁器とが交互に積層された素体と、
該素体を挟むように該素体の両端面にそれぞれ設けられ、前記内部電極と電気的に接続されている一対の端子電極と、を備える圧電素子。
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