IT1197768B - Preionizzatore ad effetto corona per laser a gas - Google Patents

Preionizzatore ad effetto corona per laser a gas

Info

Publication number
IT1197768B
IT1197768B IT49600/83A IT4960083A IT1197768B IT 1197768 B IT1197768 B IT 1197768B IT 49600/83 A IT49600/83 A IT 49600/83A IT 4960083 A IT4960083 A IT 4960083A IT 1197768 B IT1197768 B IT 1197768B
Authority
IT
Italy
Prior art keywords
preionizer
gas laser
crown effect
crown
effect
Prior art date
Application number
IT49600/83A
Other languages
English (en)
Other versions
IT8349600A0 (it
IT8349600A1 (it
Inventor
E Penco
R Marchetti
G Salvetti
Original Assignee
Selenia Ind Elettroniche
Enea
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Selenia Ind Elettroniche, Enea filed Critical Selenia Ind Elettroniche
Priority to IT49600/83A priority Critical patent/IT1197768B/it
Publication of IT8349600A0 publication Critical patent/IT8349600A0/it
Priority to DE84830359T priority patent/DE3486133T2/de
Priority to EP84830359A priority patent/EP0150692B1/en
Priority to CA000471166A priority patent/CA1267964A/en
Publication of IT8349600A1 publication Critical patent/IT8349600A1/it
Priority to US07/051,161 priority patent/US4718072A/en
Application granted granted Critical
Publication of IT1197768B publication Critical patent/IT1197768B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0385—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H01S3/09713—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0384—Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
IT49600/83A 1983-12-29 1983-12-29 Preionizzatore ad effetto corona per laser a gas IT1197768B (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
IT49600/83A IT1197768B (it) 1983-12-29 1983-12-29 Preionizzatore ad effetto corona per laser a gas
DE84830359T DE3486133T2 (de) 1983-12-29 1984-12-27 Vorionisierung eines Gaslasers mittels Koronaentladung.
EP84830359A EP0150692B1 (en) 1983-12-29 1984-12-27 Corona discharge preionizer for gas laser
CA000471166A CA1267964A (en) 1983-12-29 1984-12-28 Corona discharge preionizer for gas laser
US07/051,161 US4718072A (en) 1983-12-29 1987-05-15 Corona discharge preionizer for gas laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT49600/83A IT1197768B (it) 1983-12-29 1983-12-29 Preionizzatore ad effetto corona per laser a gas

Publications (3)

Publication Number Publication Date
IT8349600A0 IT8349600A0 (it) 1983-12-29
IT8349600A1 IT8349600A1 (it) 1985-06-29
IT1197768B true IT1197768B (it) 1988-12-06

Family

ID=11271141

Family Applications (1)

Application Number Title Priority Date Filing Date
IT49600/83A IT1197768B (it) 1983-12-29 1983-12-29 Preionizzatore ad effetto corona per laser a gas

Country Status (5)

Country Link
US (1) US4718072A (it)
EP (1) EP0150692B1 (it)
CA (1) CA1267964A (it)
DE (1) DE3486133T2 (it)
IT (1) IT1197768B (it)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4891818A (en) * 1987-08-31 1990-01-02 Acculase, Inc. Rare gas-halogen excimer laser
WO1989002176A1 (en) * 1987-08-31 1989-03-09 Acculase, Inc. Improved rare gas-halogen excimer laser
DE3914919A1 (de) * 1989-05-06 1990-11-08 Heraeus Holding Entladungsvorrichtung
JPH077857B2 (ja) * 1989-05-17 1995-01-30 三菱電機株式会社 放電励起パルスレーザ装置
US5077749A (en) * 1989-07-10 1991-12-31 Kabushiki Kaisha Toshiba Laser apparatus
US5200970A (en) * 1990-12-03 1993-04-06 Summit Technology, Inc. Methods and compositions for protecting laser excitation gases from contamination
DE69109479T2 (de) * 1991-02-08 1996-02-15 Mitsubishi Electric Corp Mit transversaler entladung gepumpter pulslaser.
DE4108474A1 (de) * 1991-03-15 1992-09-17 Lambda Physik Forschung Vorrichtung zur vorionisierung eines gepulsten gaslasers
JP2758730B2 (ja) * 1991-04-25 1998-05-28 三菱電機株式会社 放電励起パルスレーザ発振装置
EP0577870A1 (en) * 1992-07-06 1994-01-12 Mitsubishi Denki Kabushiki Kaisha Discharge excitation pulsed laser oscillation device
US5337330A (en) * 1992-10-09 1994-08-09 Cymer Laser Technologies Pre-ionizer for a laser
US5319663A (en) * 1992-12-18 1994-06-07 Lumonics Inc. Dust precipitation in a gas laser
US6020723A (en) 1997-02-14 2000-02-01 Lambada Physik Gmbh Magnetic switch controlled power supply isolator and thyristor commutating circuit
US6005880A (en) * 1997-02-14 1999-12-21 Lambda Physik Gmbh Precision variable delay using saturable inductors
RU2134925C1 (ru) * 1997-10-21 1999-08-20 Лажинцев Борис Васильевич Устройство лазера с возбуждением объемным самостоятельным разрядом
US6650679B1 (en) 1999-02-10 2003-11-18 Lambda Physik Ag Preionization arrangement for gas laser
US6456643B1 (en) 1999-03-31 2002-09-24 Lambda Physik Ag Surface preionization for gas lasers
WO2000025395A1 (fr) * 1998-10-26 2000-05-04 Boris Vasilievich Lazhintsev Dispositif laser avec excitation d'une decharge auto-entretenue tridimensionnelle
RU2155421C1 (ru) * 1998-12-25 2000-08-27 Центр физического приборостроения ИОФ РАН Электродное устройство с предварительной ионизацией ультрафиолетовым излучением от коронного разряда
US6757315B1 (en) 1999-02-10 2004-06-29 Lambda Physik Ag Corona preionization assembly for a gas laser
US6198761B1 (en) 1999-05-07 2001-03-06 Lambda Physik Gmbh Coaxial laser pulser with solid dielectrics
DE19934013C1 (de) * 1999-06-21 2000-08-10 Tui Laser Ag Vorrichtung zur Vermeidung von Gleitentladungen bei der Vorionisierung in einem Gaslaser mit Coronaentladung
US6700908B1 (en) 1999-06-21 2004-03-02 Tui Laser Ag Device for avoiding sliding discharges in pre-ionization in a gas laser with corona discharge
JP3428632B2 (ja) * 1999-08-04 2003-07-22 ウシオ電機株式会社 ガスレーザ装置用コロナ予備電離電極
US6785316B1 (en) 1999-08-17 2004-08-31 Lambda Physik Ag Excimer or molecular laser with optimized spectral purity
US6570901B2 (en) 2000-02-24 2003-05-27 Lambda Physik Ag Excimer or molecular fluorine laser having lengthened electrodes
WO2001084678A2 (en) 2000-04-18 2001-11-08 Lambda Physik Ag Stabilization technique for high repetition rate gas discharge lasers
US6862307B2 (en) * 2000-05-15 2005-03-01 Lambda Physik Ag Electrical excitation circuit for a pulsed gas laser
RU2206186C2 (ru) 2000-07-04 2003-06-10 Государственный научный центр Российской Федерации Троицкий институт инновационных и термоядерных исследований Способ получения коротковолнового излучения из газоразрядной плазмы и устройство для его реализации
US6671302B2 (en) 2000-08-11 2003-12-30 Lambda Physik Ag Device for self-initiated UV pre-ionization of a repetitively pulsed gas laser
US6804327B2 (en) * 2001-04-03 2004-10-12 Lambda Physik Ag Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays
US20070030876A1 (en) * 2005-08-05 2007-02-08 Levatter Jeffrey I Apparatus and method for purging and recharging excimer laser gases
US7542502B2 (en) * 2005-09-27 2009-06-02 Cymer, Inc. Thermal-expansion tolerant, preionizer electrode for a gas discharge laser
ATE510332T1 (de) * 2007-03-27 2011-06-15 Photomedex Inc Verfahren und vorrichtung für den effizienten betrieb eines gasentladungsexcimerlasers
RU2411619C1 (ru) * 2009-10-15 2011-02-10 Александр Васильевич Краснов Газовый лазер с возбуждением высокочастотным разрядом

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4555787A (en) * 1980-09-12 1985-11-26 Northrop Corporation Gas laser preionization device
US4380079A (en) * 1980-09-12 1983-04-12 Northrop Corp. Gas laser preionization device
DE3035730A1 (de) * 1980-09-22 1982-05-13 Kraftwerk Union AG, 4330 Mülheim Hochenergielaser des tea-typs mit laser-achsparrallel angeordneten vorionisierungsstaeben
DE3136447A1 (de) * 1981-09-14 1983-03-24 Kraftwerk Union AG, 4330 Mülheim Laser des te-typs, insbesondere hochenergielaser
JPS58155643A (ja) * 1982-03-10 1983-09-16 Toshiba Corp グロー放電発生装置
IT1148956B (it) * 1982-06-15 1986-12-03 Selenia Industire Elettroniche Laser a gas impulsanti in struttura sigillata

Also Published As

Publication number Publication date
IT8349600A0 (it) 1983-12-29
EP0150692B1 (en) 1993-04-21
DE3486133D1 (de) 1993-05-27
EP0150692A3 (en) 1987-09-30
US4718072A (en) 1988-01-05
IT8349600A1 (it) 1985-06-29
EP0150692A2 (en) 1985-08-07
DE3486133T2 (de) 1993-12-23
CA1267964A (en) 1990-04-17

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Legal Events

Date Code Title Description
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19931230