JP2010192594A5 - - Google Patents

Download PDF

Info

Publication number
JP2010192594A5
JP2010192594A5 JP2009034004A JP2009034004A JP2010192594A5 JP 2010192594 A5 JP2010192594 A5 JP 2010192594A5 JP 2009034004 A JP2009034004 A JP 2009034004A JP 2009034004 A JP2009034004 A JP 2009034004A JP 2010192594 A5 JP2010192594 A5 JP 2010192594A5
Authority
JP
Japan
Prior art keywords
layer
group iii
iii nitride
nitride semiconductor
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009034004A
Other languages
English (en)
Japanese (ja)
Other versions
JP4775455B2 (ja
JP2010192594A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2009034004A external-priority patent/JP4775455B2/ja
Priority to JP2009034004A priority Critical patent/JP4775455B2/ja
Priority to CN2009801569816A priority patent/CN102318152B/zh
Priority to KR1020117020627A priority patent/KR101269315B1/ko
Priority to EP09840443A priority patent/EP2400604A1/en
Priority to PCT/JP2009/071661 priority patent/WO2010095340A1/ja
Priority to TW098146573A priority patent/TW201034325A/zh
Publication of JP2010192594A publication Critical patent/JP2010192594A/ja
Publication of JP2010192594A5 publication Critical patent/JP2010192594A5/ja
Priority to US13/211,858 priority patent/US8548021B2/en
Publication of JP4775455B2 publication Critical patent/JP4775455B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2009034004A 2009-02-17 2009-02-17 Iii族窒化物半導体レーザ、及びiii族窒化物半導体レーザを作製する方法 Expired - Fee Related JP4775455B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2009034004A JP4775455B2 (ja) 2009-02-17 2009-02-17 Iii族窒化物半導体レーザ、及びiii族窒化物半導体レーザを作製する方法
PCT/JP2009/071661 WO2010095340A1 (ja) 2009-02-17 2009-12-25 Iii族窒化物半導体レーザ、及びiii族窒化物半導体レーザを作製する方法
KR1020117020627A KR101269315B1 (ko) 2009-02-17 2009-12-25 Ⅲ족 질화물 반도체 레이저 및 ⅲ족 질화물 반도체 레이저를 제작하는 방법
EP09840443A EP2400604A1 (en) 2009-02-17 2009-12-25 Iii nitride semiconductor laser and method for manufacturing iii nitride semiconductor laser
CN2009801569816A CN102318152B (zh) 2009-02-17 2009-12-25 Ⅲ族氮化物半导体激光器及ⅲ族氮化物半导体激光器的制作方法
TW098146573A TW201034325A (en) 2009-02-17 2009-12-31 Iii nitride semiconductor laser and method for manufacturing iii nitride semiconductor laser
US13/211,858 US8548021B2 (en) 2009-02-17 2011-08-17 III-nitride semiconductor laser, and method for fabricating III-nitride semiconductor laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009034004A JP4775455B2 (ja) 2009-02-17 2009-02-17 Iii族窒化物半導体レーザ、及びiii族窒化物半導体レーザを作製する方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011146085A Division JP2011188000A (ja) 2011-06-30 2011-06-30 Iii族窒化物半導体レーザ、及びiii族窒化物半導体レーザを作製する方法

Publications (3)

Publication Number Publication Date
JP2010192594A JP2010192594A (ja) 2010-09-02
JP2010192594A5 true JP2010192594A5 (enExample) 2011-06-23
JP4775455B2 JP4775455B2 (ja) 2011-09-21

Family

ID=42633632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009034004A Expired - Fee Related JP4775455B2 (ja) 2009-02-17 2009-02-17 Iii族窒化物半導体レーザ、及びiii族窒化物半導体レーザを作製する方法

Country Status (7)

Country Link
US (1) US8548021B2 (enExample)
EP (1) EP2400604A1 (enExample)
JP (1) JP4775455B2 (enExample)
KR (1) KR101269315B1 (enExample)
CN (1) CN102318152B (enExample)
TW (1) TW201034325A (enExample)
WO (1) WO2010095340A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7933303B2 (en) 2009-06-17 2011-04-26 Sumitomo Electric Industries, Ltd. Group-III nitride semiconductor laser device, and method for fabricating group-III nitride semiconductor laser device
JP5206699B2 (ja) 2010-01-18 2013-06-12 住友電気工業株式会社 Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法
JP2011018784A (ja) * 2009-07-09 2011-01-27 Sony Corp 半導体レーザ素子及びその駆動方法、並びに、半導体レーザ装置
JP2011023537A (ja) * 2009-07-15 2011-02-03 Sumitomo Electric Ind Ltd Iii族窒化物半導体素子、エピタキシャル基板、及びiii族窒化物半導体素子を作製する方法
TWI560963B (en) * 2010-03-04 2016-12-01 Univ California Semi-polar iii-nitride optoelectronic devices on m-plane substrates with miscuts less than +/- 15 degrees in the c-direction
US8189639B2 (en) * 2010-05-28 2012-05-29 Corning Incorporated GaN-based laser diodes with misfit dislocations displaced from the active region
JP5139555B2 (ja) * 2011-04-22 2013-02-06 住友電気工業株式会社 窒化物半導体レーザ、及びエピタキシャル基板
CN102227046A (zh) * 2011-05-25 2011-10-26 北京化工大学 一种氮化镓基半导体激光器及其制作方法
US20130100978A1 (en) * 2011-10-24 2013-04-25 The Regents Of The University Of California Hole blocking layer for the prevention of hole overflow and non-radiative recombination at defects outside the active region
WO2015190171A1 (ja) * 2014-06-10 2015-12-17 ソニー株式会社 半導体光デバイス及びその製造方法並びに半導体光デバイス組立体
KR102390624B1 (ko) 2015-06-05 2022-04-26 오스텐도 테크놀로지스 인코포레이티드 다수의 활성층들로 선택적으로 캐리어를 주입한 발광 구조체
US10396240B2 (en) * 2015-10-08 2019-08-27 Ostendo Technologies, Inc. III-nitride semiconductor light emitting device having amber-to-red light emission (>600 nm) and a method for making same
DE112019003671T5 (de) 2018-07-20 2021-04-08 Sony Semiconductor Solutions Corporation Halbleiterlichtemissionselement
JP7422496B2 (ja) * 2019-06-21 2024-01-26 古河機械金属株式会社 構造体、光デバイス、光デバイスの製造方法、構造体の製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3206316B2 (ja) * 1994-08-12 2001-09-10 松下電器産業株式会社 半導体レーザ
JP2005072368A (ja) 2003-08-26 2005-03-17 Sony Corp 半導体発光素子、半導体レーザ素子、及び画像表示装置
US7408199B2 (en) * 2004-04-02 2008-08-05 Nichia Corporation Nitride semiconductor laser device and nitride semiconductor device
US7751455B2 (en) * 2004-12-14 2010-07-06 Palo Alto Research Center Incorporated Blue and green laser diodes with gallium nitride or indium gallium nitride cladding laser structure
JP5113446B2 (ja) * 2006-08-11 2013-01-09 三洋電機株式会社 半導体素子およびその製造方法
WO2008100504A1 (en) 2007-02-12 2008-08-21 The Regents Of The University Of California Cleaved facet (ga,al,in)n edge-emitting laser diodes grown on semipolar {11-2n} bulk gallium nitride substrates
JP2009016684A (ja) * 2007-07-06 2009-01-22 Nichia Corp 半導体レーザ素子
JP2009021346A (ja) 2007-07-11 2009-01-29 Rohm Co Ltd 半導体発光素子
JP5286723B2 (ja) * 2007-09-14 2013-09-11 国立大学法人京都大学 窒化物半導体レーザ素子

Similar Documents

Publication Publication Date Title
JP2010192594A5 (enExample)
JP5972798B2 (ja) C方向において+/−15度より少ないミスカットを有するm面基板上の半極性iii族窒化物光電子デバイス
JP5512046B2 (ja) 窒化物半導体層成長用構造、積層構造、窒化物系半導体素子および光源ならびにこれらの製造方法
JP4924185B2 (ja) 窒化物半導体発光素子
US8513684B2 (en) Nitride semiconductor light emitting device
CN102177593A (zh) 氮化镓系半导体发光元件、制作氮化镓系半导体发光元件的方法、氮化镓系发光二极管、外延晶片及制作氮化镓系发光二极管的方法
JP2013544027A (ja) 基板およびエピ層パターン化によるiii族窒化物ヘテロ構造歪み緩和制限
US20120027039A1 (en) Group-iii nitride semiconductor laser device, and method for fabricating group-iii nitride semiconductor laser device
JP2008198952A (ja) Iii族窒化物半導体発光素子
TW201246737A (en) Iii-nitride semiconductor laser device and method for fabricating iii-nitride semiconductor laser device
JP2003092426A (ja) 窒化物系化合物半導体発光素子およびその製造方法
KR20090023672A (ko) ZnO계 반도체 소자
JP2010529943A (ja) ミスカット基板上に成長したプレーナ無極性m平面III族窒化物薄膜
WO2012058262A2 (en) Vicinal semipolar iii-nitride substrates to compensate tilt of relaxed hetero-epitaxial layers
CN103026561A (zh) 具有偏离有源区的错配位错的GaN基激光二极管
CN103890243A (zh) 通过非-c-面(In,Al,B,Ga)N上的有限区域外延抑制弛豫
CN101889347A (zh) ZnO系半导体元件
JP2009239084A (ja) 半導体レーザ素子
US20130322481A1 (en) Laser diodes including substrates having semipolar surface plane orientations and nonpolar cleaved facets
JP2012015555A5 (enExample)
WO2013015170A1 (ja) Iii族窒化物半導体レーザ素子
JP2012023396A5 (enExample)
JP2012044228A5 (ja) Iii族窒化物半導体レーザ
JP2011146651A (ja) Iii族窒化物発光ダイオード
JP2008117966A (ja) 半導体レーザ及びその製造方法