DE3486133D1 - Vorionisierung eines gaslasers mittels koronaentladung. - Google Patents

Vorionisierung eines gaslasers mittels koronaentladung.

Info

Publication number
DE3486133D1
DE3486133D1 DE8484830359T DE3486133T DE3486133D1 DE 3486133 D1 DE3486133 D1 DE 3486133D1 DE 8484830359 T DE8484830359 T DE 8484830359T DE 3486133 T DE3486133 T DE 3486133T DE 3486133 D1 DE3486133 D1 DE 3486133D1
Authority
DE
Germany
Prior art keywords
preionisation
corona discharge
gas laser
laser
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8484830359T
Other languages
English (en)
Other versions
DE3486133T2 (de
Inventor
Renato Marchetti
Eugenio Penco
Gianemilio Salvetti
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ENTE PER LE NUOVE TECNOLOGIE, L'ENERGIA E L'AMBIEN
Original Assignee
Agenzia Nazionale per le Nuove Tecnologie lEnergia e lo Sviluppo Economico Sostenibile ENEA
Selenia Industrie Elettroniche Associate SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agenzia Nazionale per le Nuove Tecnologie lEnergia e lo Sviluppo Economico Sostenibile ENEA, Selenia Industrie Elettroniche Associate SpA filed Critical Agenzia Nazionale per le Nuove Tecnologie lEnergia e lo Sviluppo Economico Sostenibile ENEA
Application granted granted Critical
Publication of DE3486133D1 publication Critical patent/DE3486133D1/de
Publication of DE3486133T2 publication Critical patent/DE3486133T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0385—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H01S3/09713—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0384—Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
DE84830359T 1983-12-29 1984-12-27 Vorionisierung eines Gaslasers mittels Koronaentladung. Expired - Fee Related DE3486133T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT49600/83A IT1197768B (it) 1983-12-29 1983-12-29 Preionizzatore ad effetto corona per laser a gas

Publications (2)

Publication Number Publication Date
DE3486133D1 true DE3486133D1 (de) 1993-05-27
DE3486133T2 DE3486133T2 (de) 1993-12-23

Family

ID=11271141

Family Applications (1)

Application Number Title Priority Date Filing Date
DE84830359T Expired - Fee Related DE3486133T2 (de) 1983-12-29 1984-12-27 Vorionisierung eines Gaslasers mittels Koronaentladung.

Country Status (5)

Country Link
US (1) US4718072A (de)
EP (1) EP0150692B1 (de)
CA (1) CA1267964A (de)
DE (1) DE3486133T2 (de)
IT (1) IT1197768B (de)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02500944A (ja) * 1987-08-31 1990-03-29 アキュレイス　インコーポレーテッド 改良形希ガス‐ハロゲンエキシマレーザ
US4891818A (en) * 1987-08-31 1990-01-02 Acculase, Inc. Rare gas-halogen excimer laser
DE3914919A1 (de) * 1989-05-06 1990-11-08 Heraeus Holding Entladungsvorrichtung
JPH077857B2 (ja) * 1989-05-17 1995-01-30 三菱電機株式会社 放電励起パルスレーザ装置
US5077749A (en) * 1989-07-10 1991-12-31 Kabushiki Kaisha Toshiba Laser apparatus
US5200970A (en) * 1990-12-03 1993-04-06 Summit Technology, Inc. Methods and compositions for protecting laser excitation gases from contamination
US5347531A (en) * 1991-02-08 1994-09-13 Mitsubishi Denki Kabushiki Kaisha Transverse discharging excitation pulse laser oscillator apparatus
DE4108474A1 (de) * 1991-03-15 1992-09-17 Lambda Physik Forschung Vorrichtung zur vorionisierung eines gepulsten gaslasers
JP2758730B2 (ja) * 1991-04-25 1998-05-28 三菱電機株式会社 放電励起パルスレーザ発振装置
EP0577870A1 (de) * 1992-07-06 1994-01-12 Mitsubishi Denki Kabushiki Kaisha Entladungsangeregte gepulste Laser-Oszillatorvorrichtung
US5337330A (en) * 1992-10-09 1994-08-09 Cymer Laser Technologies Pre-ionizer for a laser
US5319663A (en) * 1992-12-18 1994-06-07 Lumonics Inc. Dust precipitation in a gas laser
US6020723A (en) 1997-02-14 2000-02-01 Lambada Physik Gmbh Magnetic switch controlled power supply isolator and thyristor commutating circuit
US6005880A (en) * 1997-02-14 1999-12-21 Lambda Physik Gmbh Precision variable delay using saturable inductors
US6456643B1 (en) 1999-03-31 2002-09-24 Lambda Physik Ag Surface preionization for gas lasers
US6650679B1 (en) 1999-02-10 2003-11-18 Lambda Physik Ag Preionization arrangement for gas laser
WO2000025395A1 (fr) * 1998-10-26 2000-05-04 Boris Vasilievich Lazhintsev Dispositif laser avec excitation d'une decharge auto-entretenue tridimensionnelle
US6757315B1 (en) 1999-02-10 2004-06-29 Lambda Physik Ag Corona preionization assembly for a gas laser
US6198761B1 (en) 1999-05-07 2001-03-06 Lambda Physik Gmbh Coaxial laser pulser with solid dielectrics
US6700908B1 (en) 1999-06-21 2004-03-02 Tui Laser Ag Device for avoiding sliding discharges in pre-ionization in a gas laser with corona discharge
DE19934013C1 (de) * 1999-06-21 2000-08-10 Tui Laser Ag Vorrichtung zur Vermeidung von Gleitentladungen bei der Vorionisierung in einem Gaslaser mit Coronaentladung
JP3428632B2 (ja) * 1999-08-04 2003-07-22 ウシオ電機株式会社 ガスレーザ装置用コロナ予備電離電極
US6785316B1 (en) 1999-08-17 2004-08-31 Lambda Physik Ag Excimer or molecular laser with optimized spectral purity
US6570901B2 (en) 2000-02-24 2003-05-27 Lambda Physik Ag Excimer or molecular fluorine laser having lengthened electrodes
US6834066B2 (en) 2000-04-18 2004-12-21 Lambda Physik Ag Stabilization technique for high repetition rate gas discharge lasers
US6862307B2 (en) * 2000-05-15 2005-03-01 Lambda Physik Ag Electrical excitation circuit for a pulsed gas laser
RU2206186C2 (ru) 2000-07-04 2003-06-10 Государственный научный центр Российской Федерации Троицкий институт инновационных и термоядерных исследований Способ получения коротковолнового излучения из газоразрядной плазмы и устройство для его реализации
US6671302B2 (en) 2000-08-11 2003-12-30 Lambda Physik Ag Device for self-initiated UV pre-ionization of a repetitively pulsed gas laser
US6804327B2 (en) * 2001-04-03 2004-10-12 Lambda Physik Ag Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays
US20070030876A1 (en) * 2005-08-05 2007-02-08 Levatter Jeffrey I Apparatus and method for purging and recharging excimer laser gases
US7542502B2 (en) * 2005-09-27 2009-06-02 Cymer, Inc. Thermal-expansion tolerant, preionizer electrode for a gas discharge laser
KR20100015929A (ko) * 2007-03-27 2010-02-12 포토메덱스, 인크. 가스 방전 엑시머 레이저를 효율적으로 동작시키기 위한 방법 및 장치

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4555787A (en) * 1980-09-12 1985-11-26 Northrop Corporation Gas laser preionization device
US4380079A (en) * 1980-09-12 1983-04-12 Northrop Corp. Gas laser preionization device
DE3035730A1 (de) * 1980-09-22 1982-05-13 Kraftwerk Union AG, 4330 Mülheim Hochenergielaser des tea-typs mit laser-achsparrallel angeordneten vorionisierungsstaeben
DE3136447A1 (de) * 1981-09-14 1983-03-24 Kraftwerk Union AG, 4330 Mülheim Laser des te-typs, insbesondere hochenergielaser
JPS58155643A (ja) * 1982-03-10 1983-09-16 Toshiba Corp グロー放電発生装置
IT1148956B (it) * 1982-06-15 1986-12-03 Selenia Industire Elettroniche Laser a gas impulsanti in struttura sigillata

Also Published As

Publication number Publication date
IT8349600A0 (it) 1983-12-29
DE3486133T2 (de) 1993-12-23
EP0150692A3 (en) 1987-09-30
CA1267964A (en) 1990-04-17
EP0150692A2 (de) 1985-08-07
US4718072A (en) 1988-01-05
IT1197768B (it) 1988-12-06
EP0150692B1 (de) 1993-04-21

Similar Documents

Publication Publication Date Title
DE3486133D1 (de) Vorionisierung eines gaslasers mittels koronaentladung.
IT8048945A0 (it) Cartuccia per generatore di gas
NO151773C (no) Narkosemaske for gassanestesi
FI830540A0 (fi) Suspensionssmaeltningsfoerfarande och anordning foer inmatning av extra gas i flamsmaeltugnens reaktionsakt
FI852602A0 (fi) Anordning foer maetning av gasfraktionen i en tvaokomponents fluidumstroem omfattande en vaetska och en gas i blandning.
AT370918B (de) Gasentladungslaser
FR2509096B1 (fr) Laser a haute energie du type a excitation transversale
IT8167769A0 (it) Guarnizione di tenuta di gas
AT370917B (de) Gasentladungslaservorrichtung
IT1135736B (it) Sonda ad erosione a scatto rapido
IT1094869B (it) Metodo per la nitrurazione gassosa di componenti ferrosi
SE7700106L (sv) Gaslaser
BE888602A (fr) Derives du 2-guanidinothiazole
AT385375B (de) Gasentladungslaservorrichtung
AT385861B (de) Gasentladungslaser
IT1170739B (it) Integratore di preionizzazione con interruttore a.t. per laser a gas impulsato
IT1090028B (it) Silenziatore per getti di gas
BR8108721A (pt) Gerador de gas
JPS5348691A (en) Laser of gas discharge
FI833737A0 (fi) Pump foer vaetska och gas
NL7705623A (nl) Gasontladingslaser.
SE7607381L (sv) Gasurladdningslaser
FR2555828B1 (fr) Generateur laser a gaz
KR850005066U (ko) 밀폐식 기체 실린더
KR830004276U (ko) 가스배출기의 경보음 발생장치

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ENTE PER LE NUOVE TECNOLOGIE, L'ENERGIA E L'AMBIEN

8328 Change in the person/name/address of the agent

Free format text: REINHARD, H., DIPL.-CHEM. DR.RER.NAT. SKUHRA, U., DIPL.-ING. WEISE, R., DIPL.-ING., PAT.-ANWAELTE, 80801 MUENCHEN

8339 Ceased/non-payment of the annual fee