TWI345348B - Chamber for a high energy excimer laser source - Google Patents
Chamber for a high energy excimer laser source Download PDFInfo
- Publication number
- TWI345348B TWI345348B TW096117041A TW96117041A TWI345348B TW I345348 B TWI345348 B TW I345348B TW 096117041 A TW096117041 A TW 096117041A TW 96117041 A TW96117041 A TW 96117041A TW I345348 B TWI345348 B TW I345348B
- Authority
- TW
- Taiwan
- Prior art keywords
- chamber
- cast wall
- block
- gas
- volume
- Prior art date
Links
- 239000007789 gas Substances 0.000 claims description 43
- 239000012212 insulator Substances 0.000 claims description 28
- 239000004020 conductor Substances 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 7
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 3
- 238000012986 modification Methods 0.000 claims description 3
- 230000004048 modification Effects 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 238000005266 casting Methods 0.000 claims 1
- 238000009413 insulation Methods 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 230000000149 penetrating effect Effects 0.000 description 5
- 239000003989 dielectric material Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 229910001369 Brass Inorganic materials 0.000 description 2
- 239000010951 brass Substances 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229920004738 ULTEM® Polymers 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/20—Liquids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/447,502 US7369596B2 (en) | 2006-06-05 | 2006-06-05 | Chamber for a high energy excimer laser source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200803089A TW200803089A (en) | 2008-01-01 |
| TWI345348B true TWI345348B (en) | 2011-07-11 |
Family
ID=38790122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW096117041A TWI345348B (en) | 2006-06-05 | 2007-05-14 | Chamber for a high energy excimer laser source |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7369596B2 (https=) |
| EP (1) | EP2036169B1 (https=) |
| JP (1) | JP5614617B2 (https=) |
| KR (1) | KR101385047B1 (https=) |
| TW (1) | TWI345348B (https=) |
| WO (1) | WO2007145792A2 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8031761B2 (en) * | 2003-12-07 | 2011-10-04 | Adaptive Spectrum And Signal Alignment, Inc. | Adaptive margin and band control |
| US7564888B2 (en) * | 2004-05-18 | 2009-07-21 | Cymer, Inc. | High power excimer laser with a pulse stretcher |
| WO2007044326A2 (en) * | 2005-10-04 | 2007-04-19 | Adaptive Spectrum And Signal Alignment, Inc. | Dsl system |
| TW201334333A (zh) * | 2011-12-20 | 2013-08-16 | Ipg Microsystems Llc | 根據電性引入使用多預照放射放電之氣體放電雷射裝置中之預照放射設備 |
| CN103022858B (zh) * | 2012-12-07 | 2014-09-24 | 华中科技大学 | 一种电晕预电离装置 |
| WO2021071681A1 (en) * | 2019-10-11 | 2021-04-15 | Cymer, Llc | Conductive member for discharge laser |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4719641A (en) * | 1985-11-08 | 1988-01-12 | Summit Technology, Inc. | Multiple chamber laser containment system |
| US5377215A (en) * | 1992-11-13 | 1994-12-27 | Cymer Laser Technologies | Excimer laser |
| JP2000223757A (ja) * | 1999-02-04 | 2000-08-11 | Komatsu Ltd | ガスレーザ |
| US6661826B2 (en) * | 1999-08-31 | 2003-12-09 | Cymer, Inc. | Laser chamber insulator with sealed electrode feedthrough |
| US20050083984A1 (en) * | 2003-10-17 | 2005-04-21 | Igor Bragin | Laser system sealing |
-
2006
- 2006-06-05 US US11/447,502 patent/US7369596B2/en active Active
-
2007
- 2007-05-14 TW TW096117041A patent/TWI345348B/zh active
- 2007-05-22 JP JP2009514301A patent/JP5614617B2/ja active Active
- 2007-05-22 KR KR1020087030482A patent/KR101385047B1/ko active Active
- 2007-05-22 EP EP07777259A patent/EP2036169B1/en active Active
- 2007-05-22 WO PCT/US2007/012393 patent/WO2007145792A2/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| KR20090016023A (ko) | 2009-02-12 |
| TW200803089A (en) | 2008-01-01 |
| WO2007145792A3 (en) | 2008-10-16 |
| US7369596B2 (en) | 2008-05-06 |
| JP2009540568A (ja) | 2009-11-19 |
| EP2036169A4 (en) | 2011-07-06 |
| EP2036169B1 (en) | 2013-03-27 |
| EP2036169A2 (en) | 2009-03-18 |
| KR101385047B1 (ko) | 2014-04-14 |
| WO2007145792A2 (en) | 2007-12-21 |
| US20070280323A1 (en) | 2007-12-06 |
| JP5614617B2 (ja) | 2014-10-29 |
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