JP2009527021A5 - - Google Patents

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Publication number
JP2009527021A5
JP2009527021A5 JP2008555229A JP2008555229A JP2009527021A5 JP 2009527021 A5 JP2009527021 A5 JP 2009527021A5 JP 2008555229 A JP2008555229 A JP 2008555229A JP 2008555229 A JP2008555229 A JP 2008555229A JP 2009527021 A5 JP2009527021 A5 JP 2009527021A5
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JP
Japan
Prior art keywords
value
antireflection film
electronic device
forming
solvent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008555229A
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English (en)
Japanese (ja)
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JP4881396B2 (ja
JP2009527021A (ja
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Publication date
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Priority claimed from PCT/US2006/046810 external-priority patent/WO2007094848A2/en
Publication of JP2009527021A publication Critical patent/JP2009527021A/ja
Publication of JP2009527021A5 publication Critical patent/JP2009527021A5/ja
Application granted granted Critical
Publication of JP4881396B2 publication Critical patent/JP4881396B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008555229A 2006-02-13 2006-12-07 反射防止膜材料 Expired - Fee Related JP4881396B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US77261906P 2006-02-13 2006-02-13
US60/772,619 2006-02-13
PCT/US2006/046810 WO2007094848A2 (en) 2006-02-13 2006-12-07 Antireflective coating material

Publications (3)

Publication Number Publication Date
JP2009527021A JP2009527021A (ja) 2009-07-23
JP2009527021A5 true JP2009527021A5 (enExample) 2011-06-23
JP4881396B2 JP4881396B2 (ja) 2012-02-22

Family

ID=38371944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008555229A Expired - Fee Related JP4881396B2 (ja) 2006-02-13 2006-12-07 反射防止膜材料

Country Status (7)

Country Link
US (1) US8263312B2 (enExample)
EP (1) EP1989593A2 (enExample)
JP (1) JP4881396B2 (enExample)
KR (1) KR101324052B1 (enExample)
CN (1) CN101371196B (enExample)
TW (1) TWI406099B (enExample)
WO (1) WO2007094848A2 (enExample)

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