JP2009542174A5 - - Google Patents

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Publication number
JP2009542174A5
JP2009542174A5 JP2009515994A JP2009515994A JP2009542174A5 JP 2009542174 A5 JP2009542174 A5 JP 2009542174A5 JP 2009515994 A JP2009515994 A JP 2009515994A JP 2009515994 A JP2009515994 A JP 2009515994A JP 2009542174 A5 JP2009542174 A5 JP 2009542174A5
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JP
Japan
Prior art keywords
tilting device
planar
pair
planar element
flat
Prior art date
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Application number
JP2009515994A
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English (en)
Japanese (ja)
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JP2009542174A (ja
JP5421771B2 (ja
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Publication date
Priority claimed from US11/472,325 external-priority patent/US7598688B2/en
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Publication of JP2009542174A publication Critical patent/JP2009542174A/ja
Publication of JP2009542174A5 publication Critical patent/JP2009542174A5/ja
Application granted granted Critical
Publication of JP5421771B2 publication Critical patent/JP5421771B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2009515994A 2006-06-22 2007-06-20 ティルティング装置 Active JP5421771B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/472,325 2006-06-22
US11/472,325 US7598688B2 (en) 2006-06-22 2006-06-22 Tilting device
PCT/IB2007/003529 WO2008023272A2 (en) 2006-06-22 2007-06-20 Tilting device

Publications (3)

Publication Number Publication Date
JP2009542174A JP2009542174A (ja) 2009-11-26
JP2009542174A5 true JP2009542174A5 (enExample) 2010-08-12
JP5421771B2 JP5421771B2 (ja) 2014-02-19

Family

ID=39027816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009515994A Active JP5421771B2 (ja) 2006-06-22 2007-06-20 ティルティング装置

Country Status (8)

Country Link
US (1) US7598688B2 (enExample)
EP (1) EP2030069A4 (enExample)
JP (1) JP5421771B2 (enExample)
KR (1) KR101427432B1 (enExample)
CN (1) CN101563638B (enExample)
IL (1) IL195388A (enExample)
TW (1) TWI456368B (enExample)
WO (1) WO2008023272A2 (enExample)

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JP5818981B2 (ja) * 2011-06-17 2015-11-18 アバリスキャン ゲーエムベーハー 位置決め装置及びビームを方向付けるためのシステム
US9765920B2 (en) 2011-06-17 2017-09-19 Abariscan Gmbh Positioning apparatus and system for directing a beam
CN102313966B (zh) * 2011-09-06 2013-04-17 中国科学院长春光学精密机械与物理研究所 一种刚性承载式快速控制反射镜
CN102323656B (zh) * 2011-09-28 2013-03-20 哈尔滨工业大学 基于双轴柔性铰链的高频响二维微角摆控制反射镜
JP2013083553A (ja) * 2011-10-11 2013-05-09 Sony Corp 情報処理装置、情報処理方法、及びプログラム
DE102012214232A1 (de) * 2012-08-10 2013-08-14 Carl Zeiss Smt Gmbh Spiegellagerung für spiegel einer projektionsbelichtungsanlage
CN102928956A (zh) * 2012-11-26 2013-02-13 中国科学院长春光学精密机械与物理研究所 一种小型化刚性承载式快速反射镜
DE102013211310A1 (de) * 2013-06-17 2014-12-18 Carl Zeiss Smt Gmbh EUV-Abbildungsvorrichtung
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DE102013114822B3 (de) * 2013-12-23 2014-11-20 Ernst-Abbe-Fachhochschule Jena Zweiachsige Kippvorrichtung
WO2015112775A1 (en) * 2014-01-22 2015-07-30 Swift Control Systems, Inc. A smart mirror mount device
EP3006975A3 (en) * 2014-10-08 2016-05-25 Optotune AG Device for tilting an optical element, particularly a mirror
CN104777587B (zh) * 2015-04-20 2017-07-14 中国科学院长春光学精密机械与物理研究所 一种主镜定位安装机构
WO2017019557A1 (en) * 2015-07-24 2017-02-02 Trustees Of Boston University Mems devices for smart lighting applications
WO2017111629A1 (en) * 2015-12-23 2017-06-29 Stm Spółka Z Ograniczoną Odpowiedzialnością Bearing system for the rotary column of a pet preform blow molding machine
KR200494591Y1 (ko) * 2016-03-09 2021-11-10 오르보테크 엘티디. 광학적 처리 시스템을 위한 광학 헤드 및 섀시
TWI777945B (zh) * 2016-03-15 2022-09-21 德商阿莫瓦有限公司 用於在高架倉庫中貯存和獲取或者重排貯存品的運輸和轉移系統
DE102016212853B3 (de) * 2016-07-14 2017-11-09 Carl Zeiss Smt Gmbh Verfahren zum Justieren einer optischen Einrichtung
KR101736153B1 (ko) * 2016-12-27 2017-05-16 국방과학연구소 고속 정밀 구동을 위한 가이드 장치 및 그 가이드 장치의 설계 방법
DE102017202182A1 (de) 2017-02-10 2018-08-16 Micro-Epsilon Messtechnik Gmbh & Co. Kg Reluktanz-Aktor
CN108761772A (zh) * 2018-05-30 2018-11-06 中国科学院光电技术研究所 一种类镜框安装的框架式电调镜
CN108562992B (zh) * 2018-06-20 2024-01-19 中国人民解放军国防科技大学 一种基于柔性铰链的精密反射镜架
DE102020206843A1 (de) 2020-06-02 2021-12-02 Robert Bosch Gesellschaft mit beschränkter Haftung Vorrichtung zum Ausrichten eines Sensors oder Beleuchtungsmittels
JP7563078B2 (ja) * 2020-08-26 2024-10-08 ニデック株式会社 アクチュエータ
JP7516651B2 (ja) * 2021-02-26 2024-07-16 パイオニア株式会社 アクチュエーター
DE102021202120A1 (de) * 2021-03-04 2022-09-08 MICRO-EPSILON-MESSTECHNIK GmbH & Co. K.G. Aktor-Sensor-System und Fast Steering Mirror (FSM)

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