JP2009510321A - ガスをポンピングする方法 - Google Patents

ガスをポンピングする方法 Download PDF

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Publication number
JP2009510321A
JP2009510321A JP2008532854A JP2008532854A JP2009510321A JP 2009510321 A JP2009510321 A JP 2009510321A JP 2008532854 A JP2008532854 A JP 2008532854A JP 2008532854 A JP2008532854 A JP 2008532854A JP 2009510321 A JP2009510321 A JP 2009510321A
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Japan
Prior art keywords
stage
gas
pump
intake
slm
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Pending
Application number
JP2008532854A
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English (en)
Japanese (ja)
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JP2009510321A5 (enExample
Inventor
ピーター ヒュー バーチ
マイケル ロジャー チャーニアック
Original Assignee
エドワーズ リミテッド
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Application filed by エドワーズ リミテッド filed Critical エドワーズ リミテッド
Publication of JP2009510321A publication Critical patent/JP2009510321A/ja
Publication of JP2009510321A5 publication Critical patent/JP2009510321A5/ja
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Chemical Vapour Deposition (AREA)
JP2008532854A 2005-09-28 2006-09-06 ガスをポンピングする方法 Pending JP2009510321A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0519742.1A GB0519742D0 (en) 2005-09-28 2005-09-28 Method of pumping gas
PCT/GB2006/003286 WO2007036689A1 (en) 2005-09-28 2006-09-06 Method of pumping gas

Publications (2)

Publication Number Publication Date
JP2009510321A true JP2009510321A (ja) 2009-03-12
JP2009510321A5 JP2009510321A5 (enExample) 2009-10-01

Family

ID=35394887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008532854A Pending JP2009510321A (ja) 2005-09-28 2006-09-06 ガスをポンピングする方法

Country Status (6)

Country Link
US (1) US20090269231A1 (enExample)
EP (1) EP1931880A1 (enExample)
JP (1) JP2009510321A (enExample)
KR (1) KR20080049788A (enExample)
GB (1) GB0519742D0 (enExample)
WO (1) WO2007036689A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023103911A (ja) * 2022-01-14 2023-07-27 三菱重工業株式会社 放射性物質収納容器の乾燥装置および方法
JP2024506811A (ja) * 2021-01-25 2024-02-15 ファイファー バキユーム 乾式真空ポンプ式の真空ポンプおよび吸排気ユニット

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5481019B2 (ja) * 2007-06-05 2014-04-23 エドワーズ株式会社 真空ポンプ配管構造とその真空ポンプ配管の洗浄方法
GB0719394D0 (en) * 2007-10-04 2007-11-14 Edwards Ltd A multi stage clam shell vacuum pump
JP5102068B2 (ja) * 2008-02-29 2012-12-19 株式会社荏原製作所 多段真空ポンプ
GB0922564D0 (en) * 2009-12-24 2010-02-10 Edwards Ltd Pump
JP5908922B2 (ja) * 2010-12-10 2016-04-26 アテリエ ビスク ソシエテ アノニムＡｔｅｌｉｅｒ Ｂｕｓｃｈ ＳＡ 真空包装機に応用する真空ポンプ
GB2500610A (en) 2012-03-26 2013-10-02 Edwards Ltd Apparatus to supply purge gas to a multistage vacuum pump
GB2535703B (en) * 2015-02-23 2019-09-18 Edwards Ltd Gas supply apparatus
DE202017003212U1 (de) * 2017-06-17 2018-09-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
FR3092879B1 (fr) * 2019-02-14 2021-02-19 Pfeiffer Vacuum Pompe à vide primaire de type sèche
GB2590663B (en) * 2019-12-23 2022-06-29 Edwards S R O Vacuum pump
GB2608381A (en) * 2021-06-29 2023-01-04 Edwards Korea Ltd Stator assembly for a roots vacuum pump
GB2621854A (en) * 2022-08-24 2024-02-28 Edwards Korea Ltd Apparatus and method for delivering purge gas to a vacuum pump

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01177486A (ja) * 1987-12-28 1989-07-13 Ebara Corp 真空ポンプ
JPH02294589A (ja) * 1989-05-10 1990-12-05 Unozawagumi Tekkosho:Kk ガス希釈をともなう逆流冷却式多段ロータリー形真空ポンプ
JPH0727089A (ja) * 1993-07-07 1995-01-27 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ装置
JPH10209058A (ja) * 1997-12-17 1998-08-07 Furukawa Electric Co Ltd:The 有機金属気相成長装置
JP2003129978A (ja) * 2001-10-24 2003-05-08 Aisin Seiki Co Ltd 多段真空ポンプ
WO2004083643A1 (en) * 2003-03-19 2004-09-30 Ebara Corporation Positive-displacement vacuum pump

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8809621D0 (en) * 1988-04-22 1988-05-25 Boc Group Plc Dry pump with closed loop filter
EP0365695B1 (de) * 1988-10-24 1992-11-25 Leybold Aktiengesellschaft Zweiwellenvakuumpumpe mit Schöpfraum
EP0574442B1 (de) * 1991-03-04 1994-08-17 Leybold Aktiengesellschaft Einrichtung zur inertgasversorgung einer mehrstufigen trockenlaufenden vakuumpumpe
FR2691382B1 (fr) * 1992-05-22 1994-09-09 Cit Alcatel Installation de pompage pour pomper une enceinte contenant des gaz mélangés à des particules solides ou susceptibles de générer des particules ou condensats solides.
JP2001304115A (ja) * 2000-04-26 2001-10-31 Toyota Industries Corp 真空ポンプにおけるガス供給装置
JP4232505B2 (ja) * 2003-03-27 2009-03-04 アイシン精機株式会社 真空ポンプ

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01177486A (ja) * 1987-12-28 1989-07-13 Ebara Corp 真空ポンプ
JPH02294589A (ja) * 1989-05-10 1990-12-05 Unozawagumi Tekkosho:Kk ガス希釈をともなう逆流冷却式多段ロータリー形真空ポンプ
JPH0727089A (ja) * 1993-07-07 1995-01-27 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ装置
JPH10209058A (ja) * 1997-12-17 1998-08-07 Furukawa Electric Co Ltd:The 有機金属気相成長装置
JP2003129978A (ja) * 2001-10-24 2003-05-08 Aisin Seiki Co Ltd 多段真空ポンプ
WO2004083643A1 (en) * 2003-03-19 2004-09-30 Ebara Corporation Positive-displacement vacuum pump

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024506811A (ja) * 2021-01-25 2024-02-15 ファイファー バキユーム 乾式真空ポンプ式の真空ポンプおよび吸排気ユニット
JP2023103911A (ja) * 2022-01-14 2023-07-27 三菱重工業株式会社 放射性物質収納容器の乾燥装置および方法
JP7692374B2 (ja) 2022-01-14 2025-06-13 三菱重工業株式会社 放射性物質収納容器の乾燥装置および方法

Also Published As

Publication number Publication date
EP1931880A1 (en) 2008-06-18
GB0519742D0 (en) 2005-11-09
WO2007036689A1 (en) 2007-04-05
US20090269231A1 (en) 2009-10-29
KR20080049788A (ko) 2008-06-04

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