KR20080049788A - 가스 펌핑 방법 - Google Patents

가스 펌핑 방법 Download PDF

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Publication number
KR20080049788A
KR20080049788A KR1020087007439A KR20087007439A KR20080049788A KR 20080049788 A KR20080049788 A KR 20080049788A KR 1020087007439 A KR1020087007439 A KR 1020087007439A KR 20087007439 A KR20087007439 A KR 20087007439A KR 20080049788 A KR20080049788 A KR 20080049788A
Authority
KR
South Korea
Prior art keywords
gas
stage
gas stream
pumping
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020087007439A
Other languages
English (en)
Korean (ko)
Inventor
피터 휴 버치
마이클 로저 크제르니아크
Original Assignee
에드워즈 리미티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에드워즈 리미티드 filed Critical 에드워즈 리미티드
Publication of KR20080049788A publication Critical patent/KR20080049788A/ko
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020087007439A 2005-09-28 2006-09-06 가스 펌핑 방법 Ceased KR20080049788A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0519742.1A GB0519742D0 (en) 2005-09-28 2005-09-28 Method of pumping gas
GB0519742.1 2005-09-28

Publications (1)

Publication Number Publication Date
KR20080049788A true KR20080049788A (ko) 2008-06-04

Family

ID=35394887

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020087007439A Ceased KR20080049788A (ko) 2005-09-28 2006-09-06 가스 펌핑 방법

Country Status (6)

Country Link
US (1) US20090269231A1 (enExample)
EP (1) EP1931880A1 (enExample)
JP (1) JP2009510321A (enExample)
KR (1) KR20080049788A (enExample)
GB (1) GB0519742D0 (enExample)
WO (1) WO2007036689A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024042412A1 (en) * 2022-08-24 2024-02-29 Edwards Korea Limited Apparatus and method for delivering purge gas to a vacuum pump

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5481019B2 (ja) * 2007-06-05 2014-04-23 エドワーズ株式会社 真空ポンプ配管構造とその真空ポンプ配管の洗浄方法
GB0719394D0 (en) * 2007-10-04 2007-11-14 Edwards Ltd A multi stage clam shell vacuum pump
JP5102068B2 (ja) * 2008-02-29 2012-12-19 株式会社荏原製作所 多段真空ポンプ
GB0922564D0 (en) * 2009-12-24 2010-02-10 Edwards Ltd Pump
AU2011341031B2 (en) * 2010-12-10 2016-10-27 Ateliers Busch Sa Vacuum pump for applications in vacuum packaging machines
GB2500610A (en) * 2012-03-26 2013-10-02 Edwards Ltd Apparatus to supply purge gas to a multistage vacuum pump
GB2535703B (en) * 2015-02-23 2019-09-18 Edwards Ltd Gas supply apparatus
DE202017003212U1 (de) * 2017-06-17 2018-09-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
FR3092879B1 (fr) * 2019-02-14 2021-02-19 Pfeiffer Vacuum Pompe à vide primaire de type sèche
GB2590663B (en) * 2019-12-23 2022-06-29 Edwards S R O Vacuum pump
FR3119209B1 (fr) * 2021-01-25 2023-03-31 Pfeiffer Vacuum Pompe à vide de type sèche et groupe de pompage
GB2608381A (en) * 2021-06-29 2023-01-04 Edwards Korea Ltd Stator assembly for a roots vacuum pump
JP7692374B2 (ja) * 2022-01-14 2025-06-13 三菱重工業株式会社 放射性物質収納容器の乾燥装置および方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01177486A (ja) * 1987-12-28 1989-07-13 Ebara Corp 真空ポンプ
GB8809621D0 (en) * 1988-04-22 1988-05-25 Boc Group Plc Dry pump with closed loop filter
EP0365695B1 (de) * 1988-10-24 1992-11-25 Leybold Aktiengesellschaft Zweiwellenvakuumpumpe mit Schöpfraum
JP2733489B2 (ja) * 1989-05-10 1998-03-30 株式会社宇野澤組鐵工所 ガス希釈をともなう逆流冷却式多段ロータリー形真空ポンプ
EP0574442B1 (de) * 1991-03-04 1994-08-17 Leybold Aktiengesellschaft Einrichtung zur inertgasversorgung einer mehrstufigen trockenlaufenden vakuumpumpe
FR2691382B1 (fr) * 1992-05-22 1994-09-09 Cit Alcatel Installation de pompage pour pomper une enceinte contenant des gaz mélangés à des particules solides ou susceptibles de générer des particules ou condensats solides.
JP3494457B2 (ja) * 1993-07-07 2004-02-09 株式会社大阪真空機器製作所 真空ポンプ装置
JP3079077B2 (ja) * 1997-12-17 2000-08-21 古河電気工業株式会社 有機金属気相成長装置
JP2001304115A (ja) * 2000-04-26 2001-10-31 Toyota Industries Corp 真空ポンプにおけるガス供給装置
JP3758550B2 (ja) * 2001-10-24 2006-03-22 アイシン精機株式会社 多段真空ポンプ
JP2006520873A (ja) * 2003-03-19 2006-09-14 株式会社荏原製作所 容積型真空ポンプ
JP4232505B2 (ja) * 2003-03-27 2009-03-04 アイシン精機株式会社 真空ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024042412A1 (en) * 2022-08-24 2024-02-29 Edwards Korea Limited Apparatus and method for delivering purge gas to a vacuum pump

Also Published As

Publication number Publication date
EP1931880A1 (en) 2008-06-18
US20090269231A1 (en) 2009-10-29
WO2007036689A1 (en) 2007-04-05
JP2009510321A (ja) 2009-03-12
GB0519742D0 (en) 2005-11-09

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