JP2010198029A - ジンバル付きmemsミラー・ヒンジ用折り返し縦トーション・ヒンジ - Google Patents
ジンバル付きmemsミラー・ヒンジ用折り返し縦トーション・ヒンジ Download PDFInfo
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- JP2010198029A JP2010198029A JP2010091585A JP2010091585A JP2010198029A JP 2010198029 A JP2010198029 A JP 2010198029A JP 2010091585 A JP2010091585 A JP 2010091585A JP 2010091585 A JP2010091585 A JP 2010091585A JP 2010198029 A JP2010198029 A JP 2010198029A
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- Prior art keywords
- hinge
- mirror
- gimbal
- axis
- hinges
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Aerials With Secondary Devices (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Air Bags (AREA)
Abstract
【解決手段】 円形ミラー(12)は、対向しているが中心軸からずれた位置(36)および(37)で、複合縦ヒンジ(40)および(42)によってジンバル(44)に連結されている。
【選択図】図2
Description
適用外
連邦政府の資金提供による研究または開発の下で為された発明に対する権利についての記述。
「シーケンス・リスト」、表、またはコンパクト・ディスク上で提出されたコンピュータ・プログラムのリストの別表に対する参照。
wはヒンジ幅であり、
Lはヒンジ長さであり、
Nはヒンジ要素の数であり、
Eはヤング係数である。
κθは縦トーションばね定数であり、
vはポアソン比である。
Iは一次トーションモードの慣性モーメントであり、
Rはミラー半径であり、
ρはミラー密度である。
Δzsagは重力によるミラー・サグであり、
gは重力加速度である。
Claims (1)
- 平行プレート静電動作用の二重ジンバル付きミクロ機械加工ミラー構造であって、
静電電極を埋め込んだミクロミラー・アレイの基板と、
前記基板の前記アレイ内のミラーと、
前記ミラーの周りのジンバルと、
複数のトーション・ヒンジ要素が各ヒンジ構造の回転軸と平行な方向に配置された複数の折り返された縦ジンバル・ヒンジ構造であって、第1の対の折り返された縦ジンバル・ヒンジ構造が前記ミラーを前記ジンバルに連結し、第2の対の前記折り返された縦ジンバル・ヒンジ構造が前記基板を前記ジンバルに連結するようにジンバル・リング上に4つの位置で配置されるジンバル・ヒンジ構造とを備えるミラー構造。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/080,064 | 2002-02-19 | ||
US10/080,064 US6935759B1 (en) | 2002-02-19 | 2002-02-19 | Folded longitudinal torsional hinge for gimbaled MEMS mirror |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003570168A Division JP4537071B2 (ja) | 2002-02-19 | 2003-02-18 | ジンバル付きmemsミラー・ヒンジ用折り返し縦トーション・ヒンジ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010198029A true JP2010198029A (ja) | 2010-09-09 |
JP5330309B2 JP5330309B2 (ja) | 2013-10-30 |
Family
ID=27752796
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003570168A Expired - Fee Related JP4537071B2 (ja) | 2002-02-19 | 2003-02-18 | ジンバル付きmemsミラー・ヒンジ用折り返し縦トーション・ヒンジ |
JP2010091585A Expired - Fee Related JP5330309B2 (ja) | 2002-02-19 | 2010-04-12 | ジンバル付きmemsミラー・ヒンジ用折り返し縦トーション・ヒンジ |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003570168A Expired - Fee Related JP4537071B2 (ja) | 2002-02-19 | 2003-02-18 | ジンバル付きmemsミラー・ヒンジ用折り返し縦トーション・ヒンジ |
Country Status (9)
Country | Link |
---|---|
US (1) | US6935759B1 (ja) |
EP (1) | EP1476780B1 (ja) |
JP (2) | JP4537071B2 (ja) |
CN (1) | CN100335934C (ja) |
AT (1) | ATE421109T1 (ja) |
AU (1) | AU2003213165A1 (ja) |
CA (1) | CA2476802C (ja) |
DE (1) | DE60325829D1 (ja) |
WO (1) | WO2003071331A1 (ja) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6935759B1 (en) * | 2002-02-19 | 2005-08-30 | Glimmerglass Networks, Inc. | Folded longitudinal torsional hinge for gimbaled MEMS mirror |
JP4481756B2 (ja) * | 2004-07-26 | 2010-06-16 | Hoya株式会社 | ヒンジ構造 |
JP4531470B2 (ja) * | 2004-07-26 | 2010-08-25 | Hoya株式会社 | ヒンジ構造 |
WO2006073111A1 (ja) * | 2005-01-05 | 2006-07-13 | Nippon Telegraph And Telephone Corporation | ミラー装置、ミラーアレイ、光スイッチ、ミラー装置の製造方法及びミラー基板の製造方法 |
JP4445019B2 (ja) | 2005-12-26 | 2010-04-07 | 日本電信電話株式会社 | ばね、ミラー素子、ミラーアレイおよび光スイッチ |
US20070188847A1 (en) * | 2006-02-14 | 2007-08-16 | Texas Instruments Incorporated | MEMS device and method |
US8171804B2 (en) * | 2006-12-22 | 2012-05-08 | Texas Instruments Incorporated | Motion conversion system |
DE102007021920B8 (de) * | 2007-05-10 | 2011-12-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zum Entwerfen eines mikromechanischen Bauelements mit angepasster Empfindlichkeit, Verfahren zur Herstellung eines mikromechanischen Bauelements und eines mikromechanischen Systems |
US7630121B2 (en) * | 2007-07-02 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Electromechanical device with optical function separated from mechanical and electrical function |
EP2026116A1 (de) * | 2007-07-31 | 2009-02-18 | Sercalo Microtechnology Ltd. | Mikrospiegelvorrichtung |
JP5022164B2 (ja) * | 2007-10-04 | 2012-09-12 | 北陸電気工業株式会社 | 角速度センサ |
JP5611565B2 (ja) * | 2009-10-27 | 2014-10-22 | スタンレー電気株式会社 | 圧電振動発電機及びこれを用いた発電装置 |
JP5447283B2 (ja) * | 2010-08-12 | 2014-03-19 | セイコーエプソン株式会社 | 光スキャナーおよび画像形成装置 |
US20120056855A1 (en) * | 2010-09-03 | 2012-03-08 | Qualcomm Mems Technologies, Inc. | Interferometric display device |
JP2012088487A (ja) * | 2010-10-19 | 2012-05-10 | Jvc Kenwood Corp | 光偏向器 |
JP5775765B2 (ja) * | 2011-01-21 | 2015-09-09 | オリンパス株式会社 | 光偏向器 |
US8555719B2 (en) | 2011-01-24 | 2013-10-15 | Freescale Semiconductor, Inc. | MEMS sensor with folded torsion springs |
DE102011088331B4 (de) * | 2011-12-13 | 2020-03-19 | Robert Bosch Gmbh | Mikromechanisches Sensorelement |
JP2013200337A (ja) * | 2012-03-23 | 2013-10-03 | Stanley Electric Co Ltd | 光偏向器 |
JP6253915B2 (ja) * | 2013-08-01 | 2017-12-27 | 浜松ホトニクス株式会社 | アクチュエータ装置及びミラー駆動装置 |
DE102013225364A1 (de) * | 2013-12-10 | 2015-06-11 | Robert Bosch Gmbh | Kammantrieb mit einem verschwenkbaren Spiegelelement |
JP6550866B2 (ja) | 2015-04-01 | 2019-07-31 | セイコーエプソン株式会社 | 電気光学装置および電子機器 |
CN109496200B (zh) * | 2016-05-26 | 2022-12-13 | 麦斯卓有限公司 | 微机电系统致动器结构的冲击锁定特征 |
US10948688B2 (en) * | 2017-01-23 | 2021-03-16 | Google Llc | Optical circuit switch mirror array crack protection |
US11279613B2 (en) * | 2017-08-02 | 2022-03-22 | Government Of The United States, As Represented By The Secretary Of The Air Force | MEMS device for large angle beamsteering |
US11448854B2 (en) * | 2019-02-21 | 2022-09-20 | Alcon, Inc. | Angle adjustment system |
CN109991730B (zh) * | 2019-03-12 | 2021-06-15 | 上海集成电路研发中心有限公司 | 一种微镜结构 |
DE102019123394B4 (de) * | 2019-09-02 | 2022-04-28 | Universität Heidelberg | Kraftmessscheibe sowie Vorrichtung zur Bestimmung von Kräften im Piko-Newton- bis Nano-Newton-Bereich |
CN110954142B (zh) * | 2019-12-10 | 2021-12-28 | 京东方科技集团股份有限公司 | 一种光学微电机传感器、基板及电子设备 |
US20210278661A1 (en) * | 2020-03-05 | 2021-09-09 | Optotune Ag | Apparatus for deflecting an optical device |
DE102021116121B3 (de) | 2021-06-22 | 2022-10-20 | OQmented GmbH | Mikroscanner mit mäanderfederbasierter spiegelaufhängung |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08329181A (ja) * | 1995-06-01 | 1996-12-13 | Nippondenso Co Ltd | 2次元光走査装置 |
WO2000020899A2 (en) * | 1998-09-15 | 2000-04-13 | Xros, Inc. | Flexible, modular, compact fiber optic switch |
JP4537071B2 (ja) * | 2002-02-19 | 2010-09-01 | グリマーグラス・ネットワークス・インコーポレーテッド | ジンバル付きmemsミラー・ヒンジ用折り返し縦トーション・ヒンジ |
Family Cites Families (13)
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US4337506A (en) * | 1978-12-20 | 1982-06-29 | Terada James I | Adjustable lamp |
US4598585A (en) * | 1984-03-19 | 1986-07-08 | The Charles Stark Draper Laboratory, Inc. | Planar inertial sensor |
US4721274A (en) * | 1985-08-21 | 1988-01-26 | Erb Robert C | Gimbal assembly |
US5016072A (en) * | 1988-01-13 | 1991-05-14 | The Charles Stark Draper Laboratory, Inc. | Semiconductor chip gyroscopic transducer |
US5025346A (en) * | 1989-02-17 | 1991-06-18 | Regents Of The University Of California | Laterally driven resonant microstructures |
JP3214583B2 (ja) * | 1993-07-07 | 2001-10-02 | 富士電機株式会社 | 光偏向子 |
US5488862A (en) * | 1993-10-18 | 1996-02-06 | Armand P. Neukermans | Monolithic silicon rate-gyro with integrated sensors |
US5994801A (en) * | 1998-08-12 | 1999-11-30 | Sandia Corporation | Microelectromechanical gyroscope |
WO2000013210A2 (en) * | 1998-09-02 | 2000-03-09 | Xros, Inc. | Micromachined members coupled for relative rotation by torsional flexure hinges |
EP1210627A1 (en) * | 1999-07-21 | 2002-06-05 | Nortel Networks Corporation | Flexible, modular, compact fiber optic switch improvements |
US6337760B1 (en) * | 2000-07-17 | 2002-01-08 | Reflectivity, Inc. | Encapsulated multi-directional light beam steering device |
JP3579015B2 (ja) * | 2000-10-10 | 2004-10-20 | 日本電信電話株式会社 | マイクロミラー装置およびその製造方法 |
US6379510B1 (en) * | 2000-11-16 | 2002-04-30 | Jonathan S. Kane | Method of making a low voltage micro-mirror array light beam switch |
-
2002
- 2002-02-19 US US10/080,064 patent/US6935759B1/en not_active Expired - Lifetime
-
2003
- 2003-02-18 WO PCT/US2003/005167 patent/WO2003071331A1/en active Application Filing
- 2003-02-18 CN CNB038062259A patent/CN100335934C/zh not_active Expired - Fee Related
- 2003-02-18 EP EP03709211A patent/EP1476780B1/en not_active Expired - Lifetime
- 2003-02-18 DE DE60325829T patent/DE60325829D1/de not_active Expired - Lifetime
- 2003-02-18 AU AU2003213165A patent/AU2003213165A1/en not_active Abandoned
- 2003-02-18 JP JP2003570168A patent/JP4537071B2/ja not_active Expired - Fee Related
- 2003-02-18 AT AT03709211T patent/ATE421109T1/de not_active IP Right Cessation
- 2003-02-18 CA CA002476802A patent/CA2476802C/en not_active Expired - Fee Related
-
2010
- 2010-04-12 JP JP2010091585A patent/JP5330309B2/ja not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08329181A (ja) * | 1995-06-01 | 1996-12-13 | Nippondenso Co Ltd | 2次元光走査装置 |
WO2000020899A2 (en) * | 1998-09-15 | 2000-04-13 | Xros, Inc. | Flexible, modular, compact fiber optic switch |
JP4537071B2 (ja) * | 2002-02-19 | 2010-09-01 | グリマーグラス・ネットワークス・インコーポレーテッド | ジンバル付きmemsミラー・ヒンジ用折り返し縦トーション・ヒンジ |
Also Published As
Publication number | Publication date |
---|---|
JP2005517990A (ja) | 2005-06-16 |
JP4537071B2 (ja) | 2010-09-01 |
WO2003071331A1 (en) | 2003-08-28 |
EP1476780B1 (en) | 2009-01-14 |
AU2003213165A1 (en) | 2003-09-09 |
CA2476802C (en) | 2010-01-19 |
DE60325829D1 (de) | 2009-03-05 |
CA2476802A1 (en) | 2003-08-28 |
CN1643429A (zh) | 2005-07-20 |
EP1476780A1 (en) | 2004-11-17 |
US6935759B1 (en) | 2005-08-30 |
CN100335934C (zh) | 2007-09-05 |
ATE421109T1 (de) | 2009-01-15 |
JP5330309B2 (ja) | 2013-10-30 |
EP1476780A4 (en) | 2006-06-07 |
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