JP2010028067A - 印刷回路基板の製造方法及びその製造装置 - Google Patents
印刷回路基板の製造方法及びその製造装置 Download PDFInfo
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- JP2010028067A JP2010028067A JP2008248384A JP2008248384A JP2010028067A JP 2010028067 A JP2010028067 A JP 2010028067A JP 2008248384 A JP2008248384 A JP 2008248384A JP 2008248384 A JP2008248384 A JP 2008248384A JP 2010028067 A JP2010028067 A JP 2010028067A
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0008—Apparatus or processes for manufacturing printed circuits for aligning or positioning of tools relative to the circuit board
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
- H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0266—Marks, test patterns or identification means
- H05K1/0269—Marks, test patterns or identification means for visual or optical inspection
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/095—Conductive through-holes or vias
- H05K2201/09563—Metal filled via
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
- H05K2201/09918—Optically detected marks used for aligning tool relative to the PCB, e.g. for mounting of components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/13—Moulding and encapsulation; Deposition techniques; Protective layers
- H05K2203/1377—Protective layers
- H05K2203/1394—Covering open PTHs, e.g. by dry film resist or by metal disc
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0005—Apparatus or processes for manufacturing printed circuits for designing circuits by computer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/108—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/421—Blind plated via connections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/425—Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern
- H05K3/426—Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern initial plating of through-holes in substrates without metal
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/429—Plated through-holes specially for multilayer circuits, e.g. having connections to inner circuit layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Abstract
【解決手段】コンタクトホールが設けられた絶縁層110と、該コンタクトホールを含む該絶縁層110上に配設された導電層150と、該導電層150上に配設された感光性層160とを備える基板100を提供し、該コンタクトホールの位置に対応する第1の位置データを生成し、該第1の位置データと設計上のパッド位置に対応する第2の位置データとの間の誤差に対応する位置補正データを生成し、該位置補正データに基づいて、該感光性層に露光及び現像工程を行って感光性パターンを設け、該感光性パターンに従ってパッドを設ける。
【選択図】図1
Description
110a 絶縁層
110b 内部絶縁層
120 内部回路パターン
130 内部パッド
160 感光性層
162 感光性パターン
170 回路パターン
180、190 パッド
310 イメージセンサ
320 制御部
330 露光部
Claims (8)
- コンタクトホールが設けられた絶縁層と、該コンタクトホールを含む前記絶縁層上に配設された導電層と、前記導電層上に配設された感光性層とを備える基板を提供するステップと、
前記コンタクトホールの位置に対応する第1の位置データを生成するステップと、
前記第1の位置データと設計上のパッド位置に対応する第2の位置データとの間の誤差に対応する位置補正データを生成するステップと、
前記位置補正データに基づいて、前記感光性層に露光工程及び現像工程を行って感光性パターンを設けるステップと、
前記感光性パターンに従ってパッドを設けるステップと、
を含むことを特徴とする印刷回路基板の製造方法。 - 前記第1の位置データが、前記コンタクトホールの中心座標を抽出して生成されることを特徴とする請求項1に記載の印刷回路基板の製造方法。
- 前記位置補正データが、前記設計上のパッドの中心座標から前記コンタクトホールの中心座標と前記設計上のパッドの中心座標との差分だけ移動して設けられることを特徴とする請求項2に記載の印刷回路基板の製造方法。
- 前記感光性パターンに従ってパッドを設けるステップが、
前記感光性パターンを含む基板上にメッキ層を設けるステップと、
前記感光性パターンを剥離するステップと、
前記感光性パターンの下部に配設されたメッキ層をエッチングして前記パッドを設けるステップと、
を含むことを特徴とする請求項1に記載の印刷回路基板の製造方法。 - 前記感光性パターンに従ってパッドを設けるステップにおいて、前記パッドと電気的に接続された回路パターンが、さらに設けられることを特徴とする請求項1に記載の印刷回路基板の製造方法。
- 前記第1の位置データと設計上のパッド位置に対応する前記第2の位置データとの間の誤差に対応する位置補正データを生成するステップにて、
前記位置補正データによって前記パッドと電気的に接続された回路パターンの位置がさらに補正されることを特徴とする請求項1に記載の印刷回路基板の製造方法。 - 前記コンタクトホールが、ビアホールまたは貫通孔であることを特徴とする請求項1に記載の印刷回路基板の製造方法。
- 基板に設けられたコンタクトホールの位置を認識し、第1の位置データを生成するイメージセンサと、
前記第1の位置データと設計上のパッド位置に対応する第2の位置データとの間の誤差に対応する位置補正データを生成する制御部と、
前記位置補正データに従って露光を行う露光部と、
を備えることを特徴とする印刷回路基板の製造装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080071035A KR100975924B1 (ko) | 2008-07-22 | 2008-07-22 | 인쇄회로기판의 제조 방법 및 이에 사용되는 제조 장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2010028067A true JP2010028067A (ja) | 2010-02-04 |
Family
ID=41568697
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008248384A Pending JP2010028067A (ja) | 2008-07-22 | 2008-09-26 | 印刷回路基板の製造方法及びその製造装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8144972B2 (ja) |
JP (1) | JP2010028067A (ja) |
KR (1) | KR100975924B1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012507137A (ja) * | 2008-10-28 | 2012-03-22 | オルボテック・リミテッド | マルチポピュレーション変換を使用した電気回路パターン生成 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102387982B1 (ko) * | 2020-03-05 | 2022-04-19 | (주) 브로젠 | 라이다 모듈의 제조 방법 |
DE102020113134A1 (de) * | 2020-05-14 | 2021-11-18 | Skybrain Vermögensverwaltungs Gmbh | Bearbeitungsstation und Verfahren zur Bearbeitung von Werkstücken |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1048835A (ja) * | 1996-08-06 | 1998-02-20 | Ibiden Co Ltd | プリント配線板の製造装置及び製造方法 |
JP2005057077A (ja) * | 2003-08-05 | 2005-03-03 | Shinko Electric Ind Co Ltd | 配線基板の製造方法 |
JP2005208297A (ja) * | 2004-01-22 | 2005-08-04 | Hitachi Via Mechanics Ltd | プリント配線板の製造方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06334346A (ja) | 1993-05-18 | 1994-12-02 | Hitachi Ltd | 厚膜・薄膜混成多層配線基板のパターン形成方法 |
DE69835962T2 (de) * | 1997-12-11 | 2007-01-04 | Ibiden Co., Ltd., Ogaki | Verfahren zur herstellung einer mehrschichtigen gedruckten leiterplatte |
KR100526035B1 (ko) * | 2003-05-07 | 2005-11-08 | 홍성국 | 메탈 마스크 검사 장치 및 그의 검사 방법 |
JP2006080216A (ja) * | 2004-09-08 | 2006-03-23 | Hitachi Via Mechanics Ltd | 基板の品質評価方法および検査装置 |
KR100601465B1 (ko) * | 2004-10-05 | 2006-07-18 | 삼성전기주식회사 | 인쇄회로기판 및 그 제조방법 |
KR100882261B1 (ko) | 2007-07-25 | 2009-02-06 | 삼성전기주식회사 | 인쇄회로기판의 제조 방법 및 장치 |
-
2008
- 2008-07-22 KR KR1020080071035A patent/KR100975924B1/ko not_active IP Right Cessation
- 2008-09-17 US US12/232,460 patent/US8144972B2/en not_active Expired - Fee Related
- 2008-09-26 JP JP2008248384A patent/JP2010028067A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1048835A (ja) * | 1996-08-06 | 1998-02-20 | Ibiden Co Ltd | プリント配線板の製造装置及び製造方法 |
JP2005057077A (ja) * | 2003-08-05 | 2005-03-03 | Shinko Electric Ind Co Ltd | 配線基板の製造方法 |
JP2005208297A (ja) * | 2004-01-22 | 2005-08-04 | Hitachi Via Mechanics Ltd | プリント配線板の製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012507137A (ja) * | 2008-10-28 | 2012-03-22 | オルボテック・リミテッド | マルチポピュレーション変換を使用した電気回路パターン生成 |
US8769471B2 (en) | 2008-10-28 | 2014-07-01 | Orbotech Ltd. | Producing electrical circuit patterns using multi-population transformation |
Also Published As
Publication number | Publication date |
---|---|
US8144972B2 (en) | 2012-03-27 |
KR20100010165A (ko) | 2010-02-01 |
US20100021045A1 (en) | 2010-01-28 |
KR100975924B1 (ko) | 2010-08-13 |
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