JP2010153871A5 - - Google Patents

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Publication number
JP2010153871A5
JP2010153871A5 JP2009292936A JP2009292936A JP2010153871A5 JP 2010153871 A5 JP2010153871 A5 JP 2010153871A5 JP 2009292936 A JP2009292936 A JP 2009292936A JP 2009292936 A JP2009292936 A JP 2009292936A JP 2010153871 A5 JP2010153871 A5 JP 2010153871A5
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optical system
output beam
facet
target area
region
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JP2009292936A
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Japanese (ja)
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JP4951670B2 (ja
JP2010153871A (ja
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Priority claimed from US08/770,524 external-priority patent/US5850300A/en
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JP2009292936A 1996-12-20 2009-12-24 ビームホモジェナイザ Expired - Lifetime JP4951670B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/770,524 1996-12-20
US08/770,524 US5850300A (en) 1994-02-28 1996-12-20 Diffractive beam homogenizer having free-form fringes

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP52903698A Division JP4787944B2 (ja) 1996-12-20 1997-12-19 ビームホモジェナイザ

Publications (3)

Publication Number Publication Date
JP2010153871A JP2010153871A (ja) 2010-07-08
JP2010153871A5 true JP2010153871A5 (enExample) 2011-08-04
JP4951670B2 JP4951670B2 (ja) 2012-06-13

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JP52903698A Expired - Lifetime JP4787944B2 (ja) 1996-12-20 1997-12-19 ビームホモジェナイザ
JP2007014833A Pending JP2007150345A (ja) 1996-12-20 2007-01-25 リソグラフィシステムで用いられるビーム成形部品
JP2009292936A Expired - Lifetime JP4951670B2 (ja) 1996-12-20 2009-12-24 ビームホモジェナイザ

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Application Number Title Priority Date Filing Date
JP52903698A Expired - Lifetime JP4787944B2 (ja) 1996-12-20 1997-12-19 ビームホモジェナイザ
JP2007014833A Pending JP2007150345A (ja) 1996-12-20 2007-01-25 リソグラフィシステムで用いられるビーム成形部品

Country Status (8)

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US (6) US5850300A (enExample)
EP (1) EP0946894B1 (enExample)
JP (3) JP4787944B2 (enExample)
KR (1) KR100486997B1 (enExample)
AT (1) ATE196550T1 (enExample)
AU (1) AU5617098A (enExample)
DE (1) DE69703165T2 (enExample)
WO (1) WO1998028650A1 (enExample)

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