TWI456368B - 平面傾斜裝置 - Google Patents

平面傾斜裝置 Download PDF

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Publication number
TWI456368B
TWI456368B TW096119954A TW96119954A TWI456368B TW I456368 B TWI456368 B TW I456368B TW 096119954 A TW096119954 A TW 096119954A TW 96119954 A TW96119954 A TW 96119954A TW I456368 B TWI456368 B TW I456368B
Authority
TW
Taiwan
Prior art keywords
planar
tilting device
pair
plane
axis
Prior art date
Application number
TW096119954A
Other languages
English (en)
Chinese (zh)
Other versions
TW200809452A (en
Inventor
Yechiel Slor
Arkady Bronfman
Roni Tzubery
Dan Zemer
Original Assignee
Orbotech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orbotech Ltd filed Critical Orbotech Ltd
Publication of TW200809452A publication Critical patent/TW200809452A/zh
Application granted granted Critical
Publication of TWI456368B publication Critical patent/TWI456368B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/10—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for axial load mainly
    • F16C19/12—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for axial load mainly for supporting the end face of a shaft or other member, e.g. footstep bearings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/198—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the mirror relative to its support
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
TW096119954A 2006-06-22 2007-06-04 平面傾斜裝置 TWI456368B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/472,325 US7598688B2 (en) 2006-06-22 2006-06-22 Tilting device

Publications (2)

Publication Number Publication Date
TW200809452A TW200809452A (en) 2008-02-16
TWI456368B true TWI456368B (zh) 2014-10-11

Family

ID=39027816

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096119954A TWI456368B (zh) 2006-06-22 2007-06-04 平面傾斜裝置

Country Status (8)

Country Link
US (1) US7598688B2 (enExample)
EP (1) EP2030069A4 (enExample)
JP (1) JP5421771B2 (enExample)
KR (1) KR101427432B1 (enExample)
CN (1) CN101563638B (enExample)
IL (1) IL195388A (enExample)
TW (1) TWI456368B (enExample)
WO (1) WO2008023272A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI777945B (zh) * 2016-03-15 2022-09-21 德商阿莫瓦有限公司 用於在高架倉庫中貯存和獲取或者重排貯存品的運輸和轉移系統

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JP5818981B2 (ja) * 2011-06-17 2015-11-18 アバリスキャン ゲーエムベーハー 位置決め装置及びビームを方向付けるためのシステム
US9765920B2 (en) 2011-06-17 2017-09-19 Abariscan Gmbh Positioning apparatus and system for directing a beam
CN102313966B (zh) * 2011-09-06 2013-04-17 中国科学院长春光学精密机械与物理研究所 一种刚性承载式快速控制反射镜
CN102323656B (zh) * 2011-09-28 2013-03-20 哈尔滨工业大学 基于双轴柔性铰链的高频响二维微角摆控制反射镜
JP2013083553A (ja) * 2011-10-11 2013-05-09 Sony Corp 情報処理装置、情報処理方法、及びプログラム
DE102012214232A1 (de) * 2012-08-10 2013-08-14 Carl Zeiss Smt Gmbh Spiegellagerung für spiegel einer projektionsbelichtungsanlage
CN102928956A (zh) * 2012-11-26 2013-02-13 中国科学院长春光学精密机械与物理研究所 一种小型化刚性承载式快速反射镜
DE102013211310A1 (de) * 2013-06-17 2014-12-18 Carl Zeiss Smt Gmbh EUV-Abbildungsvorrichtung
JP6190253B2 (ja) * 2013-11-29 2017-08-30 東京パーツ工業株式会社 振動発生装置
DE102013114822B3 (de) * 2013-12-23 2014-11-20 Ernst-Abbe-Fachhochschule Jena Zweiachsige Kippvorrichtung
WO2015112775A1 (en) * 2014-01-22 2015-07-30 Swift Control Systems, Inc. A smart mirror mount device
EP3006975A3 (en) * 2014-10-08 2016-05-25 Optotune AG Device for tilting an optical element, particularly a mirror
CN104777587B (zh) * 2015-04-20 2017-07-14 中国科学院长春光学精密机械与物理研究所 一种主镜定位安装机构
WO2017019557A1 (en) * 2015-07-24 2017-02-02 Trustees Of Boston University Mems devices for smart lighting applications
WO2017111629A1 (en) * 2015-12-23 2017-06-29 Stm Spółka Z Ograniczoną Odpowiedzialnością Bearing system for the rotary column of a pet preform blow molding machine
KR200494591Y1 (ko) * 2016-03-09 2021-11-10 오르보테크 엘티디. 광학적 처리 시스템을 위한 광학 헤드 및 섀시
DE102016212853B3 (de) * 2016-07-14 2017-11-09 Carl Zeiss Smt Gmbh Verfahren zum Justieren einer optischen Einrichtung
KR101736153B1 (ko) * 2016-12-27 2017-05-16 국방과학연구소 고속 정밀 구동을 위한 가이드 장치 및 그 가이드 장치의 설계 방법
DE102017202182A1 (de) 2017-02-10 2018-08-16 Micro-Epsilon Messtechnik Gmbh & Co. Kg Reluktanz-Aktor
CN108761772A (zh) * 2018-05-30 2018-11-06 中国科学院光电技术研究所 一种类镜框安装的框架式电调镜
CN108562992B (zh) * 2018-06-20 2024-01-19 中国人民解放军国防科技大学 一种基于柔性铰链的精密反射镜架
DE102020206843A1 (de) 2020-06-02 2021-12-02 Robert Bosch Gesellschaft mit beschränkter Haftung Vorrichtung zum Ausrichten eines Sensors oder Beleuchtungsmittels
JP7563078B2 (ja) * 2020-08-26 2024-10-08 ニデック株式会社 アクチュエータ
JP7516651B2 (ja) * 2021-02-26 2024-07-16 パイオニア株式会社 アクチュエーター
DE102021202120A1 (de) * 2021-03-04 2022-09-08 MICRO-EPSILON-MESSTECHNIK GmbH & Co. K.G. Aktor-Sensor-System und Fast Steering Mirror (FSM)

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US3587335A (en) * 1969-04-10 1971-06-28 Massasetts Inst Of Technology Device for providing precise motions
US20020067534A1 (en) * 2000-07-27 2002-06-06 Holl Richard A. Flexureless magnetic micromirror assembly
US20030039016A1 (en) * 2001-08-24 2003-02-27 Vladimir Vaganov Rolling mirror apparatus and method of use
US20050012920A1 (en) * 2003-07-17 2005-01-20 Newport Corporation High resolution, dynamic positioning mechanism for specimen inspection and processing
US20050078346A1 (en) * 2003-10-09 2005-04-14 Turner Arthur Monroe Pivoting mirror with improved magnetic drive
US7061660B1 (en) * 2005-04-13 2006-06-13 Hewlett-Packard Development Company, L.P. MEMs device with feedback control

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EP0977066A1 (en) 1998-07-27 2000-02-02 Koninklijke Philips Electronics N.V. Radiation-beam manipulator having a pretensioned thrust bearing
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US20040004775A1 (en) * 2002-07-08 2004-01-08 Turner Arthur Monroe Resonant scanning mirror with inertially coupled activation
JP4307171B2 (ja) * 2002-07-19 2009-08-05 キヤノン株式会社 マイクロ可動体
CN1501108A (zh) * 2002-08-28 2004-06-02 Nec������ʽ���� 光开关
US6758571B2 (en) * 2002-09-30 2004-07-06 Texas Instruments Incorporated Scanning MEMS mirror with reluctance force motor
US7643196B2 (en) * 2005-12-16 2010-01-05 The Charles Stark Draper Laboratory, Inc. Systems, methods and devices for actuating a moveable miniature platform

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3587335A (en) * 1969-04-10 1971-06-28 Massasetts Inst Of Technology Device for providing precise motions
US20020067534A1 (en) * 2000-07-27 2002-06-06 Holl Richard A. Flexureless magnetic micromirror assembly
US20030039016A1 (en) * 2001-08-24 2003-02-27 Vladimir Vaganov Rolling mirror apparatus and method of use
US20050012920A1 (en) * 2003-07-17 2005-01-20 Newport Corporation High resolution, dynamic positioning mechanism for specimen inspection and processing
US20050078346A1 (en) * 2003-10-09 2005-04-14 Turner Arthur Monroe Pivoting mirror with improved magnetic drive
US7061660B1 (en) * 2005-04-13 2006-06-13 Hewlett-Packard Development Company, L.P. MEMs device with feedback control

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI777945B (zh) * 2016-03-15 2022-09-21 德商阿莫瓦有限公司 用於在高架倉庫中貯存和獲取或者重排貯存品的運輸和轉移系統

Also Published As

Publication number Publication date
US7598688B2 (en) 2009-10-06
JP2009542174A (ja) 2009-11-26
CN101563638B (zh) 2016-10-26
EP2030069A2 (en) 2009-03-04
CN101563638A (zh) 2009-10-21
KR20090019802A (ko) 2009-02-25
TW200809452A (en) 2008-02-16
WO2008023272A3 (en) 2009-04-23
IL195388A (en) 2012-02-29
WO2008023272A2 (en) 2008-02-28
KR101427432B1 (ko) 2014-08-11
US20080028816A1 (en) 2008-02-07
JP5421771B2 (ja) 2014-02-19
IL195388A0 (en) 2009-08-03
EP2030069A4 (en) 2010-07-14

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