JP2010251729A5 - - Google Patents

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Publication number
JP2010251729A5
JP2010251729A5 JP2010067633A JP2010067633A JP2010251729A5 JP 2010251729 A5 JP2010251729 A5 JP 2010251729A5 JP 2010067633 A JP2010067633 A JP 2010067633A JP 2010067633 A JP2010067633 A JP 2010067633A JP 2010251729 A5 JP2010251729 A5 JP 2010251729A5
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JP
Japan
Prior art keywords
layer
substrate
insulating layer
single crystal
silicon carbide
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Application number
JP2010067633A
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English (en)
Japanese (ja)
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JP2010251729A (ja
JP5562696B2 (ja
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Priority to JP2010067633A priority Critical patent/JP5562696B2/ja
Priority claimed from JP2010067633A external-priority patent/JP5562696B2/ja
Publication of JP2010251729A publication Critical patent/JP2010251729A/ja
Publication of JP2010251729A5 publication Critical patent/JP2010251729A5/ja
Application granted granted Critical
Publication of JP5562696B2 publication Critical patent/JP5562696B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010067633A 2009-03-27 2010-03-24 半導体装置の作製方法 Expired - Fee Related JP5562696B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010067633A JP5562696B2 (ja) 2009-03-27 2010-03-24 半導体装置の作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009078577 2009-03-27
JP2009078577 2009-03-27
JP2010067633A JP5562696B2 (ja) 2009-03-27 2010-03-24 半導体装置の作製方法

Publications (3)

Publication Number Publication Date
JP2010251729A JP2010251729A (ja) 2010-11-04
JP2010251729A5 true JP2010251729A5 (enExample) 2013-04-18
JP5562696B2 JP5562696B2 (ja) 2014-07-30

Family

ID=42783000

Family Applications (1)

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JP2010067633A Expired - Fee Related JP5562696B2 (ja) 2009-03-27 2010-03-24 半導体装置の作製方法

Country Status (2)

Country Link
US (1) US8198146B2 (enExample)
JP (1) JP5562696B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2560194A4 (en) * 2010-04-14 2013-11-20 Sumitomo Electric Industries SILICON CARBIDE SEMICONDUCTOR ELEMENT AND MANUFACTURING METHOD THEREFOR
CN106783869B (zh) * 2016-09-07 2019-11-22 武汉华星光电技术有限公司 薄膜晶体管阵列基板及其制造方法

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6709907B1 (en) * 1992-02-25 2004-03-23 Semiconductor Energy Laboratory Co., Ltd. Method of fabricating a thin film transistor
US6573195B1 (en) * 1999-01-26 2003-06-03 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing a semiconductor device by performing a heat-treatment in a hydrogen atmosphere
JP2001267573A (ja) * 2000-03-22 2001-09-28 Toshiba Corp SiCを含む半導体素子
US6855584B2 (en) * 2001-03-29 2005-02-15 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a semiconductor device
JP3826828B2 (ja) 2001-11-27 2006-09-27 日産自動車株式会社 炭化珪素半導体を用いた電界効果トランジスタ
US7232714B2 (en) * 2001-11-30 2007-06-19 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP2003282845A (ja) 2002-03-20 2003-10-03 Mitsubishi Electric Corp 炭化ケイ素基板の製造方法およびその製造方法により製造された炭化ケイ素基板、ならびに、ショットキーバリアダイオードおよび炭化ケイ素薄膜の製造方法
WO2004004013A1 (en) * 2002-06-26 2004-01-08 Cambridge Semiconductor Limited Lateral semiconductor device
US7081704B2 (en) * 2002-08-09 2006-07-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US6818529B2 (en) * 2002-09-12 2004-11-16 Applied Materials, Inc. Apparatus and method for forming a silicon film across the surface of a glass substrate
AU2003288999A1 (en) * 2002-12-19 2004-07-14 Semiconductor Energy Laboratory Co., Ltd. Display unit and method of fabricating display unit
US7329923B2 (en) * 2003-06-17 2008-02-12 International Business Machines Corporation High-performance CMOS devices on hybrid crystal oriented substrates
US7384829B2 (en) * 2004-07-23 2008-06-10 International Business Machines Corporation Patterned strained semiconductor substrate and device
US7393733B2 (en) * 2004-12-01 2008-07-01 Amberwave Systems Corporation Methods of forming hybrid fin field-effect transistor structures
WO2006114999A1 (ja) * 2005-04-18 2006-11-02 Kyoto University 化合物半導体装置及び化合物半導体製造方法
JP2007027646A (ja) 2005-07-21 2007-02-01 Mitsubishi Pencil Co Ltd 単結晶炭化シリコン基板の製造方法およびその製造装置
JP4563918B2 (ja) 2005-10-31 2010-10-20 エア・ウォーター株式会社 単結晶SiC基板の製造方法
US7691730B2 (en) * 2005-11-22 2010-04-06 Corning Incorporated Large area semiconductor on glass insulator
US7446026B2 (en) * 2006-02-08 2008-11-04 Freescale Semiconductor, Inc. Method of forming a CMOS device with stressor source/drain regions
US8008205B2 (en) * 2006-03-08 2011-08-30 Sharp Kabushiki Kaisha Methods for producing a semiconductor device having planarization films
TWI328877B (en) * 2006-07-20 2010-08-11 Au Optronics Corp Array substrate
US7846817B2 (en) * 2007-03-26 2010-12-07 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
US7932164B2 (en) * 2008-03-17 2011-04-26 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor substrate by using monitor substrate to obtain optimal energy density for laser irradiation of single crystal semiconductor layers
US7935589B2 (en) * 2008-04-29 2011-05-03 Chartered Semiconductor Manufacturing, Ltd. Enhanced stress for transistors

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