JP2009510321A5 - - Google Patents

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Publication number
JP2009510321A5
JP2009510321A5 JP2008532854A JP2008532854A JP2009510321A5 JP 2009510321 A5 JP2009510321 A5 JP 2009510321A5 JP 2008532854 A JP2008532854 A JP 2008532854A JP 2008532854 A JP2008532854 A JP 2008532854A JP 2009510321 A5 JP2009510321 A5 JP 2009510321A5
Authority
JP
Japan
Prior art keywords
stage
gas
purge gas
pump
intake
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008532854A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009510321A (ja
Filing date
Publication date
Priority claimed from GBGB0519742.1A external-priority patent/GB0519742D0/en
Application filed filed Critical
Publication of JP2009510321A publication Critical patent/JP2009510321A/ja
Publication of JP2009510321A5 publication Critical patent/JP2009510321A5/ja
Pending legal-status Critical Current

Links

JP2008532854A 2005-09-28 2006-09-06 ガスをポンピングする方法 Pending JP2009510321A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0519742.1A GB0519742D0 (en) 2005-09-28 2005-09-28 Method of pumping gas
PCT/GB2006/003286 WO2007036689A1 (en) 2005-09-28 2006-09-06 Method of pumping gas

Publications (2)

Publication Number Publication Date
JP2009510321A JP2009510321A (ja) 2009-03-12
JP2009510321A5 true JP2009510321A5 (enExample) 2009-10-01

Family

ID=35394887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008532854A Pending JP2009510321A (ja) 2005-09-28 2006-09-06 ガスをポンピングする方法

Country Status (6)

Country Link
US (1) US20090269231A1 (enExample)
EP (1) EP1931880A1 (enExample)
JP (1) JP2009510321A (enExample)
KR (1) KR20080049788A (enExample)
GB (1) GB0519742D0 (enExample)
WO (1) WO2007036689A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5481019B2 (ja) * 2007-06-05 2014-04-23 エドワーズ株式会社 真空ポンプ配管構造とその真空ポンプ配管の洗浄方法
GB0719394D0 (en) * 2007-10-04 2007-11-14 Edwards Ltd A multi stage clam shell vacuum pump
JP5102068B2 (ja) * 2008-02-29 2012-12-19 株式会社荏原製作所 多段真空ポンプ
GB0922564D0 (en) * 2009-12-24 2010-02-10 Edwards Ltd Pump
JP5908922B2 (ja) * 2010-12-10 2016-04-26 アテリエ ビスク ソシエテ アノニムＡｔｅｌｉｅｒ Ｂｕｓｃｈ ＳＡ 真空包装機に応用する真空ポンプ
GB2500610A (en) 2012-03-26 2013-10-02 Edwards Ltd Apparatus to supply purge gas to a multistage vacuum pump
GB2535703B (en) * 2015-02-23 2019-09-18 Edwards Ltd Gas supply apparatus
DE202017003212U1 (de) * 2017-06-17 2018-09-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
FR3092879B1 (fr) * 2019-02-14 2021-02-19 Pfeiffer Vacuum Pompe à vide primaire de type sèche
GB2590663B (en) * 2019-12-23 2022-06-29 Edwards S R O Vacuum pump
FR3119209B1 (fr) * 2021-01-25 2023-03-31 Pfeiffer Vacuum Pompe à vide de type sèche et groupe de pompage
GB2608381A (en) * 2021-06-29 2023-01-04 Edwards Korea Ltd Stator assembly for a roots vacuum pump
JP7692374B2 (ja) * 2022-01-14 2025-06-13 三菱重工業株式会社 放射性物質収納容器の乾燥装置および方法
GB2621854A (en) * 2022-08-24 2024-02-28 Edwards Korea Ltd Apparatus and method for delivering purge gas to a vacuum pump

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01177486A (ja) * 1987-12-28 1989-07-13 Ebara Corp 真空ポンプ
GB8809621D0 (en) * 1988-04-22 1988-05-25 Boc Group Plc Dry pump with closed loop filter
EP0365695B1 (de) * 1988-10-24 1992-11-25 Leybold Aktiengesellschaft Zweiwellenvakuumpumpe mit Schöpfraum
JP2733489B2 (ja) * 1989-05-10 1998-03-30 株式会社宇野澤組鐵工所 ガス希釈をともなう逆流冷却式多段ロータリー形真空ポンプ
EP0574442B1 (de) * 1991-03-04 1994-08-17 Leybold Aktiengesellschaft Einrichtung zur inertgasversorgung einer mehrstufigen trockenlaufenden vakuumpumpe
FR2691382B1 (fr) * 1992-05-22 1994-09-09 Cit Alcatel Installation de pompage pour pomper une enceinte contenant des gaz mélangés à des particules solides ou susceptibles de générer des particules ou condensats solides.
JP3494457B2 (ja) * 1993-07-07 2004-02-09 株式会社大阪真空機器製作所 真空ポンプ装置
JP3079077B2 (ja) * 1997-12-17 2000-08-21 古河電気工業株式会社 有機金属気相成長装置
JP2001304115A (ja) * 2000-04-26 2001-10-31 Toyota Industries Corp 真空ポンプにおけるガス供給装置
JP3758550B2 (ja) * 2001-10-24 2006-03-22 アイシン精機株式会社 多段真空ポンプ
TW200506217A (en) * 2003-03-19 2005-02-16 Ebara Corp Positive-displacement vacuum pump
JP4232505B2 (ja) * 2003-03-27 2009-03-04 アイシン精機株式会社 真空ポンプ

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