JP2010121969A5 - - Google Patents
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- JP2010121969A5 JP2010121969A5 JP2008293669A JP2008293669A JP2010121969A5 JP 2010121969 A5 JP2010121969 A5 JP 2010121969A5 JP 2008293669 A JP2008293669 A JP 2008293669A JP 2008293669 A JP2008293669 A JP 2008293669A JP 2010121969 A5 JP2010121969 A5 JP 2010121969A5
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- 239000000758 substrate Substances 0.000 claims 18
- 238000007689 inspection Methods 0.000 claims 8
- 239000000523 sample Substances 0.000 claims 3
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008293669A JP5300431B2 (ja) | 2008-11-17 | 2008-11-17 | 被検査基板のアライメント装置 |
| KR1020090090814A KR101013110B1 (ko) | 2008-11-17 | 2009-09-25 | 피검사기판의 얼라인먼트 장치 |
| TW098133718A TWI396246B (zh) | 2008-11-17 | 2009-10-05 | 被檢查基板的對準裝置 |
| CN2009102094036A CN101739923B (zh) | 2008-11-17 | 2009-10-27 | 被检查基板的对准装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008293669A JP5300431B2 (ja) | 2008-11-17 | 2008-11-17 | 被検査基板のアライメント装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010121969A JP2010121969A (ja) | 2010-06-03 |
| JP2010121969A5 true JP2010121969A5 (enrdf_load_stackoverflow) | 2011-08-11 |
| JP5300431B2 JP5300431B2 (ja) | 2013-09-25 |
Family
ID=42279817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008293669A Active JP5300431B2 (ja) | 2008-11-17 | 2008-11-17 | 被検査基板のアライメント装置 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5300431B2 (enrdf_load_stackoverflow) |
| KR (1) | KR101013110B1 (enrdf_load_stackoverflow) |
| CN (1) | CN101739923B (enrdf_load_stackoverflow) |
| TW (1) | TWI396246B (enrdf_load_stackoverflow) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI416144B (zh) * | 2011-05-06 | 2013-11-21 | Fu Lai Yao | The method and device for detecting the touch point of the substrate line with the probe |
| KR101155961B1 (ko) * | 2011-11-17 | 2012-06-18 | 에스엔티코리아 주식회사 | 컨베이어가 1축을 대체한 2축 구동 검사장치 |
| JP6184301B2 (ja) * | 2013-11-14 | 2017-08-23 | 株式会社日本マイクロニクス | 検査装置 |
| KR101616564B1 (ko) * | 2014-09-24 | 2016-04-29 | 주식회사 디이엔티 | 프로브 이동장치 |
| CN104459439B (zh) * | 2014-12-08 | 2019-02-19 | 昆山精讯电子技术有限公司 | 触摸屏的自动检测设备 |
| CN106370656B (zh) * | 2015-07-23 | 2019-03-05 | 旭东机械工业股份有限公司 | 自动化显微取像设备及取像方法 |
| US10261124B2 (en) | 2015-12-28 | 2019-04-16 | Celadon Systems, Inc. | Modular rail systems, rail systems, mechanisms, and equipment for devices under test |
| US10324112B2 (en) * | 2016-08-11 | 2019-06-18 | Intel Corporation | Package testing system and method with contact alignment |
| CN106249449B (zh) * | 2016-08-29 | 2019-07-23 | 武汉华星光电技术有限公司 | 防夹碎基板对位装置 |
| CN108242410B (zh) * | 2018-01-04 | 2020-05-19 | 苏州德睿联自动化科技有限公司 | 电池串检测校正装置及方法 |
| CN111742233B (zh) * | 2018-02-26 | 2023-06-09 | 雅马哈精密科技株式会社 | 定位装置及定位方法 |
| JP6956030B2 (ja) * | 2018-02-28 | 2021-10-27 | 東京エレクトロン株式会社 | 検査システム |
| US11468590B2 (en) * | 2018-04-24 | 2022-10-11 | Cyberoptics Corporation | Wireless substrate-like teaching sensor for semiconductor processing |
| IT201800010440A1 (it) * | 2018-11-20 | 2020-05-20 | Nuova Sima Spa | Dispositivo di raddrizzamento per raddrizzare un articolo lastriforme rispetto ad una direzione di movimentazione |
| CN110320686B (zh) * | 2019-07-15 | 2023-07-25 | 中导光电设备股份有限公司 | Uled屏幕基板检测/测量设备的预对位装置及其使用方法 |
| CN111999919B (zh) * | 2020-08-31 | 2023-05-05 | 晟光科技股份有限公司 | 一种lcd显示屏定位检测机构 |
| CN112720384B (zh) * | 2020-12-21 | 2022-08-26 | 苏州科韵激光科技有限公司 | 显示面板对准装置和显示面板对准方法 |
| KR102591202B1 (ko) * | 2021-03-26 | 2023-10-19 | (주)지엠더블유 | 자동 위치설정 기능을 구비한 무선기기 검사장치 |
| CN114536480B (zh) * | 2022-03-02 | 2023-05-23 | 重庆天荣日盛家居科技有限公司 | 多工位木质家居板材切割设备 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0817194B2 (ja) * | 1987-09-29 | 1996-02-21 | 東京エレクトロン株式会社 | 液晶表示体プローブ装置及び液晶表示体の位置合わせ方法 |
| KR100222614B1 (ko) * | 1997-08-20 | 1999-10-01 | 윤종용 | 액정 표시판의 위치 결정 장치 |
| JPH11304884A (ja) * | 1998-04-24 | 1999-11-05 | Micronics Japan Co Ltd | 大型回路板用プローバ |
| JP2001050858A (ja) * | 1999-08-04 | 2001-02-23 | Micronics Japan Co Ltd | 表示用パネル基板の検査装置 |
| US20020042664A1 (en) * | 2000-05-31 | 2002-04-11 | Nikon Corporation | Evaluation method, position detection method, exposure method and device manufacturing method, and exposure apparatus |
| KR100488535B1 (ko) * | 2002-07-20 | 2005-05-11 | 엘지.필립스 엘시디 주식회사 | 액정토출장치 및 토출방법 |
| KR100960472B1 (ko) * | 2003-12-16 | 2010-05-28 | 엘지디스플레이 주식회사 | 액정 표시패널의 제조장치 및 그 제조방법 |
| US8982320B2 (en) * | 2004-08-19 | 2015-03-17 | Nikon Corporation | Alignment information display method and its program, alignment method, exposure method, device production process, display system, display device, and program and measurement/inspection system |
| JP4395429B2 (ja) * | 2004-10-20 | 2010-01-06 | 日本発條株式会社 | コンタクトユニットおよびコンタクトユニットを用いた検査システム |
| JP2006240015A (ja) * | 2005-03-02 | 2006-09-14 | Dainippon Printing Co Ltd | パターン形成装置、アライメント装置、基板処理装置、パターン形成方法、基板処理方法 |
| JP2006245174A (ja) * | 2005-03-02 | 2006-09-14 | Dainippon Printing Co Ltd | 位置決めステージ、パターン形成装置、検査装置、位置補正方法、基板支持部 |
| JP5061904B2 (ja) * | 2005-10-28 | 2012-10-31 | 株式会社ニコン | デバイス製造処理装置間の接続装置及び接続方法、プログラム、デバイス製造処理システム、露光装置及び露光方法、並びに測定検査装置及び測定検査方法 |
| JP4808135B2 (ja) | 2006-11-09 | 2011-11-02 | 株式会社日本マイクロニクス | プローブ位置合わせ方法及び可動式プローブユニット機構並びに検査装置 |
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2008
- 2008-11-17 JP JP2008293669A patent/JP5300431B2/ja active Active
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2009
- 2009-09-25 KR KR1020090090814A patent/KR101013110B1/ko active Active
- 2009-10-05 TW TW098133718A patent/TWI396246B/zh active
- 2009-10-27 CN CN2009102094036A patent/CN101739923B/zh active Active