JP2010212285A5 - - Google Patents

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Publication number
JP2010212285A5
JP2010212285A5 JP2009053712A JP2009053712A JP2010212285A5 JP 2010212285 A5 JP2010212285 A5 JP 2010212285A5 JP 2009053712 A JP2009053712 A JP 2009053712A JP 2009053712 A JP2009053712 A JP 2009053712A JP 2010212285 A5 JP2010212285 A5 JP 2010212285A5
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JP
Japan
Prior art keywords
sno
film
forming
semiconductor
semiconductor element
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JP2009053712A
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English (en)
Japanese (ja)
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JP5506213B2 (ja
JP2010212285A (ja
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Priority to JP2009053712A priority Critical patent/JP5506213B2/ja
Priority claimed from JP2009053712A external-priority patent/JP5506213B2/ja
Priority to US13/254,429 priority patent/US8389996B2/en
Priority to PCT/JP2010/001383 priority patent/WO2010100885A1/en
Priority to CN201080009985.4A priority patent/CN102341912B/zh
Publication of JP2010212285A publication Critical patent/JP2010212285A/ja
Publication of JP2010212285A5 publication Critical patent/JP2010212285A5/ja
Application granted granted Critical
Publication of JP5506213B2 publication Critical patent/JP5506213B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2009053712A 2009-03-06 2009-03-06 半導体素子の形成方法 Expired - Fee Related JP5506213B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009053712A JP5506213B2 (ja) 2009-03-06 2009-03-06 半導体素子の形成方法
US13/254,429 US8389996B2 (en) 2009-03-06 2010-03-01 Method for forming semiconductor film, method for forming semiconductor device and semiconductor device
PCT/JP2010/001383 WO2010100885A1 (en) 2009-03-06 2010-03-01 Method for forming semiconductor film, method for forming semiconductor device and semiconductor device
CN201080009985.4A CN102341912B (zh) 2009-03-06 2010-03-01 半导体膜的形成方法、半导体器件的形成方法和半导体器件

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009053712A JP5506213B2 (ja) 2009-03-06 2009-03-06 半導体素子の形成方法

Publications (3)

Publication Number Publication Date
JP2010212285A JP2010212285A (ja) 2010-09-24
JP2010212285A5 true JP2010212285A5 (OSRAM) 2012-03-29
JP5506213B2 JP5506213B2 (ja) 2014-05-28

Family

ID=42115923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009053712A Expired - Fee Related JP5506213B2 (ja) 2009-03-06 2009-03-06 半導体素子の形成方法

Country Status (4)

Country Link
US (1) US8389996B2 (OSRAM)
JP (1) JP5506213B2 (OSRAM)
CN (1) CN102341912B (OSRAM)
WO (1) WO2010100885A1 (OSRAM)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5360587B2 (ja) * 2009-12-04 2013-12-04 独立行政法人科学技術振興機構 ｎ型半導体薄膜、ホモｐｎ接合素子及び薄膜太陽電池並びにｎ型半導体薄膜及びホモｐｎ接合素子の製造方法
JP5735306B2 (ja) * 2011-03-01 2015-06-17 国立大学法人東京工業大学 同時両極性電界効果型トランジスタ及びその製造方法
KR101835005B1 (ko) * 2011-04-08 2018-03-07 삼성전자주식회사 반도체소자 및 그 제조방법
JP6208971B2 (ja) * 2012-09-14 2017-10-04 ルネサスエレクトロニクス株式会社 半導体装置、及び半導体装置の製造方法
CN103681515B (zh) * 2013-12-24 2016-06-22 京东方科技集团股份有限公司 一种互补型薄膜晶体管驱动背板及其制备方法、显示装置
JP6547273B2 (ja) 2013-12-26 2019-07-24 株式会社リコー ｐ型酸化物半導体、ｐ型酸化物半導体製造用組成物、ｐ型酸化物半導体の製造方法、半導体素子、表示素子、画像表示装置、及びシステム
US9985139B2 (en) 2014-11-12 2018-05-29 Qualcomm Incorporated Hydrogenated p-channel metal oxide semiconductor thin film transistors
US9685542B2 (en) * 2014-12-30 2017-06-20 Qualcomm Incorporated Atomic layer deposition of P-type oxide semiconductor thin films
US9647135B2 (en) * 2015-01-22 2017-05-09 Snaptrack, Inc. Tin based p-type oxide semiconductor and thin film transistor applications
CN106191774A (zh) * 2015-05-08 2016-12-07 清华大学 锡氧化物靶材及其制备方法
US9680030B1 (en) 2015-12-02 2017-06-13 Advanced Device Research Inc. Enhancement-mode field effect transistor having metal oxide channel layer
TWI566417B (zh) * 2015-12-04 2017-01-11 財團法人工業技術研究院 ｐ型金屬氧化物半導體材料與電晶體
JP6942943B2 (ja) * 2016-07-22 2021-09-29 株式会社リコー 半導体素子の製造方法
KR102676341B1 (ko) * 2016-12-30 2024-06-17 엘지디스플레이 주식회사 박막 트랜지스터, 그의 제조방법, 및 그를 포함한 표시장치
KR102145387B1 (ko) * 2019-01-07 2020-08-18 한양대학교 산학협력단 박막 트랜지스터 및 그 제조방법
JP2024085505A (ja) * 2022-12-15 2024-06-27 東京エレクトロン株式会社 半導体装置の製造方法及び半導体装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL294370A (OSRAM) * 1963-06-20
JPH02271917A (ja) * 1989-04-10 1990-11-06 Sanyo Electric Co Ltd ＳｎＯ↓２膜の形成方法及び光起電力装置の製造方法
JP2002235177A (ja) 2001-02-07 2002-08-23 Star Micronics Co Ltd ＳｎＯ膜及びその作製方法
US7189992B2 (en) * 2002-05-21 2007-03-13 State Of Oregon Acting By And Through The Oregon State Board Of Higher Education On Behalf Of Oregon State University Transistor structures having a transparent channel
JP4788238B2 (ja) 2005-08-22 2011-10-05 富士電機株式会社 薄膜ガスセンサの製造方法および薄膜ガスセンサ
KR100729043B1 (ko) 2005-09-14 2007-06-14 삼성에스디아이 주식회사 투명 박막 트랜지스터 및 그의 제조방법
JP4946123B2 (ja) * 2006-03-27 2012-06-06 セイコーエプソン株式会社 半導体装置、電気光学装置および電子機器
WO2008097117A1 (en) 2007-02-05 2008-08-14 Universidade Nova De Lisboa ELECTRONIC SEMICONDUCTOR DEVICE BASED ON COPPER NICKEL AND GALLIUM-TIN-ZINC-COPPER-TITANIUM p AND n-TYPE OXIDES, THEIR APPLICATIONS AND CORRESPONDING MANUFACTURE PROCESS
JP5168605B2 (ja) * 2008-07-24 2013-03-21 独立行政法人科学技術振興機構 ｐチャネル薄膜トランジスタとその製造方法
JP2009053712A (ja) 2008-10-28 2009-03-12 Mitsubishi Chemicals Corp 静電荷像現像用キャリア

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