JP2009540568A5 - - Google Patents

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Publication number
JP2009540568A5
JP2009540568A5 JP2009514301A JP2009514301A JP2009540568A5 JP 2009540568 A5 JP2009540568 A5 JP 2009540568A5 JP 2009514301 A JP2009514301 A JP 2009514301A JP 2009514301 A JP2009514301 A JP 2009514301A JP 2009540568 A5 JP2009540568 A5 JP 2009540568A5
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JP
Japan
Prior art keywords
chamber
wall
volume
orifice
insulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009514301A
Other languages
English (en)
Japanese (ja)
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JP2009540568A (ja
JP5614617B2 (ja
Filing date
Publication date
Priority claimed from US11/447,502 external-priority patent/US7369596B2/en
Application filed filed Critical
Publication of JP2009540568A publication Critical patent/JP2009540568A/ja
Publication of JP2009540568A5 publication Critical patent/JP2009540568A5/ja
Application granted granted Critical
Publication of JP5614617B2 publication Critical patent/JP5614617B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2009514301A 2006-06-05 2007-05-22 高エネルギー・エキシマレーザ源用のチャンバ Active JP5614617B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/447,502 2006-06-05
US11/447,502 US7369596B2 (en) 2006-06-05 2006-06-05 Chamber for a high energy excimer laser source
PCT/US2007/012393 WO2007145792A2 (en) 2006-06-05 2007-05-22 Chamber for a high energy excimer laser source

Publications (3)

Publication Number Publication Date
JP2009540568A JP2009540568A (ja) 2009-11-19
JP2009540568A5 true JP2009540568A5 (https=) 2010-07-08
JP5614617B2 JP5614617B2 (ja) 2014-10-29

Family

ID=38790122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009514301A Active JP5614617B2 (ja) 2006-06-05 2007-05-22 高エネルギー・エキシマレーザ源用のチャンバ

Country Status (6)

Country Link
US (1) US7369596B2 (https=)
EP (1) EP2036169B1 (https=)
JP (1) JP5614617B2 (https=)
KR (1) KR101385047B1 (https=)
TW (1) TWI345348B (https=)
WO (1) WO2007145792A2 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8031761B2 (en) * 2003-12-07 2011-10-04 Adaptive Spectrum And Signal Alignment, Inc. Adaptive margin and band control
US7564888B2 (en) * 2004-05-18 2009-07-21 Cymer, Inc. High power excimer laser with a pulse stretcher
WO2007044326A2 (en) * 2005-10-04 2007-04-19 Adaptive Spectrum And Signal Alignment, Inc. Dsl system
TW201334333A (zh) * 2011-12-20 2013-08-16 Ipg Microsystems Llc 根據電性引入使用多預照放射放電之氣體放電雷射裝置中之預照放射設備
CN103022858B (zh) * 2012-12-07 2014-09-24 华中科技大学 一种电晕预电离装置
WO2021071681A1 (en) * 2019-10-11 2021-04-15 Cymer, Llc Conductive member for discharge laser

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4719641A (en) * 1985-11-08 1988-01-12 Summit Technology, Inc. Multiple chamber laser containment system
US5377215A (en) * 1992-11-13 1994-12-27 Cymer Laser Technologies Excimer laser
JP2000223757A (ja) * 1999-02-04 2000-08-11 Komatsu Ltd ガスレーザ
US6661826B2 (en) * 1999-08-31 2003-12-09 Cymer, Inc. Laser chamber insulator with sealed electrode feedthrough
US20050083984A1 (en) * 2003-10-17 2005-04-21 Igor Bragin Laser system sealing

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