JP2010028104A - 配線基板及びその製造方法、並びに半導体装置及びその製造方法 - Google Patents
配線基板及びその製造方法、並びに半導体装置及びその製造方法 Download PDFInfo
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- JP2010028104A JP2010028104A JP2009138840A JP2009138840A JP2010028104A JP 2010028104 A JP2010028104 A JP 2010028104A JP 2009138840 A JP2009138840 A JP 2009138840A JP 2009138840 A JP2009138840 A JP 2009138840A JP 2010028104 A JP2010028104 A JP 2010028104A
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Classifications
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- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1262—Multistep manufacturing methods with a particular formation, treatment or coating of the substrate
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- G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
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- G06K19/077—Constructional details, e.g. mounting of circuits in the carrier
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- G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
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- G06K19/0775—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card arrangements for connecting the integrated circuit to the antenna
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- H—ELECTRICITY
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Abstract
【解決手段】シート状繊維体の両面に、該シート状繊維体の内部まで含浸した有機樹脂層と、前記有機樹脂層を溶解し前記シ−ト状繊維体に含浸した貫通配線を有し、前記貫通配線は、前記シート状繊維体を挟んで前記有機樹脂層の両面に露出している配線基板及びその作製方法、並びに、さらに、絶縁層の表面にバンプが露出した集積回路チップとを有し、前記バンプが前記貫通配線と接触するように、前記集積回路チップが前記樹脂含浸繊維体複合基板に密接している半導体装置及びその作製方法に関する。
【選択図】図2
Description
本実施の形態では、配線基板の構成と、その作製方法について、図1(A)〜図1(B)、図2(A)〜図2(C)、を用いて説明する。
本実施の形態では、貫通配線が設けられた樹脂含浸繊維体複合基板を用いた半導体装置の構成と、その作製方法について、図3(A)〜図3(D)、図4(A)〜図4(E)、図5(A)〜図5(D)、図6(A)〜図6(E)、図9(A)〜図9(B)を用いて説明する。
本実施の形態では、実施の形態1及び実施の形態2を、RFIDタグの外付けアンテナとの接続、あるいは外付けアンテナそのものに応用した例を、図10(A)〜図10(C)、図11(A)〜図11(G)を用いて説明する。
52a 薄膜トランジスタ
52b 薄膜トランジスタ
53a 不純物領域
53b 不純物領域
54 ゲート絶縁層
55a ゲート電極
55b ゲート電極
56 絶縁層
57a 配線
57b 配線
58a 配線
58b 配線
61 素子層
62 記憶素子
63a チャネル形成領域
63b チャネル形成領域
64 トンネル酸化層
65 絶縁膜
66 絶縁膜
67 絶縁膜
71 素子層
72 フォトダイオード
73 受光部
74 電極
81 素子層
83 アンテナ
84 電極
91 チャネル形成領域
92 不純物領域
93 フローティングゲート
94 コントロール絶縁層
95 コントロールゲート
97 配線
98 配線
101 導電性樹脂
102 配線
111 基板
112 剥離層
113 シート状繊維体
113a 経糸
113b 緯糸
113c バスケットホール
114 有機樹脂
120 構造体
120a 構造体
120b 構造体
122 レーザビーム
123 溝
201 基板
202 半導体回路部
203 電極パッド
204 導電性樹脂
211 表面構造体
212 裏面構造体
213 領域
221 外付けアンテナ用フィルム
222 外付けアンテナ
223 導電性接着材
231 外付けアンテナ用構造体
232 外付けアンテナ
Claims (12)
- シート状繊維体の両面に、該シート状繊維体の内部まで含浸した有機樹脂層と、
前記有機樹脂層を溶解し前記シ−ト状繊維体に含浸した貫通配線を有し、
前記貫通配線は、前記シート状繊維体を挟んで前記有機樹脂層の両面に露出していることを特徴とする配線基板。 - 請求項1において、
前記シート状繊維体は、ガラス繊維を有していることを特徴とする配線基板。 - 請求項1または請求項2において、
前記貫通配線は金属粒子を有し、
前記金属粒子は、銅(Cu)、銀(Ag)、ニッケル(Ni)、金(Au)、白金(Pt)、パラジウム(Pd)、タンタル(Ta)、モリブデン(Mo)、チタン(Ti)、スズ(Sn)のいずれかを含むことを特徴とする配線基板。 - シート状繊維体に、有機樹脂層を含浸させ、
前記有機樹脂層の一部の領域上に、金属粒子を有する導電性樹脂を配置し、前記導電性樹脂が前記有機樹脂層を溶解し、前記金属粒子が前記シート状繊維体の間を移動して貫通配線を形成することを特徴とする配線基板の作製方法。 - 請求項4において、
前記シート状繊維体は、ガラス繊維を有していることを特徴とする配線基板の作製方法。 - 請求項4または請求項5において、
前記金属粒子は、銅(Cu)、銀(Ag)、ニッケル(Ni)、金(Au)、白金(Pt)、パラジウム(Pd)、タンタル(Ta)、モリブデン(Mo)、チタン(Ti)、スズ(Sn)のいずれかを含むことを特徴とする配線基板の作製方法。 - シート状繊維体の両面に、該シート状繊維体の内部まで含浸した有機樹脂層と、
前記有機樹脂層を溶解し前記シ−ト状繊維体に含浸した貫通配線を有し、
前記貫通配線は、前記シート状繊維体を挟んで前記有機樹脂層の両面に露出している樹脂含浸繊維体複合基板と、
絶縁層の表面に配線が露出した集積回路チップとを有し、
前記配線が前記貫通配線と接触するように、前記集積回路チップが前記樹脂含浸繊維体複合基板に密接していることを特徴とする半導体装置。 - 請求項7において、
前記シート状繊維体は、ガラス繊維を有していることを特徴とする半導体装置。 - 請求項7または請求項8において、
前記導電性樹脂は金属粒子を有し、
前記金属粒子は、銅(Cu)、銀(Ag)、ニッケル(Ni)、金(Au)、白金(Pt)、パラジウム(Pd)、タンタル(Ta)、モリブデン(Mo)、チタン(Ti)、スズ(Sn)のいずれかを含むことを特徴とする半導体装置。 - 絶縁層の表面に配線が露出した集積回路チップを形成し、
シート状繊維体に、有機樹脂層を含浸させ、
前記有機樹脂層の一部の領域上に、金属粒子を有する導電性樹脂を配置し、前記導電性樹脂が前記有機樹脂層を溶かし、前記金属粒子が前記シート状繊維体の間を移動して、前記配線と接触する貫通配線を形成することを特徴とする半導体装置の作製方法。 - 請求項10において、
前記シート状繊維体は、ガラス繊維を有していることを特徴とする半導体装置の作製方法。 - 請求項10または請求項11において、
前記金属粒子は、銅(Cu)、銀(Ag)、ニッケル(Ni)、金(Au)、白金(Pt)、パラジウム(Pd)、タンタル(Ta)、モリブデン(Mo)、チタン(Ti)、スズ(Sn)のいずれかを含むことを特徴とする半導体装置の作製方法。
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JP2016042588A (ja) * | 2008-04-25 | 2016-03-31 | 株式会社半導体エネルギー研究所 | 半導体装置 |
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JP2012186242A (ja) * | 2011-03-04 | 2012-09-27 | Railway Technical Research Institute | 放熱基板 |
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JP2016183328A (ja) * | 2014-07-28 | 2016-10-20 | 東邦テナックス株式会社 | プリプレグおよび繊維強化複合材料 |
US10544274B2 (en) | 2014-07-28 | 2020-01-28 | Toho Tenax Co., Ltd. | Prepreg and fiber-reinforced composite material |
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WO2018123977A1 (ja) * | 2016-12-28 | 2018-07-05 | 株式会社フジクラ | 配線基板及び配線基板の製造方法 |
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TW201013870A (en) | 2010-04-01 |
US8555497B2 (en) | 2013-10-15 |
US20090314527A1 (en) | 2009-12-24 |
CN101609827A (zh) | 2009-12-23 |
JP5473413B2 (ja) | 2014-04-16 |
CN101609827B (zh) | 2014-01-01 |
TWI487077B (zh) | 2015-06-01 |
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