JP2010239142A5 - - Google Patents

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Publication number
JP2010239142A5
JP2010239142A5 JP2010124651A JP2010124651A JP2010239142A5 JP 2010239142 A5 JP2010239142 A5 JP 2010239142A5 JP 2010124651 A JP2010124651 A JP 2010124651A JP 2010124651 A JP2010124651 A JP 2010124651A JP 2010239142 A5 JP2010239142 A5 JP 2010239142A5
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JP
Japan
Prior art keywords
reaction tube
gas supply
supply duct
gas
heat treatment
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JP2010124651A
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English (en)
Japanese (ja)
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JP2010239142A (ja
JP5278376B2 (ja
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Priority claimed from JP2010124651A external-priority patent/JP5278376B2/ja
Publication of JP2010239142A publication Critical patent/JP2010239142A/ja
Publication of JP2010239142A5 publication Critical patent/JP2010239142A5/ja
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Publication of JP5278376B2 publication Critical patent/JP5278376B2/ja
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JP2010124651A 2010-05-31 2010-05-31 熱処理装置及び熱処理方法 Active JP5278376B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010124651A JP5278376B2 (ja) 2010-05-31 2010-05-31 熱処理装置及び熱処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010124651A JP5278376B2 (ja) 2010-05-31 2010-05-31 熱処理装置及び熱処理方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2007016848A Division JP4553263B2 (ja) 2007-01-26 2007-01-26 熱処理装置及び熱処理方法

Publications (3)

Publication Number Publication Date
JP2010239142A JP2010239142A (ja) 2010-10-21
JP2010239142A5 true JP2010239142A5 (cg-RX-API-DMAC7.html) 2011-07-07
JP5278376B2 JP5278376B2 (ja) 2013-09-04

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ID=43093154

Family Applications (1)

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JP2010124651A Active JP5278376B2 (ja) 2010-05-31 2010-05-31 熱処理装置及び熱処理方法

Country Status (1)

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JP (1) JP5278376B2 (cg-RX-API-DMAC7.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5549552B2 (ja) 2010-11-12 2014-07-16 東京エレクトロン株式会社 真空処理装置の組み立て方法及び真空処理装置
JP5702657B2 (ja) * 2011-04-18 2015-04-15 東京エレクトロン株式会社 熱処理装置
KR101629366B1 (ko) * 2012-03-22 2016-06-21 가부시키가이샤 히다치 고쿠사이 덴키 기판 처리 장치, 반도체 장치의 제조 방법 및 기판 처리 방법
JP6255267B2 (ja) * 2014-02-06 2017-12-27 株式会社日立国際電気 基板処理装置、加熱装置、天井断熱体及び半導体装置の製造方法
JP6472356B2 (ja) * 2015-09-11 2019-02-20 東京エレクトロン株式会社 熱処理装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01135734U (cg-RX-API-DMAC7.html) * 1988-03-08 1989-09-18
JPH0468522A (ja) * 1990-07-10 1992-03-04 Tokyo Electron Sagami Ltd 縦型熱処理装置
JPH06188238A (ja) * 1992-12-02 1994-07-08 Toshiba Corp 熱処理装置と熱処理方法
JP2000150526A (ja) * 1998-11-05 2000-05-30 Komatsu Electronic Metals Co Ltd ウェーハの熱処理炉

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