JP2009510783A5 - - Google Patents

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Publication number
JP2009510783A5
JP2009510783A5 JP2008533475A JP2008533475A JP2009510783A5 JP 2009510783 A5 JP2009510783 A5 JP 2009510783A5 JP 2008533475 A JP2008533475 A JP 2008533475A JP 2008533475 A JP2008533475 A JP 2008533475A JP 2009510783 A5 JP2009510783 A5 JP 2009510783A5
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JP
Japan
Prior art keywords
assembly
bore
tube
longitudinal axis
preionizer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008533475A
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English (en)
Japanese (ja)
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JP2009510783A (ja
JP5349964B2 (ja
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Publication date
Priority claimed from US11/237,535 external-priority patent/US7542502B2/en
Application filed filed Critical
Publication of JP2009510783A publication Critical patent/JP2009510783A/ja
Publication of JP2009510783A5 publication Critical patent/JP2009510783A5/ja
Application granted granted Critical
Publication of JP5349964B2 publication Critical patent/JP5349964B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008533475A 2005-09-27 2006-09-25 熱膨張耐性のあるガス放電レーザ用の予備電離器の電極 Active JP5349964B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/237,535 2005-09-27
US11/237,535 US7542502B2 (en) 2005-09-27 2005-09-27 Thermal-expansion tolerant, preionizer electrode for a gas discharge laser
PCT/US2006/037225 WO2007038412A2 (en) 2005-09-27 2006-09-25 Thermal-expansion tolerant, preionizer electrode for a gas discharge laser

Publications (3)

Publication Number Publication Date
JP2009510783A JP2009510783A (ja) 2009-03-12
JP2009510783A5 true JP2009510783A5 (https=) 2009-11-12
JP5349964B2 JP5349964B2 (ja) 2013-11-20

Family

ID=37900351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008533475A Active JP5349964B2 (ja) 2005-09-27 2006-09-25 熱膨張耐性のあるガス放電レーザ用の予備電離器の電極

Country Status (6)

Country Link
US (1) US7542502B2 (https=)
EP (1) EP1929595B1 (https=)
JP (1) JP5349964B2 (https=)
KR (1) KR101334614B1 (https=)
DE (1) DE602006018033D1 (https=)
WO (1) WO2007038412A2 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5697677B2 (ja) 2009-10-26 2015-04-08 ネステク ソシエテ アノニム 抗ｔｎｆ薬及び自己抗体の検出用アッセイ
RU2446530C1 (ru) * 2011-01-28 2012-03-27 Владимир Михайлович Борисов Импульсно-периодический газоразрядный лазер
KR20140047628A (ko) 2011-07-06 2014-04-22 네스텍 소시에테아노님 Ｔｎｆ알파로의 생물학적 치료요법에 대한 중화 자가항체의 검출을 위한 검정
CN107250798A (zh) 2014-12-05 2017-10-13 雀巢产品技术援助有限公司 用于检测患者样品中的生物制品的间接均相迁移率变动试验
WO2021071681A1 (en) * 2019-10-11 2021-04-15 Cymer, Llc Conductive member for discharge laser
US11862922B2 (en) * 2020-12-21 2024-01-02 Energetiq Technology, Inc. Light emitting sealed body and light source device
CN114696185B (zh) * 2020-12-30 2025-08-15 北京科益虹源光电技术有限公司 准分子激光器预电离管的定位工装及安装方法
EP4690390A1 (en) 2023-03-28 2026-02-11 Cymer, LLC Laser chamber having discharge gap with acoustic control
WO2024201226A1 (en) 2023-03-29 2024-10-03 Cymer, Llc Laser chamber preionizer having acoustic scattering surface
WO2025120393A1 (en) 2023-12-07 2025-06-12 Cymer, Llc Laser chamber with discharge system having acoustic scattering surfaces
WO2025133792A1 (en) 2023-12-18 2025-06-26 Cymer, Llc Laser chamber gas flow and acoustic control

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US679A (en) 1838-04-07 Safety life-preserver
US6522A (en) 1849-06-12 Padlock
CH612298A5 (https=) * 1976-06-23 1979-07-13 Battelle Memorial Institute
DE3313811A1 (de) * 1983-04-15 1984-10-18 Siemens AG, 1000 Berlin und 8000 München Transversal angeregter gaslaser
IT1197768B (it) * 1983-12-29 1988-12-06 Selenia Ind Elettroniche Preionizzatore ad effetto corona per laser a gas
NO853264L (no) * 1984-10-15 1986-04-16 Siemens Ag Transversalt eksitert gasslaser og fremgangsm¨te til dens drift.
US4662173A (en) 1985-04-29 1987-05-05 Teledyne Industries, Inc. Exhaust manifold for opposed cylinder engines
JPH02214178A (ja) * 1989-02-15 1990-08-27 Hiromi Kawase ホロー陰極型放電デバイス
US5200970A (en) * 1990-12-03 1993-04-06 Summit Technology, Inc. Methods and compositions for protecting laser excitation gases from contamination
DE69200247T2 (de) * 1991-04-23 1994-11-24 Matsushita Electric Ind Co Ltd Entladungsgepumpter Gaslaser mit Baffle-Trennung für kontrollierten Gasfluss an Vorionisierern.
US5331810A (en) 1992-05-21 1994-07-26 Arvin Industries, Inc. Low thermal capacitance exhaust system for an internal combustion engine
US5337330A (en) * 1992-10-09 1994-08-09 Cymer Laser Technologies Pre-ionizer for a laser
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DE19523338A1 (de) * 1994-06-29 1996-02-01 Okaya Electric Industry Co Überspannungsschutzelement vom Entladungstyp und Verfahren zu dessen Herstellung
DE4426723A1 (de) * 1994-07-22 1996-01-25 Atl Lasertechnik & Accessoires Gleitentladungsvorionisation für Gaslaser
US5719896A (en) * 1996-03-29 1998-02-17 Cymer Inc. Low cost corona pre-ionizer for a laser
US5818865A (en) * 1997-05-16 1998-10-06 Cymer, Inc. Compact excimer laser insulator with integral pre-ionizer
JP3390671B2 (ja) * 1998-04-27 2003-03-24 炳霖 ▲楊▼ チップなしサージアブソーバの製造方法
US6433482B1 (en) * 1998-05-11 2002-08-13 Wisconsin Alumni Research Foundation Barium light source method and apparatus
US6650679B1 (en) * 1999-02-10 2003-11-18 Lambda Physik Ag Preionization arrangement for gas laser
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JP3399517B2 (ja) * 1999-12-08 2003-04-21 ウシオ電機株式会社 紫外線を放出するガスレーザ装置
US6522679B1 (en) * 2000-02-22 2003-02-18 Tuilaser Gas laser discharge unit
US7132123B2 (en) * 2000-06-09 2006-11-07 Cymer, Inc. High rep-rate laser with improved electrodes
WO2003023910A2 (en) * 2001-09-13 2003-03-20 Cymer, Inc. High rep-rate laser with improved electrodes
US6774566B2 (en) * 2001-09-19 2004-08-10 Toshiba Lighting & Technology Corporation High pressure discharge lamp and luminaire
US6950453B2 (en) * 2003-07-03 2005-09-27 Secretary, Department Of Atomic Energy Goverment Of India Pulser driven, helium free transversely excited atmospheric-pressure (TEA) CO2 laser
JP2005183068A (ja) * 2003-12-17 2005-07-07 Ushio Inc 放電ランプ
JP2005251585A (ja) * 2004-03-04 2005-09-15 Nec Lighting Ltd 冷陰極蛍光ランプ
US7522650B2 (en) * 2004-03-31 2009-04-21 Cymer, Inc. Gas discharge laser chamber improvements

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