TWI456368B - 平面傾斜裝置 - Google Patents

平面傾斜裝置 Download PDF

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Publication number
TWI456368B
TWI456368B TW096119954A TW96119954A TWI456368B TW I456368 B TWI456368 B TW I456368B TW 096119954 A TW096119954 A TW 096119954A TW 96119954 A TW96119954 A TW 96119954A TW I456368 B TWI456368 B TW I456368B
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TW
Taiwan
Prior art keywords
planar
tilting device
pair
plane
axis
Prior art date
Application number
TW096119954A
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English (en)
Other versions
TW200809452A (en
Inventor
Yechiel Slor
Arkady Bronfman
Roni Tzubery
Dan Zemer
Original Assignee
Orbotech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Orbotech Ltd filed Critical Orbotech Ltd
Publication of TW200809452A publication Critical patent/TW200809452A/zh
Application granted granted Critical
Publication of TWI456368B publication Critical patent/TWI456368B/zh

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/10—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for axial load mainly
    • F16C19/12—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for axial load mainly for supporting the end face of a shaft or other member, e.g. footstep bearings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/198—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the mirror relative to its support
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Claims (25)

  1. 一種平面傾斜裝置，包含：一可選擇地定位之平面元件總成，其具有界定一平面之一平面元件及一樞軸位置部，該樞軸位置部相對於該平面實質上居中；一樞軸支撐元件，其可樞轉地嚙合該樞軸位置部；至少二電磁鐵，其相對於該樞軸支撐元件固定，並配置成沿一實質上垂直於該平面之方向施加磁力，藉以使該平面元件圍繞該樞軸支撐元件樞轉；至少一感測器，用於感測該平面元件之位置；一回饋電路，其可因應該至少一感測器之至少一輸出而運作，以管控該至少二電磁鐵之操作；以及一旋轉固定磁鐵，安裝至該平面元件之一底側上，該旋轉固定磁鐵包含一圓環形磁鐵。
  2. 如請求項1所述之平面傾斜裝置，其中在該平面元件中，該樞軸位置部包含一凹槽。
  3. 如請求項1所述之平面傾斜裝置，其中該樞軸支撐元件包含一軸，該軸包括一樞軸點。
  4. 如請求項3所述之平面傾斜裝置，其中該樞軸點實質上具有一球形構形。
  5. 如請求項3所述之平面傾斜裝置，其中該旋轉固定磁鐵係以反作用於該平面元件圍繞該樞軸點之旋轉方式而磁化。
  6. 如請求項3所述之平面傾斜裝置，亦包含至少一壓縮彈簧，安裝至該軸上並錨固至該平面元件。
  7. 如請求項6所述之平面傾斜裝置，其中該至少一壓縮彈簧可用以防止該平面元件圍繞該樞軸點旋轉。
  8. 如請求項1所述之平面傾斜裝置，其中該樞軸支撐元件包含一第一對球體，其沿垂直於該方向延伸之一第一軸線配置。
  9. 如請求項8所述之平面傾斜裝置，其中該第一對球體係呈相互接觸之配置。
  10. 如請求項8所述之平面傾斜裝置，其中該樞軸位置部包含安裝至該平面元件之一底側上之一第二對球體，該第二對球體可樞轉地嚙合該第一對球體並沿垂直於該第一軸線及該方向延伸之一第二軸線配置。
  11. 如請求項10所述之平面傾斜裝置，其中該第二對球體係呈相互接觸之配置。
  12. 如請求項10所述之平面傾斜裝置，其中該第一對球體與該第二對球體中之至少一者係由碳化鎢所形成。
  13. 如請求項8所述之平面傾斜裝置，其中該固定磁鐵可用以將該平面元件固定成可樞轉地嚙合該樞軸支撐元件。
  14. 如請求項2所述之平面傾斜裝置，其中該固定磁鐵可用以將該平面元件固定成可樞轉地嚙合該樞軸支撐元件。
  15. 如請求項1所述之平面傾斜裝置，其中該至少二電磁鐵包含相對於該樞軸位置部對稱分佈之複數個電磁鐵。
  16. 如請求項1所述之平面傾斜裝置，亦包含相對於該樞軸位置部與該至少二電磁鐵相對定位之至少二彈簧。
  17. 如請求項1所述之平面傾斜裝置，其中該至少一個感測器包 含一電容感測器。
  18. 如請求項1所述之平面傾斜裝置，其中該回饋電路控制該平面元件圍繞一單一軸線之傾斜，藉以實現該平面元件之一二維位置。
  19. 如請求項1所述之平面傾斜裝置，其中該回饋電路控制該平面元件圍繞二軸線之傾斜，藉以實現該平面元件之一三維位置。
  20. 如請求項1所述之平面傾斜裝置，其中該平面元件包含一鏡元件之一基座。
  21. 如請求項1所述之平面傾斜裝置，其中該回饋電路包含第一控制電路及第二控制電路，該第一控制電路用以控制該平面元件圍繞一第一定位軸線之定位，且該第二控制電路用以控制該平面元件圍繞一第二定位軸線之定位，該第二定位軸線垂直於該第一定位軸線延伸。
  22. 一種平面傾斜裝置，包含：一可選擇地定位之平面元件總成，包含：一平面元件，其具有一平面；以及一樞軸位置元件，其包含沿一第一軸線配置之一第一對球體，該第一軸線平行於該平面延伸，該第一對球體相對於該平面實質上居中；一樞軸支撐元件，其由沿一第二軸線配置之一第二對球體形成，該第二軸線垂直於該第一軸線延伸，該第二對球體可樞轉地嚙合該第一對球體； 至少二電磁置換器，其配置以對該平面施加一磁力，藉以使該平面元件圍繞該樞軸支撐元件樞轉；至少一感測器，用於感測該平面元件之位置；以及一回饋電路，其可因應該至少一感測器之至少一輸出而運作，以管控該至少二電磁鐵置換器之操作。
  23. 如請求項22所述之平面傾斜裝置，其中該第一對球體係呈相互接觸之配置。
  24. 如請求項22所述之平面傾斜裝置，其中該第二對球體係呈相互接觸之配置。
  25. 如請求項22所述之平面傾斜裝置，其中該第一對球體與該第二對球體中之至少一者係由碳化鎢所形成。
TW096119954A 2006-06-22 2007-06-04 平面傾斜裝置 TWI456368B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/472,325 US7598688B2 (en) 2006-06-22 2006-06-22 Tilting device

Publications (2)

Publication Number Publication Date
TW200809452A TW200809452A (en) 2008-02-16
TWI456368B true TWI456368B (zh) 2014-10-11

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW096119954A TWI456368B (zh) 2006-06-22 2007-06-04 平面傾斜裝置

Country Status (8)

Country Link
US (1) US7598688B2 (zh)
EP (1) EP2030069A4 (zh)
JP (1) JP5421771B2 (zh)
KR (1) KR101427432B1 (zh)
CN (1) CN101563638B (zh)
IL (1) IL195388A (zh)
TW (1) TWI456368B (zh)
WO (1) WO2008023272A2 (zh)

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Publication number Priority date Publication date Assignee Title
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JP5421771B2 (ja) 2014-02-19
CN101563638B (zh) 2016-10-26
KR20090019802A (ko) 2009-02-25
JP2009542174A (ja) 2009-11-26
WO2008023272A2 (en) 2008-02-28
EP2030069A2 (en) 2009-03-04
TW200809452A (en) 2008-02-16
IL195388A0 (en) 2009-08-03
US20080028816A1 (en) 2008-02-07
WO2008023272A3 (en) 2009-04-23
CN101563638A (zh) 2009-10-21
KR101427432B1 (ko) 2014-08-11
IL195388A (en) 2012-02-29
EP2030069A4 (en) 2010-07-14
US7598688B2 (en) 2009-10-06

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