JP2008227264A5 - - Google Patents

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Publication number
JP2008227264A5
JP2008227264A5 JP2007065074A JP2007065074A JP2008227264A5 JP 2008227264 A5 JP2008227264 A5 JP 2008227264A5 JP 2007065074 A JP2007065074 A JP 2007065074A JP 2007065074 A JP2007065074 A JP 2007065074A JP 2008227264 A5 JP2008227264 A5 JP 2008227264A5
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JP
Japan
Prior art keywords
substrate
chamber
processing chamber
moving
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007065074A
Other languages
English (en)
Japanese (ja)
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JP2008227264A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007065074A priority Critical patent/JP2008227264A/ja
Priority claimed from JP2007065074A external-priority patent/JP2008227264A/ja
Publication of JP2008227264A publication Critical patent/JP2008227264A/ja
Publication of JP2008227264A5 publication Critical patent/JP2008227264A5/ja
Pending legal-status Critical Current

Links

JP2007065074A 2007-03-14 2007-03-14 基板処理装置 Pending JP2008227264A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007065074A JP2008227264A (ja) 2007-03-14 2007-03-14 基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007065074A JP2008227264A (ja) 2007-03-14 2007-03-14 基板処理装置

Publications (2)

Publication Number Publication Date
JP2008227264A JP2008227264A (ja) 2008-09-25
JP2008227264A5 true JP2008227264A5 (cg-RX-API-DMAC7.html) 2010-04-30

Family

ID=39845511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007065074A Pending JP2008227264A (ja) 2007-03-14 2007-03-14 基板処理装置

Country Status (1)

Country Link
JP (1) JP2008227264A (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4985729B2 (ja) 2008-09-11 2012-07-25 株式会社デンソー バルブタイミング調整装置
JP2010231572A (ja) * 2009-03-27 2010-10-14 Sumitomo Heavy Ind Ltd チャンバ圧力調整装置
KR102683732B1 (ko) * 2021-04-01 2024-07-12 세메스 주식회사 지지 유닛 및 기판 처리 장치

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3292540B2 (ja) * 1993-03-03 2002-06-17 東京エレクトロン株式会社 熱処理装置
JPH1022292A (ja) * 1996-07-08 1998-01-23 Sony Corp 熱処理装置およびこれを用いた熱処理方法
JPH11204447A (ja) * 1998-01-12 1999-07-30 Tokyo Electron Ltd 枚葉式の熱処理装置
JP2001068425A (ja) * 1999-08-31 2001-03-16 Hitachi Kokusai Electric Inc 半導体熱処理装置及び方法

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