JP2010192594A5 - - Google Patents
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- Publication number
- JP2010192594A5 JP2010192594A5 JP2009034004A JP2009034004A JP2010192594A5 JP 2010192594 A5 JP2010192594 A5 JP 2010192594A5 JP 2009034004 A JP2009034004 A JP 2009034004A JP 2009034004 A JP2009034004 A JP 2009034004A JP 2010192594 A5 JP2010192594 A5 JP 2010192594A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- group iii
- iii nitride
- nitride semiconductor
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 40
- 150000004767 nitrides Chemical class 0.000 claims 28
- 238000005253 cladding Methods 0.000 claims 18
- 229910002601 GaN Inorganic materials 0.000 claims 7
- 230000004888 barrier function Effects 0.000 claims 6
- 238000000034 method Methods 0.000 claims 6
- 239000000758 substrate Substances 0.000 claims 6
- 230000010287 polarization Effects 0.000 claims 5
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims 4
- 230000005684 electric field Effects 0.000 claims 4
- 229910052738 indium Inorganic materials 0.000 claims 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 4
- 238000003776 cleavage reaction Methods 0.000 claims 2
- 238000005136 cathodoluminescence Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 230000010355 oscillation Effects 0.000 claims 1
- 230000007017 scission Effects 0.000 claims 1
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009034004A JP4775455B2 (ja) | 2009-02-17 | 2009-02-17 | Iii族窒化物半導体レーザ、及びiii族窒化物半導体レーザを作製する方法 |
| PCT/JP2009/071661 WO2010095340A1 (ja) | 2009-02-17 | 2009-12-25 | Iii族窒化物半導体レーザ、及びiii族窒化物半導体レーザを作製する方法 |
| KR1020117020627A KR101269315B1 (ko) | 2009-02-17 | 2009-12-25 | Ⅲ족 질화물 반도체 레이저 및 ⅲ족 질화물 반도체 레이저를 제작하는 방법 |
| EP09840443A EP2400604A1 (en) | 2009-02-17 | 2009-12-25 | Iii nitride semiconductor laser and method for manufacturing iii nitride semiconductor laser |
| CN2009801569816A CN102318152B (zh) | 2009-02-17 | 2009-12-25 | Ⅲ族氮化物半导体激光器及ⅲ族氮化物半导体激光器的制作方法 |
| TW098146573A TW201034325A (en) | 2009-02-17 | 2009-12-31 | Iii nitride semiconductor laser and method for manufacturing iii nitride semiconductor laser |
| US13/211,858 US8548021B2 (en) | 2009-02-17 | 2011-08-17 | III-nitride semiconductor laser, and method for fabricating III-nitride semiconductor laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009034004A JP4775455B2 (ja) | 2009-02-17 | 2009-02-17 | Iii族窒化物半導体レーザ、及びiii族窒化物半導体レーザを作製する方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011146085A Division JP2011188000A (ja) | 2011-06-30 | 2011-06-30 | Iii族窒化物半導体レーザ、及びiii族窒化物半導体レーザを作製する方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010192594A JP2010192594A (ja) | 2010-09-02 |
| JP2010192594A5 true JP2010192594A5 (enExample) | 2011-06-23 |
| JP4775455B2 JP4775455B2 (ja) | 2011-09-21 |
Family
ID=42633632
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009034004A Expired - Fee Related JP4775455B2 (ja) | 2009-02-17 | 2009-02-17 | Iii族窒化物半導体レーザ、及びiii族窒化物半導体レーザを作製する方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8548021B2 (enExample) |
| EP (1) | EP2400604A1 (enExample) |
| JP (1) | JP4775455B2 (enExample) |
| KR (1) | KR101269315B1 (enExample) |
| CN (1) | CN102318152B (enExample) |
| TW (1) | TW201034325A (enExample) |
| WO (1) | WO2010095340A1 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7933303B2 (en) | 2009-06-17 | 2011-04-26 | Sumitomo Electric Industries, Ltd. | Group-III nitride semiconductor laser device, and method for fabricating group-III nitride semiconductor laser device |
| JP5206699B2 (ja) | 2010-01-18 | 2013-06-12 | 住友電気工業株式会社 | Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法 |
| JP2011018784A (ja) * | 2009-07-09 | 2011-01-27 | Sony Corp | 半導体レーザ素子及びその駆動方法、並びに、半導体レーザ装置 |
| JP2011023537A (ja) * | 2009-07-15 | 2011-02-03 | Sumitomo Electric Ind Ltd | Iii族窒化物半導体素子、エピタキシャル基板、及びiii族窒化物半導体素子を作製する方法 |
| TWI560963B (en) * | 2010-03-04 | 2016-12-01 | Univ California | Semi-polar iii-nitride optoelectronic devices on m-plane substrates with miscuts less than +/- 15 degrees in the c-direction |
| US8189639B2 (en) * | 2010-05-28 | 2012-05-29 | Corning Incorporated | GaN-based laser diodes with misfit dislocations displaced from the active region |
| JP5139555B2 (ja) * | 2011-04-22 | 2013-02-06 | 住友電気工業株式会社 | 窒化物半導体レーザ、及びエピタキシャル基板 |
| CN102227046A (zh) * | 2011-05-25 | 2011-10-26 | 北京化工大学 | 一种氮化镓基半导体激光器及其制作方法 |
| US20130100978A1 (en) * | 2011-10-24 | 2013-04-25 | The Regents Of The University Of California | Hole blocking layer for the prevention of hole overflow and non-radiative recombination at defects outside the active region |
| WO2015190171A1 (ja) * | 2014-06-10 | 2015-12-17 | ソニー株式会社 | 半導体光デバイス及びその製造方法並びに半導体光デバイス組立体 |
| KR102390624B1 (ko) | 2015-06-05 | 2022-04-26 | 오스텐도 테크놀로지스 인코포레이티드 | 다수의 활성층들로 선택적으로 캐리어를 주입한 발광 구조체 |
| US10396240B2 (en) * | 2015-10-08 | 2019-08-27 | Ostendo Technologies, Inc. | III-nitride semiconductor light emitting device having amber-to-red light emission (>600 nm) and a method for making same |
| DE112019003671T5 (de) | 2018-07-20 | 2021-04-08 | Sony Semiconductor Solutions Corporation | Halbleiterlichtemissionselement |
| JP7422496B2 (ja) * | 2019-06-21 | 2024-01-26 | 古河機械金属株式会社 | 構造体、光デバイス、光デバイスの製造方法、構造体の製造方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3206316B2 (ja) * | 1994-08-12 | 2001-09-10 | 松下電器産業株式会社 | 半導体レーザ |
| JP2005072368A (ja) | 2003-08-26 | 2005-03-17 | Sony Corp | 半導体発光素子、半導体レーザ素子、及び画像表示装置 |
| US7408199B2 (en) * | 2004-04-02 | 2008-08-05 | Nichia Corporation | Nitride semiconductor laser device and nitride semiconductor device |
| US7751455B2 (en) * | 2004-12-14 | 2010-07-06 | Palo Alto Research Center Incorporated | Blue and green laser diodes with gallium nitride or indium gallium nitride cladding laser structure |
| JP5113446B2 (ja) * | 2006-08-11 | 2013-01-09 | 三洋電機株式会社 | 半導体素子およびその製造方法 |
| WO2008100504A1 (en) | 2007-02-12 | 2008-08-21 | The Regents Of The University Of California | Cleaved facet (ga,al,in)n edge-emitting laser diodes grown on semipolar {11-2n} bulk gallium nitride substrates |
| JP2009016684A (ja) * | 2007-07-06 | 2009-01-22 | Nichia Corp | 半導体レーザ素子 |
| JP2009021346A (ja) | 2007-07-11 | 2009-01-29 | Rohm Co Ltd | 半導体発光素子 |
| JP5286723B2 (ja) * | 2007-09-14 | 2013-09-11 | 国立大学法人京都大学 | 窒化物半導体レーザ素子 |
-
2009
- 2009-02-17 JP JP2009034004A patent/JP4775455B2/ja not_active Expired - Fee Related
- 2009-12-25 CN CN2009801569816A patent/CN102318152B/zh not_active Expired - Fee Related
- 2009-12-25 WO PCT/JP2009/071661 patent/WO2010095340A1/ja not_active Ceased
- 2009-12-25 KR KR1020117020627A patent/KR101269315B1/ko not_active Expired - Fee Related
- 2009-12-25 EP EP09840443A patent/EP2400604A1/en not_active Withdrawn
- 2009-12-31 TW TW098146573A patent/TW201034325A/zh unknown
-
2011
- 2011-08-17 US US13/211,858 patent/US8548021B2/en not_active Expired - Fee Related
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